Method for formation of protective coatings with quasi-plasticity properties

• US 6,322,671 B1
• Filed: 01/04/2000
• Issued: 11/27/2001
• Est. Priority Date: 01/04/2000
• Status: Expired due to Fees

• Current Assignee: Ionica PLC
• Original Assignee: Ionica PLC
• Inventors: Mingazhev, Askar Dzhamilevich
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): BARR, MICHAEL E
• Application Number:
  US09/477,607
• Time in Patent Office: 693 Days
• Field of Search: 427/248.1, 427/255.28, 427/255.11, 427/255.5, 427/288, 427/240, 427/294, 118/730, 204/192.1, 204/192.16
• US Class Current: 204/192.1
• CPC Class Codes: C23C 16/345 Silicon nitride
• CPC Class Codes: C23C 16/44 characterised by the method of coating C23C16/04 takes precedence
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species

Abstract

A process is described for forming integral coatings on metal and/or non-metallic substrate surfaces by the method of physical and chemical deposition in a vacuum of metal and/or non-metallic materials. The process, improved so as to obtain a coating with quasi-plasticity behavior, includes an action for depositing material onto substrate surfaces in the shape of multiple separated-in-space deposition zones of predetermined form and dimensions, and, also, an action for continuous migration of these deposition zones over the substrate surface during the whole of the coating formation process, while preserving a uniform coating thickness. In a particular embodiment, a protective high-temperature resistant NiCrAlY system coating is formed on a protected component by physical vapor deposition, which deposition is done through a screen having a series of narrow and long slots. The screen functions as a means for creating multiple separated-in-space deposition zones, and encloses the protected component along its contours with a 3-5 mm clearance. The screen rotates together with the protected component relative to the deposited material flow, so as to permit the continuous migration of the deposition zones over the protected component surface.

Claims

1. A process for a coating formation on a substrate surface, where said substrate is an airfoil of a gas turbine, by the method of deposition of material onto said substrate surface in vacuum, which process comprises the following principal steps:

location of said substrate in a vacuum device chamber in front of a deposited material source;

creation of the necessary vacuum in said chamber;

deposition of said material up to a predetermined thickness of said coating;

the improvement, comprising;

depositing said material in multiple separated-in-space deposition zones onto said substrate surface;

constantly migrating said separated-in-space deposition zones over said substrate surface within said coating formation process.

2. A process for a coating formation, as claimed in claim 1, wherein said step of depositing said material comprises dividing a flow of said deposited material into a multitude of separated-in-space flows.

3. A process for a coating formation, as claimed in claim 2, wherein:

said step of dividing said flow comprises placing in said flow between said substrate and said deposition material source a screen with holes; and

said step of constantly migrating separated-in-space deposition zones comprises movement of said substrate relative to said separated-in-spaces flows.

4. A process for a coating formation, as claimed in claim 3, wherein said movement of said substrate relative to said separated-in-space flows comprises movement of said screen relative to said flow.

5. A process for a coating formation, as claimed in claim 4, wherein the screen comprises a plate with said holes being multiple slots, oriented and distributed over said surface along a rotation axis of said airfoil, while said rotation axis is oriented across said flow.

6. A process for a coating formation, as claimed in claim 5, wherein said plate is curved so as to enclose contours of the whole of said substrate surface, with a clearance between said plate and said substrate surface wide enough to provide said migration of said deposition zones due to said rotation of said airfoil around said rotation axis.

7. A process for a coating formation, as claimed in claim 6, wherein:

said plate is located along said contour equidistantly to said substrate surface; and

said rotation of said substrate is done in conjunction with said plate.

8. A process for a coating formation, as claimed in claim 7, wherein at least one additional screen with holes is used, located between said deposited material source and said first screen.

9. A process for a coating formation, as claimed in claim 8, wherein:

said additional screen comprises an additional plate with holes;

said additional plate is curved along a closed contour enclosing said first screen, while between said additional screen and said first screen there in a clearance, providing free movement of said additional screen relative to said first screen;

while said rotation of said airfoil is done, rotation of said additional screen relative to said rotation axis is done.

10. A process for a coating formation, as claimed in claim 9, wherein:

said holes of said additional screen are similar to said holes of said first screen;

said additional screen is located equidistantly to said first screen;

said rotation of said additional screen is done in conjunction with said first screen.

11. A process for forming a coating on a gas turbine airfoil, the process comprising the steps of:

placing said airfoil in a vacuum chamber;

creating a vacuum in said vacuum chamber;

directing a coating material toward said airfoil in multiple separated-in-space deposition zones onto the surface of said airfoil; and

migrating said multiple separated-in-space deposition zones over the surface.

12. The process of claim 11, wherein said step of directing coating material toward said airfoil comprises performing a chemical vapor deposition process.

13. The process of claim 11, wherein said step of directing coating material toward said airfoil comprises performing a physical vapor deposition process.

14. The process of claim 11, wherein said step of directing coating material toward said airfoil comprises performing a sputtering process.

15. The process of claim 11, wherein said step of directing a coating material toward said airfoil in multiple separated-in-space deposition zones onto said surface comprises placing a screen between said airfoil and a source of the coating material.

16. The process of claim 15, wherein said step of placing a screen between said airfoil and said source of said coating material comprises spacing said screen apart from said surface.

17. The process of claim 16, wherein said step of migrating said multiple separated-in-space deposition zones over said surface comprises moving said airfoil relative to said source of said coating material.

18. The process of claim 17, wherein said step of moving said airfoil relative to said source of coating material comprises rotating said airfoil and said screen relative to a flow of coating material.