Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases

• US 6,322,756 B1
• Filed: 05/07/1999
• Issued: 11/27/2001
• Est. Priority Date: 12/31/1996
• Status: Expired due to Term

• Current Assignee: BHT Services Pte., Ltd.
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Lane, Scott, Arno, Jose I., Carpenter, Kent, Holst, Mark
• Primary Examiner(s): TRAN, HIEN THI
• Application Number:
  US09/307,058
• Time in Patent Office: 935 Days
• Field of Search: 422/171, 422/172, 422/173, 423/555, 423/210, 554/31, 555/22
• US Class Current: 422/171
• CPC Class Codes: B01D 2251/104 Ozone
• CPC Class Codes: B01D 53/14 by absorption
• CPC Class Codes: B01D 53/50 Sulfur oxides B01D53/60 takes precedence
• CPC Class Codes: B01D 53/56 Nitrogen oxides B01D53/60 takes precedence
• CPC Class Codes: B01D 53/62 Carbon oxides
• CPC Class Codes: B01D 53/68 Halogens or halogen compounds
• CPC Class Codes: B01D 53/70 Organic halogen compounds
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: Y02C 20/30 of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Abstract

An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises an oxidation unit to which an oxygen-containing gas such as ozone may be added, with input of energy (e.g., thermal, radio frequency, electrical, microwave, etc.), to effect oxidation of oxidizable species in the effluent, such as halocompounds (e.g., chlorofluorocarbons, perfluorocarbons), CO, NF₃, nitrogen oxides, and sulfur oxides). The effluent gas stream treatment system may include a wet scrubber associated with the oxygen-containing gas source, so that the gas stream is contacted with the oxygen-containing gas during the wet scrubbing operation, to enhance removal of oxidizable species in the gas stream during treatment.

Claims

1. A gas stream treatment system for treating a gas stream from an upstream source, the gas stream including an oxidizable component comprising:

an oxidation unit arranged to receive a gas stream including an oxidizable component from an upstream unit in the gas stream treatment system and impose oxidization conditions on the gas stream to reduce the oxidizable component thereof;

a pre-oxidation scrubber unit upstream of the oxidation unit and communicatively connected thereto for removing scrubbable components from the gas stream and discharging the gas stream to the oxidation unit;

a post-oxidation scrubber unit downstream of the oxidation unit and in fluid stream-receiving relationship thereto for receiving the gas stream from the oxidation unit to remove scrubbable components from the gas stream; and

an oxygen-containing gas source arranged communicatively connected to the gas stream treatment system to provide oxygen-containing gas for enhancement of reduction of the oxidizable component of the gas stream in the system.

2. A gas stream treatment system according to claim 1, wherein the oxygen-containing gas includes at least one oxidant selected from the group consisting of oxygen, ozone, air, oxygen-enriched air, atomic oxygen, OH ion, and peroxy species.

3. A gas stream treatment system according to claim 1, wherein the oxygen-containing gas includes ozone.

4. A gas stream treatment system according to claim 1, comprising a pre-oxidation scrubber unit.

5. A gas stream treatment system according to claim 1, comprising a post-oxidation scrubber unit.

6. A gas stream treatment system according to claim 1, comprising a pre-oxidation scrubber unit and a post-oxidation scrubber unit.

7. A gas stream treatment system according to claim 1, wherein the oxygen-containing gas is flowed into the oxidation unit.

8. A gas stream treatment system according to claim 7, wherein the oxygen-containing gas includes ozone.

9. A gas stream treatment system according to claim 1, wherein the oxygen-containing gas is flowed into the gas stream upstream of the oxidation unit.

10. A gas stream treatment system according to claim 9, wherein the oxygen-containing gas includes ozone.

11. A gas stream treatment system according to claim 1, wherein the oxygen-containing gas is flowed directly into the oxidation unit, and also into the gas stream upstream of the oxidation unit.

12. A gas stream treatment system according to claim 11, wherein the oxygen-containing gas includes ozone.

13. A gas stream treatment system according to claim 3, wherein the oxygen-containing gas is flowed into the pre-oxidation scrubber unit.

14. A gas stream treatment system according to claim 13, wherein the oxygen-containing gas includes ozone.

15. A gas stream treatment system according to claim 3, wherein the oxygen-containing gas is flowed into the gas stream upstream of the pre-oxidation scrubber unit.

16. A gas stream treatment system according to claim 15, wherein the oxygen-containing gas includes ozone.

17. A gas stream treatment system according to claim 3, wherein the oxygen-containing gas is flowed directly into the pre-oxidation scrubber unit, and also into the gas stream upstream of the pre-oxidation scrubber unit.

18. A gas stream treatment system according to claim 17, wherein the oxygen-containing gas includes ozone.

19. A gas stream treatment system according to claim 4, wherein the oxygen-containing gas is flowed into the post-oxidation scrubber unit.

20. A gas stream treatment system according to claim 19, wherein the oxygen-containing gas includes ozone.

21. A gas stream treatment system according to claim 4, wherein the oxygen-containing gas is flowed into the gas stream upstream of the post-oxidation scrubber unit.

22. A gas stream treatment system according to claim 21, wherein the oxygen-containing gas includes ozone.

23. A gas stream treatment system according to claim 4, wherein the oxygen-containing gas is flowed directly into the post-oxidation scrubber unit, and also into the gas stream upstream of the post-oxidation scrubber unit.

24. A gas stream treatment system according to claim 23, wherein the oxygen-containing gas includes ozone.

25. A gas stream treatment system according to claim 1, wherein the gas stream comprises an effluent gas stream of a semiconductor manufacturing facility.

26. A gas stream treatment system according to claim 1, wherein the system is coupled in effluent gas-receiving relationship to an upstream source which is a semiconductor manufacturing facility.

27. A gas stream treatment system according to claim 1, wherein the oxidizable component of the gas stream includes a halocompound.

28. A gas stream treatment system according to claim 27, wherein a halo constituent of the halocompound is selected from chlorine and fluorine.

29. A gas stream treatment system according to claim 27, wherein the halocompound comprises at least one species selected from the group consisting of chlorofluorocarbons and perfluorocarbons.

30. A gas stream treatment system according to claim 1, wherein the oxidizable component of the gas stream includes at least one gas species selected from the group consisting of hydride gaseous species, halide gaseous species, CO, gaseous nitrogen oxides and gaseous sulfur oxides.

31. A gas stream treatment system according to claim 1, wherein the oxidizable component of the gas stream includes at least one gas species selected from th e group consisting of chlorofluorocarbons, perfluorocarbons, nitrogen perfluorocompounds, CO, nitrogen oxides and sulfur oxides.

32. A gas stream treatment system according to claim 1, wherein the oxidation unit comprises an oxidizer selected from the group consisting of thermal oxidizers, electrothermal oxidizers, catalytic oxidizers, flame-based oxidizers, fluidized bed thermal oxidizers, plasma oxidizers, and transpirative oxidizers.

33. A gas stream treatment system according to claim 1, wherein the pre-oxidation scrubber unit contains a scrubbing medium for contact with the gas stream, and wherein the oxygen-containing gas source is arranged for introducing oxygen-containing gas into the scrubbing medium prior to use thereof in the scrubber unit.

34. A gas stream treatment unit according to claim 33, wherein the oxygen-containing gas is ozone.

35. A gas stream treatment unit according to claim 33, wherein the oxygen-containing gas is oxygen.