Circulating system for shaft-type linear motors

• US 6,323,567 B1
• Filed: 12/24/1999
• Issued: 11/27/2001
• Est. Priority Date: 12/24/1999
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J., Ono, Kazuya
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US09/471,296
• Time in Patent Office: 704 Days
• Field of Search: 310/12, 310/13, 310/14
• US Class Current: 310/12.29
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence
• CPC Class Codes: H02K 9/197 in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator

Abstract

A circulating system (10) for cooling a shaft-type linear motor (12) is provided herein. The motor (12) includes a magnet array (22) and a coil assembly (16). The circulating system (10) includes coil housing (36) that encircles the coil assembly (16) and defines a fluid passageway (46) between the coil housing (36) and the coil assembly (16). Fluid (44) from a fluid source (42) is forced through an inlet (38) into the fluid passageway (46). The flow rate of the fluid (44) is controlled to maintain an outer surface (111) of the coil housing (36) at a set temperature to control the effect of the motor (12) on the surrounding environment and the surrounding components.

Claims

1. A shaft-type linear motor adapted for use with a fluid source including a fluid, the motor comprising:

a magnet array;

a tubular shaped coil assembly that encircles a portion of the magnet array;

a circulating system that circulates the fluid, the circulating system including (i) a coil housing having a tubular shaped, housing cavity which is sized and shaped to receive the coil assembly and provide a fluid passageway between the coil housing and the coil assembly, and (ii) an inlet into the fluid passageway, the inlet being in fluid communication with the fluid source so that fluid from the fluid source can be supplied to the fluid passageway.

2. The motor of claim 1 including a plurality of spaced apart coil supports, each coil support extending between the coil housing and the coil assembly for securing the coil assembly spaced apart from the coil housing.

3. The motor of claim 2 wherein at least one of the coil supports is arc shaped.

4. The motor of claim 1 wherein the fluid is used for cooling the coil assembly.

5. A stage device including the motor of claim 1.

6. The motor of claim 1 wherein the coil housing includes a first end section and a second end section, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section.

7. The motor of claim 6 wherein the inlet extends into the fluid passageway near the first end section and wherein the circulating system includes an outlet which extends into the fluid passageway near the second end section.

8. The motor of claim 6 including (i) at least two inlets into the fluid passageway, each inlet being in fluid communication with the fluid source, each inlet extending into the fluid passageway near one of the end sections, and (ii) an outlet which extends into the fluid passageway substantially intermediate the end sections.

9. The motor of claim 6 including at least two inlets into the fluid passageway, each inlet being in fluid communication with the fluid source, wherein one of the inlets is a primary inlet and one of the inlets is a secondary inlet, and wherein the fluid source supplies fluid at a greater rate to the primary inlet than the secondary inlet.

10. The motor of claim 6 including a second fluid passageway, wherein in the fluid passageway the fluid flows toward the second end section from the first end section, and in the second fluid passageway the fluid flows toward the first end section from the second end section.

11. An exposure apparatus including the motor of claim 1.

12. An object on which an image has been formed by the exposure apparatus of claim 11.

13. A motor combination comprising the motor of claim 1 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

14. The motor of claim 1 wherein the coil assembly includes a plurality of tubular shaped coils that are secured together substantially side by side along a coil axis.

15. A method for cooling a shaft-type linear motor, the motor including a magnet array and a tubular shaped coil assembly, the method comprising the steps of:

providing a coil housing that encircles at least a portion of the magnet array, the coil housing including a tubular shaped housing cavity that is sized and shaped to receive the coil assembly and define a fluid passageway between the coil housing and the coil assembly;

positioning the coil assembly in the housing cavity; and

directing a fluid through the fluid passageway to cool the coil assembly.

16. The method of claim 15 including the step of securing the coil assembly to the coil housing with a plurality of spaced apart coil supports, the coil supports maintaining the coil assembly spaced apart from the coil housing.

17. The method of claim 15 including the step of controlling the rate of flow of the fluid so that an outer surface of the coil housing is maintained at a set temperature.

18. A method for making a linear motor adapted for use with a fluid source including a fluid, the method comprising the steps of:

providing a magnet array;

providing a tubular shaped coil assembly that encircles a portion of the magnet array; and

providing a circulating system including a coil housing having a first body section that is sized and shaped to substantially encircle at least a portion of the coil assembly and provide a fluid passageway between the coil housing and the coil assembly, and an inlet into the fluid passageway to being in fluid communication with the fluid source so that the fluid from the fluid source can be supplied to the fluid passageway.

19. A method for making an exposure apparatus that forms an image on an object, the method comprising the steps of:

providing an irradiation apparatus that irradiates the object with radiation to form the image on the object; and

providing the motor made by the method of claim 18.

20. A method of making a device utilizing the exposure apparatus made by the method of claim 19.

21. The method of claim 18 including the step of controlling the rate of flow of the fluid from the fluid source so that an outer surface of the coil housing is maintained at a set temperature.

22. The method of claim 18 wherein the step of providing a tubular shaped coil assembly includes the step of securing a plurality of tubular shaped coils together substantially side by side along a coil axis.

23. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section which is sized and shaped to substantially encircle at least a portion of the coil assembly, the coil housing including a first end section and a second end section, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section;

a first fluid passageway between the coil housing and the coil assembly including a first inlet which is in fluid communication with the fluid source so that the fluid from the fluid source flows toward the second end section from the first end section; and

a second fluid passageway between the coil housing and the coil assembly including a second inlet which is in fluid communication with the fluid source so that the fluid from the fluid source flows toward the first end section from the second end section.

24. A motor including a magnet array, a coil assembly, and the circulating system of claim 23.

25. The motor of claim 24 wherein the coil assembly is substantially tubular shaped and encircles a portion of the magnet array.

26. A motor combination comprising the motor of claim 24 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

27. An exposure apparatus including the motor of claim 24.

28. An object on which an image has been formed by the exposure apparatus of claim 27.

29. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section which is sized and shaped to substantially encircle at least a portion of the coil assembly and provide a fluid passageway between the coil housing and the coil assembly, the coil housing including a first end section and a second end section, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section;

at least two inlets into the fluid passageway, each inlet being in fluid communication with the fluid source so that fluid from the fluid source can be supplied to the fluid passageway, each inlet extending into the fluid passageway near one of the end sections; and

an outlet that extends into the fluid passageway substantially intermediate the end sections.

30. A motor including a magnet array, a coil assembly, and the circulating system of claim 29.

31. A motor combination comprising the motor of claim 30 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

32. An exposure apparatus including the motor of claim 30.

33. An object on which an image has been formed by the exposure apparatus of claim 32.

34. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section which is sized and shaped to substantially encircle at least a portion of the coil assembly and provide a fluid passageway between the coil housing and the coil assembly; and

at least two inlets into the fluid passageway, each inlet being in fluid communication with the fluid source so that fluid from the fluid source can be supplied to the fluid passageway, one of the inlets being a primary inlet and one of the inlets being a secondary inlet, the fluid source supplying fluid at a greater rate to the primary inlet than the secondary inlet.

35. The circulating system of claim 34 wherein the coil housing includes a first end section and a second end section, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section and wherein the primary inlet extends into the fluid passageway near the first end section and the secondary inlet extends into the first passageway near the second end section.

36. A motor including a magnet array, a coil assembly, and the circulating system of claim 34.

37. The motor of claim 36 wherein the coil assembly is substantially tubular shaped and encircles a portion of the magnet array.

38. A motor combination comprising the motor of claim 36 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

39. An exposure apparatus including the motor of claim 36.

40. An object on which an image has been formed by the exposure apparatus of claim 39.

41. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section, a second body section, a first end section and a second end section, the first body section being sized and shaped to substantially encircle at least a portion of the coil assembly and provide a fluid passageway between the coil housing and the coil assembly, the second body section being sized and shaped to be substantially encircled by the coil assembly, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section; and

an inlet into the fluid passageway, the inlet being in fluid communication with the fluid source so that fluid from the fluid source can be supplied to the fluid passageway.

42. A motor including a magnet array, a coil assembly, and the circulating system of claim 41.

43. The motor of claim 42 wherein the coil assembly substantially encircles a portion of the magnet array.

44. A motor combination comprising the motor of claim 42 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

45. An exposure apparatus including the motor of claim 42.

46. An object on which an image has been formed by the exposure apparatus of claim 45.

47. A method for cooling a shaft-type linear motor, the motor including a magnet array and a tubular shaped coil assembly, the method comprising the steps of:

providing a coil housing including a tubular shaped housing cavity that is sized and shaped to receive the coil assembly and define a fluid passageway between the coil housing and the coil assembly, the coil housing having an outer surface;

positioning the coil assembly in the housing cavity;

directing a fluid through the fluid passageway to cool the coil assembly; and

controlling the rate of flow of the fluid so that the outer surface of the coil housing is maintained at a set temperature.

48. The method of claim 47 wherein the step of providing a coil housing includes providing a coil housing that encircles at least a portion of the magnet array.

49. A method for making an exposure apparatus that forms an image on an object, the method comprising the steps of:

providing an irradiation apparatus that irradiates the object with radiation to form the image on the object; and

providing a motor as a driving force for moving the object; and

connecting the cooling device that utilizes the method of claim 47.

50. A method of making a device utilizing the exposure apparatus made by the method of claim 49.

51. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section which is sized and shaped to substantially encircle at least a portion of the coil assembly;

a first fluid passageway positioned near the coil assembly which is in fluid communication with the fluid source so that the fluid from the fluid source flows in a first direction in the first fluid passageway; and

a second fluid passageway positioned near the coil assembly which is in fluid communication with the fluid source so that the fluid from the fluid source flows in a second direction in the second fluid passageway.

52. The circulating system of claim 51 wherein the second direction is substantially opposite from the first direction.

53. The circulating system of claim 51 wherein the coil housing includes a first end section and a second end section, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section.

54. The circulating system of claim 53 wherein the first fluid passageway includes a first inlet which is in fluid communication with the fluid source and the second fluid passageway includes a second inlet which is in fluid communication with the fluid source and wherein the first inlet is positioned near the first end section and the second inlet is positioned near the second end section.

55. A motor including a magnet array, a coil assembly, and the circulating system of claim 51.

56. The motor of claim 55 wherein the coil assembly substantially encircles a portion of the magnet array.

57. A motor combination comprising the motor of claim 55 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

58. An exposure apparatus including the motor of claim 55.

59. An object on which an image has been formed by the exposure apparatus of claim 58.

60. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section which is sized and shaped to substantially encircle at least a portion of the coil assembly and provide a fluid passageway between the coil housing and the coil assembly, the coil housing including a first end section and a second end section, the end sections being spaced apart sufficiently so that the coil assembly fits between the first end section and the second end section; and

an outlet that extends into the fluid passageway substantially intermediate the end sections.

61. The circulating system of claim 60 including a first inlet and a second inlet into the fluid passageway, each inlet being in fluid communication with the fluid source, wherein the outlet is positioned between the first inlet and the second inlet.

62. A motor including a magnet array, a coil assembly, and the circulating system of claim 60.

63. A motor combination comprising the motor of claim 62 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

64. An exposure apparatus including the motor of claim 62.

65. An object on which an image has been formed by the exposure apparatus of claim 64.

66. A circulating system adapted for use with a fluid from a fluid source for a motor, the motor including a coil assembly, the circulating system comprising:

a coil housing including a first body section and a second body section, the first body section being sized and shaped to substantially encircle at least a portion of the coil assembly and provide a fluid passageway between the coil housing and the coil assembly, the second body section being sized and shaped to be substantially encircled by the coil assembly.

67. The circulating system of claim 66 including an inlet into the fluid passageway, the inlet being in fluid communication with the fluid source so that fluid from the fluid source can be supplied to the fluid passageway.

68. A motor including a magnet array, a coil assembly, and the circulating system of claim 66.

69. A motor combination comprising the motor of claim 68 and a fluid source, wherein the rate of flow of the fluid from the fluid source is controlled so that an outer surface of the coil housing is maintained at a set temperature.

70. An exposure apparatus including the motor of claim 68.

71. An object on which an image has been formed by the exposure apparatus of claim 70.

72. A motor comprising:

a magnet array;

a tubular shaped coil assembly; and

a circulating system that circulates a fluid, the circulating system including (i) a coil housing that receives the coil assembly and provides a fluid passageway near the coil assembly, the coil housing including an outer surface and (ii) a fluid source that supplies the fluid, wherein the rate of flow of the fluid from the fluid source is controlled so that the outer surface of the coil housing is maintained at a set temperature.

73. The motor of claim 72 wherein the coil assembly and the coil housing substantially encircle a portion of the magnet array.

74. An exposure apparatus including the motor of claim 77.

75. An object on which an image has been formed by the exposure apparatus of claim 74.