Topographical electrostatic protection grid for sensors
First Claim
Patent Images
1. A method of forming an electrostatic discharge device comprising:
- forming a composite insulating layer between and over a plurality of conductive plates, wherein a gap is formed between portions of the insulating layer over adjacent plates and wherein the insulating layer isolates the conductive plates and protects the conductive plates from damage; and
forming an electrostatic discharge region disposed, in the area over the conductive plates, only in the gap between portions of the insulating layer over adjacent plates.
1 Assignment
0 Petitions
Accused Products
Abstract
A structure and method for dissipating charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry a gap being formed conformally between adjacent plates and a topographic discharge grid over the underlying dielectric layer and wherein the topographic discharge grid fills at least a portion of the gap between the plates over the dielectric layer and diffuses electrostatic charges at the surface of the integrated circuit.
33 Citations
30 Claims
-
1. A method of forming an electrostatic discharge device comprising:
-
forming a composite insulating layer between and over a plurality of conductive plates, wherein a gap is formed between portions of the insulating layer over adjacent plates and wherein the insulating layer isolates the conductive plates and protects the conductive plates from damage; and
forming an electrostatic discharge region disposed, in the area over the conductive plates, only in the gap between portions of the insulating layer over adjacent plates. - View Dependent Claims (2)
-
-
3. A method of forming an electrostatic discharge device comprising:
-
forming a conformal dielectric layer over a plurality of conductive plates with lower topographical regions between adjacent plates, the dielectric layer isolating and protecting the conductive plates from damage; and
forming a topographic discharge grid over the dielectric layer in at least a portion of the lower topographical regions between portions of the dielectric layer over one or more adjacent pairs of the conductive plates but not over the portions of the dielectric layer over one or more adjacent pairs of the conductive plates, wherein the topographic discharge grid dissipates an electrostatic charge in a manner that prevents the electrostatic charge from reaching the plurality of conductive plates. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
forming a passivation layer disposed over at least a portion of the dielectric layer over the conductive plates and adjacent the topographic discharge grid, wherein an upper surface of the topographical discharge grid is substantially planar with an upper surface of the passivation layer.
-
-
24. The method of claim 23, further comprising:
forming the passivation layer prior to forming the topographic discharge grid.
-
25. The method of claim 24, wherein the passivation layer has an optimum thickness to prevent damage to the underlying conductive plates due to use and environment while also allowing the topographic discharge grid to be formed in the gap between adjacent plates with sufficient conductivity to dissipate an electrostatic discharge.
-
26. The method of claim 3, wherein the topographic discharge grid fills the lower topographical regions between portions of the dielectric layer over one or more adjacent pairs of the conductive plates.
-
27. The method of claim 3, wherein the topographic discharge grid fills the lower topographical regions between portions of the dielectric layer over one or more adjacent pairs of the conductive plates and any space between regions of the passivation layer overlying the dielectric layer.
-
28. The method of claim 24, wherein the passivation layer comprises silicon carbide.
-
29. The method of claim 24, wherein the passivation layer comprises silicon nitride.
-
30. The method of claim 24, wherein the passivation layer has a thickness of between approximately 2,000 and 3,000 angstroms.
Specification