Opto-electronic shutter

• US 6,327,073 B1
• Filed: 09/03/1999
• Issued: 12/04/2001
• Est. Priority Date: 03/07/1997
• Status: Expired due to Term

• Current Assignee: I/P Engine, Inc. (XpresSpa Group, Inc. (f/k/a FORM Holdings Corp.))
• Original Assignee: 3DV Systems Ltd. (Microsoft Corporation)
• Inventors: Yahav, Giora, Iddan, Gavriel J.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US09/380,788
• Time in Patent Office: 823 Days
• Field of Search: 250/207, 250/214.VT, 313/528, 313/529, 313/542, 313/543, 359/241, 359/243, 359/244, 359/245, 359/254, 359/321
• US Class Current: 359/321
• CPC Class Codes: H01J 31/502 with means to interrupt the beam, e.g. shutter for high speed photography circuits using electron-beam shutters G03B27/725

Abstract

An optoelectronic shutter for radiation, comprising an input plate and an output plate, comprising material substantially transparent to the radiation, each plate having an outer and an inner surface, wherein a recess is formed in the inner surface of at least one of the plates, and wherein respective non-recessed portions of the inner surfaces of the plates are bonded together, and the recess defines a vacuum chamber enclosed by the two plates; a photocathode fixed to the inner surface of the input plate, adjacent the chamber, and a photo-emissive anode, fixed to the inner surface of the output plate, adjacent the chamber and opposite the photocathode.

Claims

1. An optoelectronic shutter, comprising:

an input plate and an output plate, comprising material substantially transparent to input and output radiation respectively, each plate having an outer and an inner surface,

wherein a recess is formed in the inner surface of at least one of the plates, and

wherein respective non-recessed portions of the inner surfaces of the plates are bonded together, and the recess defines a vacuum chamber enclosed by the two plates;

a photocathode, fixed to the inner surface of the input plate, adjacent the chamber;

a photoluminescent anode, fixed to the inner surface of the output plate, adjacent the chamber and opposite the photocathode; and

means for providing a potential difference between the photocathode and the anode.

2. A shutter according to claim 1, wherein the recess is formed using Micro-Electromechanical System technology.

3. A shutter according to claim 1, wherein substantially similar recesses are formed in the inner surfaces of both the plates.

4. A shutter according to claim 1, wherein electrons emitted by the photocathode pass through the chamber and strike the anode, respective to a trigger pulse applied to the shutter.

5. A shutter according to claim 4, wherein the electrons pass through the chamber substantially without defocusing.

6. A shutter according to claim 4, wherein there are no external electromagnetic fields applied to the shutter for the purposes of electron focusing.

7. A shutter according to claim 4, wherein the shutter does not include a microchannel plate.

13. A shutter according to claim 1, wherein at least one of the plates comprises quartz.

14. A shutter according to claim 1, wherein at least one of the plates comprises glass.

15. A shutter according to claim 1, wherein at least one of the plates comprises a semiconductor material.

16. A shutter according to claim 1, wherein the photocathode comprises CdSe.

17. A shutter according to claim 1, wherein the photocathode comprises a planar diode.

18. A shutter according to claim 1, wherein the anode comprises ZnS.

19. A shutter according to claim 1, wherein the anode comprises an electron sensitive phosphor.

20. A shutter according to claim 1, wherein the means for providing a potential difference comprises a transparent, conductive coating on the outer surfaces of both plates and on the inner surface of one of the plates.

21. A shutter according to claim 20, wherein the means for providing a potential difference further comprises a metal coating on at least a portion of each of the outer surfaces of both plates and over the inner surface of the one of the plates having the transparent, conductive coating, wherein the metal coating is situated along the periphery of and electrically coupled to the transparent, conductive coating thereon.

22. A shutter according to claim 20, wherein the means for providing a potential difference comprises electrical leads electrically coupled to the conductive coatings on the outer surfaces of both plates and on the inner surface of the one of the plates.

23. A shutter according to claim 1, wherein the means for providing a potential difference comprises:

a first transparent, conductive coating on the inner surface of the input plate, between the plate and the photocathode;

a second transparent, conductive coating on the inner surface of the output plate, between the plate and the anode; and

a third transparent, conductive coating on the inner surface of the one of the input and output plates, intermediate the photocathode and the anode.

24. A shutter according to claim 23, wherein the means for providing comprises first, second and third metal coatings on portions of the inner surfaces of the input and output plates, wherein the metal coatings are situated along the periphery of and electrically coupled to the first, second and third transparent conductive coatings, respectively.

25. A shutter according to claim 24, and comprising an electrically insulating layer intermediate two of the metal coatings.

26. A shutter according claim 22, wherein the means for providing a potential difference comprises electrical leads coupled to the transparent, conductive coatings.

27. A shutter according to claim 22, wherein one of the input and output plates has a notch formed therein, the notch providing access to at least one of the coatings on the inner surface of one of the plates, and wherein one of the electrical leads is fastened to the coating exposed within the notch.

28. A shutter according claim 1, wherein the anode is electrically negatively biased by said potential difference relative to the photocathode.

29. A shutter according to claim 28, wherein the anode is biased relative to the photocathode by a biasing voltage substantially less than 1000 VDC.

30. A shutter according to claim 29, wherein the biasing voltage is less than or equal to 500 VDC.

31. A shutter according to claim 30, wherein the biasing voltage is substantially in the range 300-500 VDC.

32. A shutter according to claim 1, wherein the overall thickness of the shutter, measured between the outer surfaces of the input and output plates, is substantially less than 20 mm.

33. A shutter according to claim 32, wherein the overall thickness of the shutter is less than or equal to 10 mm.

34. A shutter according to claim 33, wherein the overall thickness is substantially in the range 1-10 mm.

35. A shutter according to claim 1, wherein the shape of the shutter, as defined by the shape of a clear aperture thereof, is substantially rectangular.

36. A shutter according to claim 1, and comprising a getter inside the chamber.

37. A shutter according to claim 1, wherein the output plate comprises a fiber optic face plate.

38. A shutter according to claim 1, wherein the output plate is comprised of a non-conducting material.

39. A shutter according to claim 1, wherein the input plate is comprised of a non-conducting material.

8. An optoelectronic shutter for radiation, comprising:

an input plate and an output plate, of material substantially transparent to the radiation, each plate having an outer and an inner surface, the plates defining and enclosing a vacuum chamber therebetween;

a photocathode, fixed to the inner surface of the input plate, adjacent the chamber;

a photoluminescent anode, fixed to the inner surface of the output plate, adjacent the chamber and opposite the photocathode; and

means for providing a potential difference between the photocathode and the anode;

wherein electrons emitted by the photocathode pass through the chamber and strike the anode, responsive to a trigger pulse applied to the shutter, the distance between the photocathode and the anode being such that the electrons strike the anode substantially without defocusing,

wherein there are no electromagnetic fields, other than those providing said potential difference between the photocathode and the anode, applied to the shutter for the purpose of electron focusing, and

wherein the shutter does not include a microchannel plate.

9. A shutter according to claim 8, wherein other than fields due to the trigger pulse and to the potential difference applied between the photocathode and the anode, there are no electromagnetic fields applied to the shutter.

10. A shutter according to claim 8, wherein the trigger pulse has a peak voltage substantially less than 50 volts.

11. A shutter according to claim 10, wherein the peak voltage is less than or equal to 20 volts.

12. A shutter according to claim 11, wherein the peak voltage is substantially in the range 10-20 volts.

40. A method for producing an optoelectronic shutter for radiation, comprising:

providing first and second plates of material substantially transparent to the radiation, each plate having a first and a second surface;

etching a recess in the first surface of at least one of the plates;

depositing photocathode material on the first surface of the first plate;

depositing photoluminescent anode material on the first surface of the second plate;

providing means for impressing an electric field between the photocathode and the anode; and

bonding the first surface of the first plate to the first surface of the second plate to form an evacuated chamber between the plates, which chamber comprises the recess;

wherein depending the photocathode and anode materials comprises depositing the materials over portions of the respective first surfaces of the plates that adjoin the chamber.

41. A method according to claim 40, wherein etching the recess in the first surface of at least one of the plates comprises etching recesses in the first surfaces of both of the plates.

42. A method according to claim 40, wherein depositing photocathode material comprises doping an outer layer on the first plate to produce a planar diode.

43. A method according to claim 40, wherein providing means for impressing a potential difference includes depositing a transparent, conductive coating on the second surfaces of both plates and on the first surface of one of the plates.

44. A method according to claim 43, wherein providing means for impressing a potential difference comprises depositing a metal coating on the surfaces on which the transparent, conductive coating has been deposited, wherein the metal coating is deposited along the periphery of and in electrical contact with the transparent, conductive coating.

45. A method according to claim 44, and wherein providing means for impressing a potential difference comprises fixing an electrical contact to the metal coating.

46. A method according to claim 45, and comprising forming a notch in an edge of one of the first and second plates to provide access to the metal coating, wherein fixing the electrical contact to the metal coating comprises fixing the contact within the notch.

47. A method according to claim 40, and comprising potting the shutter.

48. A shutter according to the method of claim 40.