Microgyroscope having asymmetric comb sensors

• US 6,327,907 B1
• Filed: 12/30/1999
• Issued: 12/11/2001
• Est. Priority Date: 06/04/1999
• Status: Expired due to Term

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Park, Kyu-Yeon
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US09/475,168
• Time in Patent Office: 712 Days
• Field of Search: 735/040.4, 735/041.2, 735/041.3, 735/041.4, 735/041.5, 735/041.6, 735/040.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames

Abstract

A microgyroscope of a microstructure is disclosed, in which a voltage supplied to the exciting comb drivers of an outer frame is easily offset, and the exciting comb drivers are stably resonated without being influenced by an exciting voltage. The microgyroscope includes an inner frame 110 installed within an outer frame 120 across beam elastic bodies 130. Elastic exciting bodies 230 are installed at four corners of the outer frame 120 excitingly in an exciting direction (x axis). Exciting comb drivers 250 and 250′ are installed to dispose a plurality of combs between a plurality of frame part exciting combs 220. At both sides of the outer frame 120, a plurality of combs 280 of comb sensors 270 and 270′ are installed horizontally asymmetrically, so that the interfering signals transmitted to the comb sensors can be offset.

Claims

1. A microgyroscope, comprising:

an outer frame;

an inner frame installed within said outer frame;

a plurality of combs installed laterally and in a sensing direction (y axis) at both sides of said inner frame;

sensing direction sensing electrodes disposed between the plurality of said combs at certain intervals, and supported by upper and lower electrode supporting parts;

elastic beam bodies installed between said inner and outer frames in the sensing direction;

comb sensors installed asymmetrically at both sides of said outer frame in a horizontal direction;

elastic bodies installed at four corners of said outer frame in an exciting direction (x axis); and

exciting comb drivers installed symmetrically above and below said outer frame, for causing oscillations of the plurality of said combs by exciting voltages applied thereto.

2. The microgyroscope as claimed in claim 1, wherein, on said inner frame, said beam elastic bodies are installed at four places (at front and rear, and at left and right) so as to be excited together with said outer frame.

3. The microgyroscope as claimed in claim 1, further comprising exciting combs on said outer frame interdigitated with said exciting comb drivers, said exciting comb drivers being excited by exciting voltages applied thereto.

4. The microgyroscope as claimed in claim 1, wherein interfering voltages caused by the exciting voltages (V_dc+V_ac sin ω

t and V_dc−

V_ac sin ω

t) are mutually offset if sensing signals of the comb sensors are added together.

5. A microgyroscope, comprising:

an outer frame

an inner frame installed within the outer frame;

Coriolis sensing parts installed inside the inner frame for detecting deflections of the inner and outer frames along a sensing (Y) axis;

elastic beam bodies installed between the inner and outer frames for dumping oscillations along the sensing axis;

comb sensors installed asymmetrically outside the outer frame at two lateral sides thereof;

exciting comb drivers installed symmetrically at upper and lower sides of the outer frame for oscillating the Coriolis sensing parts along an exciting (X) axis by exciting voltages applied thereto.

6. The microgyroscope as claimed in claim 5, wherein the comb sensors comprise a plurality of first comb fingers interdigitated with a plurality of second comb fingers, said first comb fingers projecting from the outer frame in substantially the same direction.

7. The microgyroscope as claimed in claim 6, wherein said second comb fingers extend in a direction opposite to the direction of said first comb fingers along the exciting axis.

8. The microgyroscope as claimed in claim 5, wherein the Coriolis sensing parts comprise a plurality of third comb fingers projecting inwardly from two lateral sides of the inner frame, and a plurality of sensing direction sensing electrodes interdigitated with said third comb fingers and supported by at least one electrode supporting part located within the inner frame.

9. The microgyroscope as claimed in claim 5, further comprising elastic bodies installed at four corners of the outer frame for dumping oscillations along the exciting axis.

10. The microgyroscope as claimed in claim 5, wherein the exciting drivers comprise two identical exciting comb drivers installed at upper and lower sides of the outer frame, respectively, each of said exciting comb drivers including a plurality of fourth comb fingers connected to receive said exciting voltages, and a plurality of fifth comb fingers extending from the outer frame along the exciting axis and interdigitated with said fourth comb fingers.