Dual pendulum valve assembly

• US 6,328,051 B1
• Filed: 06/28/2000
• Issued: 12/11/2001
• Est. Priority Date: 06/28/2000
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Maher, Joseph
• Primary Examiner(s): LEE, KEVIN L
• Application Number:
  US09/606,382
• Time in Patent Office: 531 Days
• Field of Search: 137/613, 137/614.11, 137/614.21, 137/565.01, 137/565.23, 137/625.44, 137/625.45, 137/1, 251/129.11, 251/298, 251/301
• US Class Current: 137/1
• CPC Class Codes: F16K 3/06 in the form of closure plates arranged between supply and discharge passages F16K3/10 takes precedence
• CPC Class Codes: F16K 3/10 with special arrangements for separating the sealing faces or for pressing them together
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: Y10T 137/0318 Processes
• CPC Class Codes: Y10T 137/86083 Vacuum pump
• CPC Class Codes: Y10T 137/87917 Flow path with serial valves and/or closures
• CPC Class Codes: Y10T 137/87981 Common actuator

Abstract

A dual pendulum valve assembly including a housing having an interior space and first and second openings through which fluid can enter and exit the interior space; valve seats disposed in the interior space around the edges of the openings; and first and second pendulum valves for opening and closing, respectively, the first and second openings. Each pendulum valve is independently movable and includes a valve body mounted relative to the housing so that the valve body is movable between a completely opened position wherein fluid is allowed to pass through its respective opening and a completely closed position wherein the valve body seals the opening so that fluid can not pass therethrough. Each pendulum valve also includes a shaft fixedly coupled to the valve body through at least one pivot arm and at least partially mounted within the housing so that the valve body can rotate about a longitudinal axis of the shaft between a first angular position where the first valve body is in the completely opened position and a second angular position where the valve body is substantially axially aligned with its respective opening, and move substantially parallel to the longitudinal axis of the shaft, so that the valve body can move between the second angular position and the completely closed position as the pendulum valve continues to rotate. The present disclosure also provides a method of precisely controlling vacuum pressure within a process chamber of a semi-conductor wafer fabricator.

Claims

1. A valve assembly comprising:

a) a housing including an interior space and a pair of openings through which fluid can enter and exit the interior space;

b) a first valve body movable within the interior space between a completely opened position allowing fluid to pass through a first of the openings and a completely closed position wherein the first valve body seals the first opening so that fluid can not pass therethrough; and

c) a second valve body pivotally movable within the interior space between a completely opened position allowing fluid to pass through a second of the openings and a completely closed position wherein the second valve body seals the second opening so that fluid can not pass therethrough, wherein the second valve body pivots about a pivot axis substantially parallel with an axis of the second opening.

2. A valve assembly according to claim 1, further including an actuator for driving the second valve body between the completely opened and the completely closed positions.

3. A valve assembly according to claim 2, wherein the actuator comprises a reversible stepping motor.

4. A valve assembly according to claim 3, wherein the reversible stepping motor is coupled to the second valve body by a gear mechanism.

5. A valve assembly according to claim 4, wherein the motor includes a drive shaft, and the gear mechanism includes at least two gears, one fixed relative to the motor drive shaft and the other fixed relative to the second valve body, wherein the two gears are adapted to rotate and move longitudinally relative to one another.

6. A valve assembly according to claim 1, wherein each of the first and the second valve bodies comprise disks.

7. A valve assembly according to claim 6, wherein each of the first and the second disks are provided with 0-rings for sealing engagement with the interior of the housing around the openings.

8. A valve assembly according to claim 1, wherein the housing further includes valve seats disposed in the interior space around edges of the openings for receiving the valve bodies.

10. A valve assembly according to claim 2, further comprising a shaft fixedly coupled to the second valve body through a pivot arm extending generally laterally from the shaft, the shaft at least partially mounted within the housing to rotate about a longitudinal axis of the shaft and move substantially parallel to the longitudinal axis to allow the second valve body to rotate between the first angular position and the second angular position and move longitudinally between the second angular position and the completely closed position.

11. A valve assembly according to claim 10, further including a cam mechanism coupled between the shaft and the housing and arranged so as to control the longitudinal movement of the shaft.

12. A valve assembly according to claim 11, wherein the cam mechanism includes:

a cam surface defined by the housing, and

a cam follower fixed to the shaft and engaging the cam surface of the housing so as to define the movement of the shaft relative to the housing.

13. A valve assembly according to claim 10, further comprising a shaft fixedly coupled to the first valve body through a pivot arm extending generally laterally from said shaft, the shaft of the first valve body at least partially mounted within the housing to rotate about a longitudinal axis of said shaft.

14. A valve assembly according to claim 13, wherein the shaft of the second valve body is coaxially arranged with the shaft of the first valve body.

15. A valve assembly according to claim 14, wherein the shaft of the second valve body is tubular and received over the shaft of the first valve body for independent rotation with respect to the shaft of the first valve body.

9. A valve assembly comprising:

a housing including an interior space and a pair of openings through which fluid can enter and exit the interior space;

a first valve body movable within the interior space between a completely opened position allowing fluid to pass through a first of the openings and a completely closed position wherein the first valve body seals the first opening so that fluid can not pass therethrough;

a second valve body pivotally movable within the interior space between a completely opened position allowing fluid to pass through a second of the openings and a completely closed position wherein the second valve body seals the second opening so that fluid can not pass therethrough; and

wherein the second valve body is pivotally movable between a first angular position where the second valve body is in the completely opened position, and a second angular position where the second valve body is substantially aligned with the second opening but spaced therefrom, and then movable between the second angular position and the completely closed position.

16. A valve assembly comprising:

a housing including an interior space and a pair of openings through which fluid can enter and exit the interior space;

a first valve body movable within the interior space between a completely opened position allowing fluid to pass through a first of the openings and a completely closed position wherein the first valve body seals the first opening so that fluid can not pass therethrough;

a second valve body pivotally movable within the interior space between a completely opened position allowing fluid to pass through a second of the openings and a completely closed position wherein the second valve body seals the second opening so that fluid can not pass therethrough;

an actuator for driving the second valve body between the completely opened and the completely closed positions; and

a separate actuator for driving the first valve body between the completely opened and the completely closed positions independently of the second valve body.

17. A method of precisely controlling vacuum pressure within a process chamber of a semi-conductor wafer fabricator, the method comprising:

connecting a vacuum pump to the process chamber through first and second openings, respectively, of a valve housing;

operating the vacuum pump to create a first pressure within the process chamber;

moving a first valve body to at least partially impedes gaseous flow through the first opening, such that a second pressure within the process chamber is achieved;

pivotally moving a second valve body to be substantially aligned with the second opening, such that a third pressure within the process chamber is achieved; and

moving the second valve body to substantially seal the second opening, such that a fourth pressure within the process chamber is maintained.

18. A method of precisely controlling vacuum pressure according to claim 17, wherein the first valve body is pivotally moved to at least partially impede gaseous flow through the first opening.

20. A system according to claim 18, wherein the dual pendulum gate valve includes an interior, a first valve body for isolating the process chamber from the interior, and a second valve body for isolating the pump from the interior.

22. A system according to claim 20, wherein the dual pendulum gate valve includes first and second openings defining, at least in part, the flow path through the interior between the chamber and the pump, the first and second valve bodies being each rotatable about an axis substantially parallel to the flow path from the open position to an intermediate position in the flow path, and axially translatable from the intermediate position to the closed position.

19. A system used to perform thin film coating processes, comprising:

a process chamber;

a vacuum pump for creating a vacuum in the chamber; and

a dual pendulum gate valve connected between the chamber and pump for controlling the vacuum pressure within the chamber, the dual pendulum gate valve including at least two valve bodies and structure for defining a fluid flow path, wherein at least one of the valve bodies pivots about a pivot axis so as to move substantially perpendicular to the fluid flow path.

21. A system according to claim 19, wherein each body is movable independently of one another between an open position and a closed position.