Method for producting a filter
First Claim
1. A method for producing a filter comprising the steps of:
- providing a blank of etchable semiconductor material having a first side and a second side, affixing a holding element to said blank, the holding element being chemically resistant to an etching solution, connecting said blank to a current source, illuminating at least one of the first and second sides of said blank with light, immersing the holding element and said blank in the etching solution until only the first side of said blank is wetted, the second side being uncovered and unwetted, so that the first side is etched electrochemically, the holding element being affixed to said blank such that contact areas between the holding element and said blank remain free of the etching solution.
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Accused Products
Abstract
A method for producing a filter includes the steps of providing a blank of etchable semiconductor material having a first side and a second side and affixing a holding element to the blank. The holding element is chemically resistant to an etching solution. A current source is connected to the blank and at least one of the first and second sides of the blank is illuminated with light. The holding element and the blank are immersed in the etching solution until the first side of the blank is wetted so that the first side is etched electrochemically. The holding element is affixed to the blank such that contact areas between the holding element and the blank remain free of the etching solution.
9 Citations
12 Claims
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1. A method for producing a filter comprising the steps of:
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providing a blank of etchable semiconductor material having a first side and a second side, affixing a holding element to said blank, the holding element being chemically resistant to an etching solution, connecting said blank to a current source, illuminating at least one of the first and second sides of said blank with light, immersing the holding element and said blank in the etching solution until only the first side of said blank is wetted, the second side being uncovered and unwetted, so that the first side is etched electrochemically, the holding element being affixed to said blank such that contact areas between the holding element and said blank remain free of the etching solution. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for producing a filter comprising the steps of:
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providing a plurality of blanks of etchable semiconductor material, each blank having a first side and a second side, affixing a holding element to each blank, the holding element being chemically resistant to an etching solution, connecting each blank to a current source, illuminating at least one of the first and second sides of each blank with light, simultaneously immersing each blank in the etching solution until only the first side of each blank is wetted, the second side of each blank being uncovered and unwetted, so that the first side is etched electrochemically, the holding element being affixed to each blank such that contact areas between the holding element and each blank remain free of the etching solution.
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Specification