Surface-micromachined chain for use in microelectromechanical structures
First Claim
1. A surface-micromachined chain, comprising a plurality of interconnected chain links, with each chain link further comprising a plurality of deposited and patterned material layers.
3 Assignments
0 Petitions
Accused Products
Abstract
A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.
20 Citations
41 Claims
- 1. A surface-micromachined chain, comprising a plurality of interconnected chain links, with each chain link further comprising a plurality of deposited and patterned material layers.
- 14. A surface-micromachined chain formed integrally on a substrate for coupling mechanical power from a motive source to a load on the substrate, with the chain comprising a plurality of link arms connected at each end thereof to flexible joints, and with the link arms and flexible joints being formed, at least in part, from polycrystalline silicon.
-
21. A surface-micromachined structure formed on a substrate and comprising:
-
(a) a drive sprocket formed on the substrate for providing motive power;
(b) a driven sprocket formed on the substrate at a distance from the drive sprocket; and
(c) a chain formed on the substrate, at least in part, from polycrystalline silicon and connected between the drive sprocket and the driven sprocket to couple the motive power from the drive sprocket to the driven sprocket thereby imparting motion to the driven sprocket. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
-
-
29. A surface-micromachined structure formed on a substrate and comprising:
-
(a) an microengine formed on the substrate;
(b) a drive sprocket formed on the substrate proximate to the microengine and operatively connected to the microengine, with the drive sprocket being rotatable upon electrical actuation of the microengine;
(c) at least one driven sprocket formed on the substrate distal to the drive sprocket; and
(d) a chain formed on the substrate from a plurality of deposited and patterned material layers, with the chain connecting the drive sprocket to the driven sprocket, thereby imparting motion to the driven sprocket upon rotation of the drive sprocket. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36)
-
-
37. A method for forming a surface-micromachined chain on a substrate for coupling mechanical power from a motive source on the substrate to a load on the substrate, comprising steps for:
-
(a) depositing and patterning a plurality of alternating layers of a chain-forming material and a sacrificial material on the substrate, thereby forming a plurality of interconnected chain links embedded in the layers of the sacrificial material; and
(b) removing the sacrificial material by etching and thereby releasing the chain for operation. - View Dependent Claims (38, 39, 40, 41)
-
Specification