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Precision electrostatic actuation and positioning

  • US 6,329,738 B1
  • Filed: 03/29/2000
  • Issued: 12/11/2001
  • Est. Priority Date: 03/30/1999
  • Status: Expired due to Term
First Claim
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1. An electrostatically-controllable actuator comprising:

  • a stationary electrode; and

    an actuating element separated from the stationary electrode by an actuation gap, the actuating element including a mechanically constrained support region, a deflection region free to be deflected through the actuation gap, and a conducting actuation region extending from about the support region to the deflection region, a commonality in area between the actuation region and the stationary electrode being selected to produce controlled and stable displacement of the deflection region over a displacement range extending to a specified point in the actuation gap when an actuation voltage is applied between the actuation region and the stationary electrode.

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