Automatic warehouse and transfer system using the same

• US 6,332,744 B1
• Filed: 04/10/2000
• Issued: 12/25/2001
• Est. Priority Date: 07/26/1999
• Status: Expired due to Fees

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Kawaguchi, Masatomi, Fukushima, Masazumi
• Primary Examiner(s): Ellis, Christopher P.
• Assistant Examiner(s): Bower, Kenneth W
• Application Number:
  US09/546,180
• Time in Patent Office: 624 Days
• Field of Search: 414/288, 414/940, 414/283
• US Class Current: 414/283
• CPC Class Codes: B65G 1/045 in a circular arrangement, e.g. towers
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A mast 18 of an automatic warehouse 10 is extended to a position under a floor 2 in a clean room in such a manner as to penetrate the floor 2, and a turn table 16 is installed under the floor. In addition, two types of stations, that is, a floor station 26 and an underfloor station 30 are provided, and shelves 14 are provided only in a floor space. The floor station 26 is connected to an unmanned carrier 34, while the underfloor station 30 is connected to a tracked cart 36. This automatic warehouse is easy to install and allows an underfloor space to be used to transfer articles.

Claims

1. An automatic warehouse comprising shelves, a mast, and elevating loading means for loading an article on a shelf by elevating and lowering along the mast, which are all provided in a floor space in a clean room, characterized in that the automatic warehouse has an extension section obtained by extending the mast through at least one of a space under a floor and a space above a ceiling in the clean room, and an article-loading station provided at a position corresponding to the extension section of the mast to load an article on said elevating loading means.

2. An warehouse as in claim 1, characterized in that said shelves are arranged only in the floor space in the clean room in a generally cylindrical form.

3. A transfer system characterized by comprising:

an automatic warehouse including shelves arranged only in a floor space in a clean room, elevating loading means for loading an article on said shelf by elevating and lowering along a mast, an extension section obtained by extending the mast through a space under a floor or a space above a ceiling in the clean room, and an article-loading station provided at a position corresponding to the extension section of the mast to load an article on said elevating loading means, and transfer means provided in the space under the floor or the space above the ceiling to transfer an article to said loading station.