Method and apparatus for grinding a workpiece

• US 6,332,834 B1
• Filed: 03/31/2000
• Issued: 12/25/2001
• Est. Priority Date: 03/31/1999
• Status: Expired due to Fees

• Current Assignee: Nippei Toyama Corporation (Komatsu)
• Original Assignee: Nippei Toyama Corporation (Komatsu)
• Inventors: Takata, Michihiro, Nukui, Mitsuru, Wada, Toyotaka, Murai, Shirou, Okuyama, Tetsuo, Kaga, Muneaki
• Primary Examiner(s): Hail, III, Joseph J.
• Assistant Examiner(s): Thomas, David B.
• Application Number:
  US09/538,968
• Time in Patent Office: 634 Days
• Field of Search: 451/44, 451/43, 451/57, 451/65, 451/178, 451/182, 451/246, 451/258, 451/8
• US Class Current: 451/57
• CPC Class Codes: B24B 41/005 Feeding or manipulating devices specially adapted to grinding machines feeding, loading or unloading work specially adapted to lapping machines B24B37/345
• CPC Class Codes: B24B 47/20 relating to feed movement
• CPC Class Codes: B24B 9/065 of thin, brittle parts, e.g. semiconductors, wafers

Abstract

A workpiece 23 formed of a circular thin plate is rotated about its center as an axis L1. Each of disk-shaped rotating grinding wheels 27 and 28, while being rotated about an axis L3 extending in a direction substantially parallel to the plane of the workpiece 23 and perpendicular to the radial direction of the workpiece 23, is made to undergo relative feeding movement on both obverse and reverse surface sides of the workpiece 23 along an outer peripheral edge portion 23a of the workpiece 23. Consequently, the outer peripheral edge portion 23a of the workpiece 23 is ground by an outer peripheral surface of each of the rotating grinding wheels 27 and 28. In this case, it is preferred that two grinding wheels 27 and 28 for rough grinding and finish grinding be provided as the disk-shaped rotating grinding wheels, and that rough grinding and finish grinding are performed by the same station.

Claims

1. A method of grinding a workpiece, using a workpiece holding unit that includes a pad holding the workpiece, a rotating shaft attaching the pad at one end thereof, and a cylindrical member rotatably supporting the rotating shaft, comprising the steps of:

rotating the workpiece, formed of a circular thin plate about a center axis thereof, by rotating the rotating shaft and the pad holding the workpiece;

rotating a disk-shaped rotating grinding wheel about an axis thereof disposed substantially parallel to a plane of the workpiece; and

performing a relative feeding movement between the workpiece and said grinding wheel such said rotating grinding wheel moves along at least one part of an edge portion of the workpiece in a thickness direction of the workpiece, while concurrently rotating the workpiece and said rotating grinding wheel,

whereby an outer peripheral surface of said rotating grinding wheel grinds the edge portion of the workpiece.

2. The method according to claim 1, wherein the axis of said rotating grinding wheel is disposed in such a manner as to be substantially perpendicular to a radial direction of the workpiece.

3. The method according to claim 1, wherein said rotating grinding wheel includes a rotating grinding wheel for rough grinding and a rotating grinding wheel for finish grinding, whereby rough grinding and finish grinding are performed.

4. The method of grinding a workpiece according to claim 3, wherein said rough grinding and said finish grinding are performed in a same station.

5. The method according to claim 3, wherein at least said rotating grinding wheel for finish grinding includes grains of silicon dioxide binded into fixed abrasive grains.

6. The method according to claim 1, wherein an outer peripheral edge portion of the workpiece is ground.

7. The method according to claim 6, wherein a rotating grinding wheel for cylindrical grinding is rotated about an axis thereof disposed substantially parallel to the central axis of the workpiece in a process preceding the grinding by said disk-shaped rotating grinding wheel, so as to effect the rough cutting of the edge portion of the workpiece by cylindrical grinding.

8. The method according to claim 1, wherein an inner peripheral edge portion of the workpiece having a circular hole in a center portion thereof is ground.

9. A method of grinding a workpiece, comprising the steps of:

rough cutting an edge portion of the workpiece formed of a circular thin plate by means of cylindrical grinding, said rough cutting step being obtained by rotating a first rotating grinding wheel for cylindrical grinding about an axis thereof disposed substantially parallel to a center axis of the workpiece, while rotating the workpiece about the center axis of the thereof; and

grinding the edge portion of the workpiece by an outer peripheral surface of a second rotating grinding wheel, said grinding step being obtained by performing a relative feeding movement between said second grinding wheel and the workpiece such that the second grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction of the workpiece, while rotating said second rotating grinding wheel about an axis extending in a direction substantially parallel to a plane of the workpiece and substantially perpendicular to a radial direction of the workpiece.

10. The method according to claim 9, wherein said second rotating grinding wheel includes a rotating grinding wheel for rough grinding and a rotating grinding wheel for finish grinding, and said grinding step includes rough grinding and finish grinding, which are performed after the rough cutting.

11. An apparatus for grinding a workpiece, comprising:

a workpiece holding unit holding the workpiece formed of a circular thin plate and rotating the workpiece about a center axis thereof;

a grinding unit having a disk-shaped rotating grinding wheel, said grinding unit grinding an edge portion of the workpiece by performing a relative feeding movement between said rotating grinding wheel and the workpiece such that said rotating grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction thereof, while rotating said grinding stone about an axis thereof disposed substantially parallel to a plane of the workpiece; and

said workpiece holding unit includes;

a pad holding the workpiece;

a rotating shaft attaching said pad at one end thereof; and

a cylindrical member rotatably supporting said rotating shaft.

12. The apparatus according to claim 11, further comprising:

a moving mechanism performing the relative movement between said rotating grinding wheel and the workpiece; and

a guide mechanism guiding the relative movement of said moving mechanism, said guide mechanism including a hydrostatic bearing.

13. The apparatus according to claim 12, wherein said moving mechanism comprises:

a first moving mechanism performing a first relative linear movement between the workpiece and said rotating grinding wheel; and

a second moving mechanism performing a second relative linear movement between the workpiece and said rotating grinding wheel perpendicular to said first relative linear movement.

14. The apparatus according to claim 13, wherein said guide mechanism guiding the first relative movement of said first moving mechanism includes said hydraulic bearing.

15. The apparatus according to claim 14, wherein said guide mechanism guiding the second relative movement of said second moving mechanism includes said hydraulic bearing.

16. The apparatus according to claim 13, wherein said workpiece holding unit includes said first moving mechanism, and

said grinding unit includes said second moving mechanism.

21. The apparatus according to claim 11, further comprising:

a grinding-wheel-diameter measuring sensor measuring the outside diameter of said rotating grinding wheel,

wherein said relative feeding movement is determined in accordance with the outside diameter of said rotating grinding wheel.

22. The apparatus according to claim 21, wherein said grinding-wheel-diameter measuring sensor performs a zero adjustment for adjusting a relative position between said sensor and said rotating grinding wheel for measuring.

23. The apparatus according to claim 11, further comprising:

a vertical position measuring sensor for measuring a vertical elongation of said workpiece holding unit.

17. An apparatus for grinding a workpiece, comprising:

a workpiece holding unit holding the workpiece formed of a circular thin plate and rotating the workpiece about a center axis thereof;

a grinding unit having a disk-shaped rotating grinding wheel, said grinding unit grinding an edge portion of the workpiece by performing a relative feeding movement between said rotating grinding wheel and the workpiece such that said rotating grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction thereof, while rotating said grinding stone about an axis thereof disposed substantially parallel to a plane of the workpiece;

a moving mechanism performing the relative movement between said rotating grinding wheel and the workpiece; and

a guide mechanism guiding the relative movement of said moving mechanism, said guide mechanism including a hydrostatic bearing;

wherein said moving mechanism comprises;

a first moving mechanism performing a first relative linear movement between the workpiece and said rotating grinding wheel; and

a second moving mechanism performing a second relative linear movement between the workpiece and said rotating grinding wheel perpendicular to said first relative linear movement; and

wherein said workpiece holding unit includes said first moving mechanism, and said grinding unit includes said second moving mechanism, and

wherein said workpiece holding unit includes;

a pad holding the workpiece;

a rotating shaft attaching said pad at one end thereof;

a cylindrical m ember rotatably supporting said rotating shaft; and

said hydrostatic bearings disposed between said rotating shaft and said cylindrical member.

18. An apparatus for grinding a workpiece, comprising:

a workpiece holding unit holding the workpiece formed of a circular thin plate and rotating the workpiece about a center axis thereof;

a grinding unit having a disk-shaped rotating grinding wheel, said grinding unit grinding an edge portion of the workpiece by performing a relative feeding movement between said rotating grinding wheel and the workpiece such that said rotating grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction thereof, while rotating said grinding stone about an axis thereof disposed substantially parallel to a plane of the workpiece,

wherein said grinding unit includes;

a rough cutting unit having the rotating grinding wheel for cylindrical grinding, said rough cutting unit cutting the edge portion of the workpiece by performing a relative linear movement between the grinding wheel and the workpiece, while rotating the grinding wheel and the workpiece in the substantially same plane.

19. The apparatus according to claim 18, further comprising:

a workpiece-outside-diameter measuring sensor measuring an outside diameter of the workpiece cut by said rough cutting unit,

wherein said relative linear movement between the other grinding wheel and the workpiece is determined in accordance with the measured outside diameter of the workpiece.

20. The apparatus according to claim 19, wherein said workpiece-outside-diameter measuring sensor performs a zero adjustment for adjusting a relative position between said sensor and the workpiece for measuring.