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Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methods

  • US 6,334,097 B1
  • Filed: 01/06/1999
  • Issued: 12/25/2001
  • Est. Priority Date: 01/22/1998
  • Status: Expired due to Term
First Claim
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1. A method of inspecting defects of circuit patterns formed on a substrate, comprising the steps of:

  • inputting inspection data of the defects existing on the circuit patterns inspected by an inspection apparatus;

    processing the inputted inspection data to determine the lethality of the defects; and

    displaying information relating to the lethality of defects on a display, wherein the lethality of the defects is determined based on a determination rule which is defined according to areas on the patterns.

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