Positioning device and lithographic projection apparatus comprising such a device

• US 6,337,484 B1
• Filed: 07/15/1999
• Issued: 01/08/2002
• Est. Priority Date: 07/17/1998
• Status: Expired due to Term

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASM Lithography Incorporated (ASML Holding NV)
• Inventors: Janssen, Henricus W. A., Bouwer, Adrianus Gerardus, Loopstra, Erik Roelof, Van Der Schoot, Harmen Klaas
• Primary Examiner(s): Anderson, Bruce
• Assistant Examiner(s): Wells, Nikita
• Application Number:
  US09/353,664
• Time in Patent Office: 908 Days
• Field of Search: 250/492.2, 250/453.11, 250/442.11, 355/53, 355/72, 355/75
• US Class Current: 250/442.11
• CPC Class Codes: G03F 7/70716 Stages

Abstract

A positioning device comprising a first part and a second part which is displaceable relative to the first part by means of a system of Lorentz-force motors, whereby, relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, which housing is coupled to the first part; and a piston which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.

Claims

1. A positioning device, comprising:

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.

2. A positioning device according to claim 1, wherein said pressure chamber is connected to a main chamber of the gas cylinder which is provided in the first part.

3. A positioning device according to claim 1, wherein the second part is supported relative to the piston in the Z-direction by a static gas bearing, by means of which the second part is guided over a supporting surface of the piston so as to be displaceable substantially at right angles to the Z-direction.

4. A positioning device according to claim 1, wherein the first part can be displaced relative to a base of the positioning device, at least in the X-direction, by a drive unit of the positioning device.

5. A positioning device according to claim 1, wherein said piston is journaled relative to said housing by a static gas bearing.

6. A positioning device, comprising:

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction,

wherein the second part is supported relative to the piston in the Z-direction by a static gas bearing, by means of which the second part is guided over a supporting surface of the piston so as to be displaceable substantially at right angles to the Z-direction, and

wherein the positioning device is provided with an intermediate part which is secured by an elastically deformable connecting member to the second part and bears on the supporting surface of the piston via said static gas bearing, the connecting member being substantially undeformable in the Z-direction and bendable about two mutually perpendicular bending axes which are substantially perpendicular to the Z-direction.

7. A positioning device, comprising:

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction,

wherein the second part is supported relative to the piston in the Z-direction by a static gas bearing, by means of which the second part is guided over a supporting surface of the piston so as to be displaceable substantially at right angles to the Z-direction, and

wherein the positioning device comprises an intermediate part which is provided with the supporting surface and is supported relative to the piston by a spherical, static gas bearing in a direction substantially parallel to the Z-direction.

8. A positioning device, comprising:

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction,

wherein the positioning device is provided with three gas cylinders and Z-Lorentz-force motors belonging to the system of Lorentz-force motors, each of the Z-Lorentz-force motors exerting, in operation, a Lorentz force on the second part in the Z-direction, each of the gas cylinders forming a supporting unit with a respective Z-Lorentz-force motor.

9. A positioning device, comprising:

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction,

wherein said system of Lorentz-force motors is capable of displacing said second part relative to the first part in said Z-direction, and in X- and Y-directions which are mutually orthogonal and orthogonal to said Z-direction, and to rotate said second part relative to said first part about first, second and third axes of rotation respectively substantially parallel to said X-, Y- and Z-directions.

10. A positioning device, comprising:

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction,

wherein the Lorentz-force motors each comprise a system of permanent magnets secured to one of the first and second parts and a system of electric coils secured to the other one of the first and second parts.

11. A lithographic projection apparatus comprising:

a radiation system constructed and arranged to supply a projection beam of radiation;

a first moveable object table provided with a mask holder;

a second movable object table provided with a substrate holder; and

a projection system constructed and arranged to image an irradiated portion of a mask held by said mask holder onto a target portion of a substrate held by said substrate holder,

wherein at least one of said first and second movable object tables includes a positioning device comprising;

a first part;

a second part said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction,

at least one of said mask holder and said substrate holder being connected to said second part.

12. A method of manufacturing a device using a lithographic projection apparatus, said projection apparatus comprising:

a radiation system constructed and arranged to supply a projection beam of radiation;

a first movable object table provided with a mask holder;

a second movable object table provided with a substrate holder; and

a projection system constructed and arranged to image irradiated portions of a mask held by said mask holder onto target portions of a substrate held by said substrate holder;

the method comprising;

providing a substrate that is at least partially covered by a layer of radiation-sensitive material;

providing a mask that contains a pattern; and

projecting an image of at least part of the mask pattern onto a target of the layer of radiation sensitive material,

wherein during said projecting an image, at least one of the mask and the substrate is positioned using a positioning device comprising;

a first part;

a second part, said second part to be moved relative to the first part by a Lorentz-force motor system and being supported relative to the first part in a Z-direction by at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, said housing being coupled to the first part; and

a piston coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.

13. A device manufactured according to the method of claim 12.