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Electrothermally actuated vibromotor

  • US 6,338,249 B1
  • Filed: 04/13/2000
  • Issued: 01/15/2002
  • Est. Priority Date: 04/15/1999
  • Status: Expired due to Fees
First Claim
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1. An apparatus to provide impact actuation in a micro-electromechanical system (MEMS), the apparatus comprising:

  • an electrothermal linear vibromotor having at least one vibrating thermal element pivotally attached for providing oblique impact actuation between a space opening position and a space closing position; and

    a movable guided element slidable in response to the oblique impact actuation of the electrothermal linear vibromotor wherein the movable guided element is directly coupled to the electrothermal linear vibromotor when the vibromotor is in the space closing position.

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