Tuned flexure accelerometer

• US 6,338,274 B1
• Filed: 05/21/1999
• Issued: 01/15/2002
• Est. Priority Date: 05/21/1999
• Status: Expired due to Fees

• Current Assignee: Milli Sensor Systems & Actuators, Inc.
• Original Assignee: Milli Sensor Systems & Actuators, Inc.
• Inventors: Carroll, Raymond
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US09/316,723
• Time in Patent Office: 970 Days
• Field of Search: 735/141.5, 735/141.7, 735/141.8, 735/142.1, 735/142.3, 735/142.9, 735/143.6, 735/143.7
• US Class Current: 73/514.15
• CPC Class Codes: G01P 1/006 used for thermal compensation
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values

Abstract

A tuned flexure accelerometer, comprising, a housing; a gimbal coupled to the housing for oscillation about a gimbal oscillation axis; and a reference mass coupled by one or more pivots to the gimbal to allow pivoting motion of the reference mass relative to the gimbal about a pivot axis which is transverse to the gimbal oscillation axis, the one or more pivots having an effective elastic restraint. The gimbal is oscillated about its oscillation axis, to thereby induce on the one or more pivots an oscillating negative elastic restraint, to reduce the effective elastic restraint of the pivots.

Claims

1. A tuned flexure accelerometer, comprising:

a housing;

a gimbal coupled to said housing for oscillation about a gimbal oscillation axis;

a reference mass coupled by one or more pivots to said gimbal to allow pivoting motion of said reference mass relative to said gimbal about a pivot axis which is transverse to said gimbal oscillation axis, said one or more pivots having an effective elastic restraint; and

means for inducing on said one or more pivots an oscillating negative elastic restraint, to reduce the effective elastic restraint of said pivots, said means for inducing including means for oscillating said reference mass about an inducing oscillation axis which is transverse to said pivot axis, said means for oscillating said reference mass including means for oscillating said gimbal about said gimbal oscillation axis to create a negative elastic restraint which substantially cancels said effective elastic restraint of said one or more pivots.

2. The tuned flexure accelerometer of claim 1, in which said means for oscillating said reference mass further includes means for varying one of the gimbal oscillation amplitude and the gimbal oscillation frequency and the gimbal oscillation inertia.

3. The tuned flexure accelerometer of claim 2, in which said means for oscillating said reference mass includes means for varying the gimbal oscillation amplitude.

4. The tuned flexure accelerometer of claim 1, in which said reference mass is coupled to said gimbal by a pair of flexures.

5. The tuned flexure accelerometer of claim 1, in which said gimbal oscillation axis is nominally orthogonal to said pivot axis.

6. The tuned flexure accelerometer of claim 1, in which said reference mass is carried within said gimbal.

7. The tuned flexure accelerometer of claim 6, in which said gimbal comprises a generally planar structure.

8. The tuned flexure accelerometer of claim 7, in which said reference mass comprises a generally planar structure which is nominally coplanar with said gimbal.

9. A tuned flexure accelerometer, comprising:

a housing;

a gimbal coupled to said housing for oscillation about a gimbal oscillation axis;

a reference mass coupled by one or more pivots to said gimbal to allow pivoting motion of said reference mass relative to said gimbal about a pivot axis which is transverse to said gimbal oscillation axis, said one or more pivots having an effective elastic restraint, said reference mass having a null position with respect to said housing;

means for sensing the pivoting motion of said reference mass from said null position;

means for inducing on said one or more pivots an oscillating negative elastic restraint, to reduce the effective elastic restraint of said pivots; and

means, responsive to said means for sensing, for driving said reference mass closer to its null position.