Reticle SMIF pod in situ orientation

• US 6,338,409 B1
• Filed: 04/13/2000
• Issued: 01/15/2002
• Est. Priority Date: 04/13/2000
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Neary, Timothy E.
• Primary Examiner(s): LUONG, SHIAN TINH NHAN
• Application Number:
  US09/548,174
• Time in Patent Office: 642 Days
• Field of Search: 206/434, 206/710, 206/722, 206/560, 414/936, 414/940, 414/217.1, 414/292
• US Class Current: 206/710
• CPC Class Codes: G03F 1/66 Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• CPC Class Codes: G03F 7/70741 Handling masks outside exposure position, e.g. reticle libraries
• CPC Class Codes: H01L 21/67353 specially adapted for a single substrate
• CPC Class Codes: H01L 21/67359 specially adapted for containing masks, reticles or pellicles
• CPC Class Codes: H01L 21/67386 characterised by the construction of the closed carrier

Abstract

A reticle SMIF pod for in situ orientation comprises a pod door. A pod cover is removably receivable on the door to define an interior space. A nest assembly has a plate resting on the pod door in the interior space and a core extending downwardly from the plate through an opening in the pod door. The plate is rotatably mounted on the pod door to selectively orient a reticle supported on the plate, in use. Alignment legs or tabs align the plate relative to the pod door in one of plural orthogonal positions.

Claims

1. A SMIF pod comprising:

a pod door;

a pod cover removably receivable on the door to define an interior space;

a nest assembly having a plate resting on the pod door in the interior space and a core extending downwardly from the plate through an opening in the pod door, whereby the plate is rotatably mounted on the pod door to selectively orient a workpiece supported on the plate, in use; and

alignment means for aligning the plate relative to the pod door in one of plural orthogonal positions.

2. The SMIF pod of claim 1 wherein the pod door comprises an upper door plate and a lower door plate and a latch mechanism disposed therebetween for latching the pod door to the pod cover.

3. The SMIF pod of claim 1 wherein the alignment means comprises an alignment leg extending downwardly from the plate and plural spaced apart bores in the pod door for selectively receiving the alignment leg.

4. The SMIF pod of claim 1 wherein the alignment means comprises plural alignment legs extending downwardly from the plate and plural spaced apart bores in the pod door each for receiving one of the alignment legs.

5. The SMIF pod of claim 1 wherein the alignment means comprises a locking tab extending radially from the core and plural seats orthogonally positioned in the door for selectively receiving the locking tab.

6. The SMIF pod of claim 1 wherein the alignment means comprises plural orthogonally spaced locking tabs extending radially from the core and plural seats orthogonally positioned in the door each for receiving one of the locking tabs.

7. The SMIF pod of claim 1 further comprising means for biasing the plate downwardly against the pod door.

8. The SMIF pod of claim 7 wherein the nest assembly further comprises a flange on the core, and the biasing means comprises a retaining spring disposed between the pod door and the flange.

9. The SMIF pod of claim 8 wherein the pod door comprises an upper door plate and a lower door plate and the flange is sandwiched between the upper door plate and the lower door plate.

10. The SMIF pod of claim 9 wherein the alignment means comprises plural orthogonally spaced locking tabs extending radially from the core and plural seats orthogonally positioned in the lower door plate each for receiving one of the locking tabs.

11. The SMIF pod of claim 1 wherein the core includes downwardly facing groove for actuation by an external engagement device to effect rotation of the plate.

12. A SMIF pod comprising:

a pod door;

a pod cover removably receivable on the door to define an interior space;

a nest assembly having a plate resting on the pod door in the interior space and a core extending downwardly from the plate through an opening in the pod door, whereby the plate is rotatably mounted on the pod door to selectively orient a workpiece supported on the plate, in use; and

an alignment member operatively associated with the nest assembly for selectively engaging with an alignment element ofthe pod door for aligning the plate relative to the pod door in one of plural orthogonal positions.

13. The SMIF pod of claim 12 wherein the alignment member comprises an alignment leg extending downwardly from the plate and the alignment element comprises plural spaced apart bores in the pod door for selectively receiving the alignment leg.

14. The SMIF pod of claim 12 wherein the alignment member comprises plural alignment legs extending downwardly from the plate and the alignment element comprises plural spaced apart bores in the pod door each for receiving one of the alignment legs.

15. The SMIF pod of claim 12 wherein the alignment member comprises a locking tab extending radially from the core and the alignment element comprises plural seats orthogonally positioned in the door for selectively receiving the locking tab.

16. The SMIF pod of claim 12 wherein the alignment member comprises plural orthogonally spaced locking tabs extending radially from the core and the alignment element comprises plural seats orthogonally positioned in the door each for receiving one of the locking tabs.

17. The SMIF pod of claim 12 further comprising means for biasing the plate downwardly against the pod door.

18. The SMIF pod of claim 17 wherein the nest assembly further comprises a flange on the core, and the biasing means comprises a retaining spring disposed between the pod door and the flange.

19. The SMIF pod of claim 18 wherein the pod door comprises an upper door plate and a lower door plate and the flange is sandwiched between the upper door plate and the lower door plate.

20. The SMIF pod of claim 19 wherein the alignment member comprises plural orthogonally spaced locking tabs extending radially from the core and the alignment element comprises plural seats orthogonally positioned in the lower door plate each for receiving one of the locking tabs.