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Integrated circuit analytical imaging technique employing a backside surface fill layer

  • US 6,338,974 B1
  • Filed: 07/31/2000
  • Issued: 01/15/2002
  • Est. Priority Date: 07/31/2000
  • Status: Active Grant
First Claim
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1. An integrated circuit analytical imaging method, the method comprising:

  • providing a semiconductor device structure that includes a semiconductor having an integrated circuit formed in and on an upper surface of the semiconductor substrate;

    thinning the semiconductor substrate by removing semiconductor material from a lower surface of the semiconductor substrate, thereby creating a thinned semiconductor substrate having a backside surface, the backside surface having a plurality of peaks and a plurality of valleys formed therein;

    forming a backside surface fill material layer on the backside surface of the thinned semiconductor substrate, to at least partially fill the plurality of valleys; and

    performing an analytical imaging technique by collecting radiation emitted through the backside surface.

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