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Thermal infrared detecting device

  • US 6,339,220 B1
  • Filed: 03/18/1998
  • Issued: 01/15/2002
  • Est. Priority Date: 03/31/1997
  • Status: Expired due to Fees
First Claim
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1. A thermal infrared detecting device comprising:

  • a lower layer portion having a readout circuit;

    an upper layer portion having a bolometer thin film covered with an insulating protective film to perform heat/resistive conversion, said bolometer thin film having a resistivity in order of about 1 to 10 mΩ

    cm and a thickness of about 500 to 2,000 Å

    , and said bolometer thin film consisting essentially of a manganese-based oxide; and

    an infrared reflection film formed on said lower layer portion;

    wherein said upper layer portion and said lower layer portion are spaced apart from each other while sandwiching a vacuum or sealed gas to form a thermal isolation structure, and also electrically connected to each other through an electrode film formed on or in said insulating protective film or in said insulating protective film; and

    wherein a space causing destructive interference of incident infrared frequencies is formed between said bolometer thin film and said infrared reflection film, whereby the infrared frequencies which in the past have caused a destructive interference are absorbed by said bolometer thin film.

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