Plasma emission detection during lateral processing of photoresist mask

• US 6,340,603 B1
• Filed: 01/27/2000
• Issued: 01/22/2002
• Est. Priority Date: 01/27/2000
• Status: Active Grant

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Bell, Scott A.
• Primary Examiner(s): Dang, Trung
• Assistant Examiner(s): Kebede, Brook
• Application Number:
  US09/492,364
• Time in Patent Office: 726 Days
• Field of Search: 438/710, 438/714, 438/719, 438/729, 438/763, 438/585, 438/16, 438/14, 438/931, 438/952, 438/9, 438/8
• US Class Current: 438/9
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/32139 using masks

Abstract

Photoresist mask width dimensions are determined by emission spectroscopy while simultaneously etching or depositing material on the sidewalls of the photoresist mask in a plasma environment. Embodiments include stopping the etching or deposition process when the detected change in the emission spectrum corresponds to a desired photoresist mask dimension.

Claims

1. A method of laterally processing a photoresist mask on a substrate, which method comprises:

depositing a photoresist layer on the substrate;

patterning the photoresist layer to form a photoresist mask having at least one element with a first prescribed width;

laterally processing the photoresist mask having the element to a second prescribed width in a plasma chamber by a plasma having at least one specie with an emission spectrum;

detecting a change in the emission spectrum of the at least one specie in the plasma while simultaneously laterally processing the photoresist mask; and

stopping the lateral processing when the detected change in the emission spectrum of the at least one specie corresponds to the second width.

2. The method of claim 1, comprising laterally processing the photoresist mask to decrease the first width of the element.

3. The method of claim 2, comprising detecting a change in the emission intensity of either a reactant or product specie in the plasma corresponding to the decreased first width.

4. The method of claim 2, comprising detecting the change in emission of a carbon radical specie.

5. The method of claim 1, comprising patterning the photoresist layer to form the photoresist mask having the element with the first prescribed width of about 0.3 micron.

6. The method of claim 5, comprising laterally processing the photoresist mask element first width to an increase or decrease of about 0.001 micron to about 0.1 micron.

7. The method of claim 5, comprising decreasing the first width to about 0.1 micron.

8. The method of claim 1, further comprising removing the substrate from the plasma chamber when the emission intensity of the detected at least one specie corresponds to the second width.

9. The method of claim 1, comprising laterally processing the photoresist mask with a mixture comprising HBr, oxygen and an inert gas.

10. A method of etching a feature on a semiconductor substrate, which method comprises:

forming a dielectric layer on the semiconductor substrate;

forming a conductive layer on the dielectric layer;

forming a photoresist mask having at least one element having a first prescribed width on the conductive layer;

laterally processing the photoresist mask having the element to a second prescribed width in a plasma chamber by a plasma having at least one specie with an emission spectrum;

detecting a change in the emission spectrum of the at least one specie in the plasma while simultaneously laterally processing the photoresist mask;

stopping the lateral processing when the detected change in the emission spectrum of the at least one specie corresponds to the second width; and

etching through the photoresist mask having the element with the second width to the underlying layers to form the feature.

11. The method of claim 10, comprising laterally processing the photoresist mask to decrease the first width of the element.

12. The method of claim 11, comprising detecting a change in the emission intensity of either a reactant or product specie in the plasma corresponding to a decrease in the first width.

13. The method of claim 11, comprising detecting the change in emission of a carbon radical specie.

14. The method of claim 10, comprising patterning the photoresist layer to form the photoresist mask having the element with the first prescribed width of about 0.3 micron.

15. The method of claim 14, comprising laterally processing the photoresist mask element first width to an increase or decrease of about 0.001 micron to about 0.1 micron.

16. The method of claim 14, comprising decreasing the first width to about 0.1 micron.

17. The method of claim 10, comprising laterally processing the photoresist mask with a mixture comprising HBr, oxygen and an inert gas.

18. The method of claim 10, comprising laterally processing the photoresist mask to increase the first width of the element.

19. The method of claim 10, comprising stopping the lateral process when the second width of the element is about 0.3 micron to about 0.12 micron.

20. The method of claim 10, comprising etching through the photoresist mask having the element with the second width to the underlying layers to form a gate electrode having a width of about 0.3 micron to about 0.12 micron.