Low drive voltage optical modulator

• US 6,341,184 B1
• Filed: 09/08/2000
• Issued: 01/22/2002
• Est. Priority Date: 09/10/1999
• Status: Expired due to Fees

• Current Assignee: Enablence, Inc. (Enablence Technologies Incorporated), L3 Optics Incorporated
• Original Assignee: Nanovation Technologies, Inc., Northwestern University
• Inventors: Ho, Seng-Tiong, Chin, Mee Koy
• Primary Examiner(s): Healy, Brian
• Application Number:
  US09/657,397
• Time in Patent Office: 501 Days
• Field of Search: 385/1, 385/2, 385/3, 385/14, 385/129, 385/130, 385/131, 385/132
• US Class Current: 385/3
• CPC Class Codes: G02F 1/025 in an optical waveguide structure G02F1/017, G02F1/2257 take precedence
• CPC Class Codes: G02F 1/212 Mach-Zehnder type
• CPC Class Codes: G02F 1/2257 the optical waveguides being made of semiconducting material
• CPC Class Codes: G02F 2203/15 involving resonance effects, e.g. resonantly enhanced interaction

Abstract

An optical modulator that includes a resonator near one arm of a Mach-Zehnder interferometer and that increases the optical length of that arm so as to introduce a phase-shift in an optical signal propagating in that arm when compared to an optical signal propagating in the other arm of the interferometer. The resonator also increases the electro-optic interaction between an electrical signal (i.e., the source of information in a modulated signal) and the optical devices (e.g., waveguides). A modulator constructed in accordance with the present invention is thus physically small than prior art modulators and requires a significantly reduced drive voltage to impart information on an optical signal.

Claims

1. A low drive voltage optical modulator comprising:

a Mach-Zehnder interferometer having an input waveguide, first and second arms connected to said input waveguide splitting an input optical signal having a predetermined wavelength into a first portion and a second portion, and an output waveguide connected to said first and second arms;

a resonator having a refractive index and being operatively coupled to one of said first and said second arms across a gap; and

a voltage source connected to said resonator for providing a drive voltage thereto, wherein changes in amplitude of the drive voltage cause said resonator refractive index to change;

said changes in said resonator refractive index causing a phase-shift in the first portion of the optical signal propagating in said first arm relative to the second portion of the optical signal propagating in said second arm.

2. The optical modulator of claim 1, wherein said Mach-Zehnder interferometer and said resonator each comprise a relatively high refractive index photonic wire semiconductor waveguide having a core surrounded in all directions transverse to a photon propagation direction in said interferometer and said resonator by a relatively low refractive index medium and materials.

3. The optical modulator of claim 1, wherein said Mach-Zehnder interferometer and said resonator each comprise a relatively high refractive index photonic well semiconductor waveguide having a core surrounded on opposite sides in a direction transverse to photon propagation direction in said interferometer and said resonator by a relatively low refractive index medium and materials.

4. The optical modulator of claim 1, wherein said resonator is formed as a semiconductor microcavity ring.

5. The optical modulator of claim 1, wherein said resonator is formed as a semiconductor microcavity disk.

6. The optical modulator as recited by claim 1, wherein said first and said second arms are approximately the same length, said length being at least approximately equal to or greater than the diameter of said resonator.

7. The optical modulator as recited by claim 1, wherein said resonator causes a phase-shift in the first portion of the optical signal of between approximately 0°

and π

°

.

8. The optical modulator of claim 2, wherein said core of each of said Mach-Zehnder interferometer and said resonator has a refractive index n_core of between approximately 2.5 and 3.5.

9. The optical modulator of claim 8, wherein said core of each of said Mach-Zehnder interferometer and said resonator is made from InGaAsP, AlGaAs, or InGaN materials.

10. The optical modulator of claim 8, wherein said relatively low refractive index medium has a refractive index n_low below approximately 2.0.

11. The optical modulator of claim 10, wherein said relatively low refractive index medium comprises air, acrylic, epoxy, silicon dioxide, aluminum oxide, silicon nitride, spin-on glass, low absorption polymers, photoresist, poly-methyl metacrorate, or polyimide.

12. The optical modulator of claim 10, wherein the ratio of refractive indices n_core/n_low is greater than approximately 2.0.

13. The optical modulator of claim 3, wherein said core of each of said Mach-Zehnder interferometer and said resonator has a refractive index n_core of between approximately 2.5 and 3.5.

14. The optical modulator of claim 13, wherein said core of each of said Mach-Zelinder interferometer and said resonator is made from InGaAsP, AlGaAs, or InGaN/AlGaN materials.

15. The optical modulator of claim 1, wherein said relatively low refractive index medium has a refractive index n_low below approximately 2.0.

16. The optical modulator of claim 1, wherein said relatively low refractive index medium comprises air, acrylic, epoxy, silicon dioxide, aluminum oxide, silicon nitride, spin-on glass, low absorption polymers, photoresist, poly-methyl metacrorate, or polyimide.

17. The optical modulator of claim 1, wherein the ratio of refractive indices n_core/n_low is greater than approximately 2.0.

18. The optical modulator of claim 1, wherein the drive voltage has a maximum amplitude of less than approximately 5 VAC.

19. The optical modulator of claim 1, further comprising:

a second resonator having a second refractive index and being operatively coupled to said other one of said first and second arms across a second gap; and

a second voltage source connected to said second resonator for providing a second drive voltage thereto having a polarity opposite of the drive voltage provided to said resonator, wherein changes in amplitude of the second drive voltage cause said second resonator refractive index to change;

said changes in said second resonator refractive index causing a phase-shift in the second portion of the optical signal propagating in said second arm that is approximately equal to the phase-shift in the first portion of the optical signal caused by said resonator coupled to said first arm.

20. A low drive voltage optical modulator comprising:

a Mach-Zehnder interferometer having an input waveguide, first and second arms connected to said input waveguide splitting an input optical signal having a predetermined wavelength into a first portion and a second portion, and an output waveguide connected to said first and second arms;

first and second resonators each having a refractive index and each being operatively coupled to a respective one of said first and said second arms across a respective gap; and

a voltage source connected to each of said first and said second resonators for providing a respective drive voltage of opposite polarity thereto, wherein changes in amplitude of the respective drive voltage cause said respective refractive index of said first and said second resonators to change;

said changes in said first resonator refractive index causing a first phase-shift in the first portion of the optical signal propagating in said first arm and said changes in said second resonator refractive index causing a second phase-shift in the second portion of the optical signal propagating in said second arm.

21. The optical modulator of claim 20, wherein said Mach-Zehnder interferometer and said first and said second resonators each comprise a relatively high refractive index photonic wire semiconductor waveguide having a core surrounded in all directions transverse to a photon propagation direction in said interferometer and said resonators by a relatively low refractive index medium and materials.

22. The optical modulator of claim 20, wherein said Mach-Zehnder interferometer and said first and said second resonators each comprise a relatively high refractive index photonic well semiconductor waveguide having a core surrounded on opposite sides in a direction transverse to photon propagation direction in said interferometer and said resonators by a relatively low refractive index medium and materials.

23. The optical modulator of claim 20, wherein said first phase-shift and said second phase-shift are approximately equal to each other.

24. The optical modulator of claim 23, wherein said first phase-shift and said second phase-shift are between approximately 0°

and π

°

.

25. A low drive voltage optical resonator comprising:

a Mach-Zehnder interferometer having an input waveguide, first and second arms connected to said input waveguide splitting an input optical signal having a predetermined wavelength into a first portion and a second portion, and an output waveguide connected to said first and second arms; and

a phase-shifter for causing a predetermined phase shift in the first portion of the optical signal propagating in said first arm and being operatively coupled thereto across a gap.

26. The optical modulator of claim 25, wherein said phase-shifter comprises:

a first resonator having a refractive index; and

a voltage source connected to said first resonator for providing a drive voltage thereto, wherein changes in amplitude of said first resonator drive voltage cause said first resonator refractive index to change, said changes in said first resonator refractive index causing a first phase-shift in the first portion of the optical signal propagating in said first arm.

27. The optical modulator of claim 26, further comprising a second phase-shifter for causing a predetermined phase shift in the second portion of the optical signal propagating in said second arm and being operatively coupled thereto across a gap.

28. The optical modulator of claim 27, wherein said second phase-shifter comprises:

a second resonator having a refractive index; and

a voltage source connected to said second resonator for providing a drive voltage thereto, wherein changes in amplitude of said second resonator drive voltage cause said second resonator refractive index to change, said changes in said second resonator refractive index causing a second phase-shift in the second portion of the optical signal propagating in said second arm.

29. The optical modulator of claim 25, wherein said Mach-Zehnder interferometer and said phase-shifter each comprise a relatively high refractive index photonic wire semiconductor waveguide having a core surrounded in all directions transverse to photon propagation direction in said interferometer and said phase-shifter by a relatively low refractive index medium and materials.

30. The optical modulator of claim 25, wherein said Mach-Zehnder interferometer and said phase-shifter each comprise a relatively high refractive index photonic well semiconductor waveguide having a core surrounded on opposite sides in a direction transverse to photon propagation direction in said interferometer and said phase-shifter by a relatively low refractive index medium and materials.

31. The optical modulator of claim 26, wherein the predetermined phase shift is between approximately 0°

and π

° and

wherein said drive voltage is less than or equal to approximately 5 VAC.

32. The optical modulator of claim 27, wherein the predetermined phase shift caused by each said phase-shifter is between approximately 0°

and π

° and

wherein each said drive voltage is less than or equal to approximately 5 VAC.