Shear force microsensor

• US 6,341,532 B1
• Filed: 09/22/2000
• Issued: 01/29/2002
• Est. Priority Date: 11/19/1999
• Status: Expired due to Fees

• Current Assignee: Institute of High Performance Computing
• Original Assignee: Institute of High Performance Computing
• Inventors: Jiang, Tieying, Xu, Diao, Lam, Khin Yong, Ng, Teng Yong, Khoo, Boo Cheong
• Primary Examiner(s): NOORI, MAX H
• Application Number:
  US09/667,511
• Time in Patent Office: 494 Days
• Field of Search: 731/47, 738/41, 738/42, 737/74, 737/77, 737/80
• US Class Current: 73/841
• CPC Class Codes: G01L 1/148 using semiconductive material, e.g. silicon
• CPC Class Codes: G01N 11/02 by measuring flow of the material
• CPC Class Codes: G01P 5/02 by measuring forces exerted by the fluid on solid bodies, e.g. anemometer

Abstract

A micro-dimensional sensor measures the shear force, both in magnitude and direction, at the surface of a solid boundary as a fluid flows over that boundary. The sensor is a micro-mechanical capacitor-transducer system that includes a micro-dimensioned floating upper plate above a fixed lower plate supported on a substrate. The floating upper plate is mounted and held over the substrate by a number of zig-zap form supporting arms. The flow passing over the upper plate displaces the upper plate in a downstream direction, which results in a measurable change of the capacitance in the capacitor-transducer system. The direction and magnitude of the shear forces can then be obtained from the measured capacitance through specially designed circuitry.

Claims

1. A sensor for measuring shear stress at a solid boundary in a fluid flow, including:

a floating element being suspended by a plurality of support arms for resilient movement in all directions in a single plane for measuring shear stress in that plane, said element being spaced from a substrate to form a cavity therebetween, the substrate comprising a two-dimensional array of sensors for measuring the displacement of said element in both magnitude and direction,

the measured displacement providing an indication of the magnitude and direction of shear stress in the plane.

2. A sensor according to claim 1, wherein the two-dimensional array of sensors comprises a two-dimensional array of conductive plates provided in or on said substrate, said floating element comprising a further conductive plate, and said array of conductive plates being electrically connectable to an output to provide a measure of the displacement of said floating element in said plane.

3. A sensor according to claim 1, wherein the plurality of support arms are meandering support arms.

4. A sensor according to claim 3, said support arms having a significantly higher bending stiffness in a direction normal to said plane than in a direction in said plane.

5. A sensor according to claim 1 having a displacement sensitivity to shear force of at least about 1.4 μ

m/Pa.

6. A sensor according to claim 1 having associated circuitry to provide output measures representative of both the magnitude and the direction of the shear stress acting on said floating element.

7. A sensor according to claim 2, wherein the array of substrate conductive plates includes a first plate positioned centrally relative to the floating element and four outer plates substantially uniformly distributed around the periphery of and spaced from said first plate, each of said conductive plates being connectable to output circuitry.

8. A sensor according to claim 7, wherein the conductive plate of the floating element when viewed in projection on said substrate lies wholly within an area bordered by the extrapolation of the outer edges of said four outer plates.

9. A sensor according to claim 2, wherein said floating element is constituted in its entirety by said further conductive plate.

10. A sensor according to claim 1, the floating element being a square plate, suspended by four meandering support arms in the plane of the floating element.

11. A sensor according to claim 10, the support arms extending outwardly from a position approximately central to each of the four sides of the floating element.

12. A sensor according to claim 10, the support arms extending outwardly from the corners of the floating element.

13. A sensor according to claim 1, the floating element being a circular plate, suspended by three meandering support arms.

14. A sensor according to claim 1, the floating element being sufficiently small that the pressure over the floating element is substantially uniform and the pressure gradient thereacross substantially negligible, and the cavity between the floating element and the substrate being sufficiently thin that the floating element is effectively damped against vibration, the sensor therefore being highly insensitive in a direction normal to said plane.

15. A sensor according to claim 1, the floating element having a maximum dimension of less than about 1000 microns, and the cavity being less than 10 microns in thickness.

16. A sensor according to claim 15, the floating element having a maximum dimension of less than about 400 microns, and the cavity being less than 2 microns in thickness.

17. A sensor according to claim 1 in combination with an object having a solid boundary, the sensor mounted to said object such that the surface of the floating element lies substantially flush with the surface provided by said solid boundary.

18. A sensor according to claim 17, the sensor being suspended within a recess provided in the solid boundary of the object.

19. A sensor according to claim 1, the floating element and the conductive plates being fabricated by photolithographic micromachining techniques.

20. A sensor according to claim 1, including circuitry for sensing capacitive coupling between the conductive capacitor plates as said floating element displaces, said circuitry including at least two matched field effect transistors, one transistor coupled to a first sensing node to sense change in capacitive coupling between the conductive plate of the floating element and one of the substrate conductive plates, and the other transistor coupled to a second sensing node to sense change in capacitive coupling between the conductive plate of the floating element and another one of the substrate conductive plates.

21. A sensor according to claim 20, including two pairs of matched field effect transistors, each pair sensing change in capacitive coupling between the conductive plate of the floating element and two of said four outer substrate conductive plates, said first central substrate conductive plate being arranged to receive a constant AC drive signal.

24. The sensor according to claim 1, wherein the supporting arms are zig-zag shaped.

25. The sensor according to claim 1, wherein the plurality of support arms are arranged radially.

27. The method in claim 25, wherein the support arms are meandering.

28. The method in claim 25, wherein the support arms are zig-zag shaped.

22. A method for measuring shear stress at a solid boundary in a fluid flow, said method including the steps of:

providing at said solid boundary a floating element arranged for resilient movement in all directions in a single plane, said element being spaced form a substrate to form a cavity therebetween,

providing said substrate with a two-dimensional array for circuitry for providing signals representing a measure of the displacement of said floating element in said plane; and

processing said signals to provide an output representing the magnitude and direction of the shear stress at said solid boundary.

23. A method for measuring shear stress at a solid boundary in a fluid flow according to claim 22, wherein said floating element comprising a conductive plate and said substrate is provided with a two-dimensional array of conductive plates, including the step of:

electrically connecting the conductive plates of said substrate array to processing circuitry to provide said signals representative of the capacitive coupling between the floating element conductive plate and the individual conductive plates of said substrate array.

26. The method in claim 22, further comprising:

supporting said element using a plurality of radially arranged support arms.