System for locating and measuring an index mark on an edge of a wafer

• US 6,342,705 B1
• Filed: 09/10/1999
• Issued: 01/29/2002
• Est. Priority Date: 09/10/1999
• Status: Expired due to Fees

• Current Assignee: Chapman Instruments, Inc.
• Original Assignee: Chapman Instruments, Inc.
• Inventors: McClimans, Donald P., Li, Kenneth J.
• Primary Examiner(s): Le, Que T.
• Assistant Examiner(s): Luu, Thanh X
• Application Number:
  US09/394,552
• Time in Patent Office: 872 Days
• Field of Search: 250/559.4, 250/559.44, 250/559.42, 250/559.36, 250/559.22, 250/559.23, 250/559.2, 250/559.19, 250/548, 250/559.24, 356/237.4, 356/237.6, 356/602, 356/400, 356/401, 356/237.1
• US Class Current: 250/559.4
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67271 Sorting devices
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

In a system for locating and measuring an index mark on an edge of a wafer, a wafer to be examined is positioned and centered on a chuck in a horizontal chuck position such that an index mark is oriented within first and second index mark orientation features disposed on the chuck. The chuck is translatable, tiltable between horizontal and vertical positions, and rotatable over an angle subtended by the index mark orientation features of the chuck. A laser beam from a laser beam optical profiler is focussed on the surface of the wafer at a distance proximate the wafer edge and proximate the first index mark orientation feature of the chuck. The chuck is rotated in a direction from the first to the second index mark orientation feature whereby a reflected portion of the laser beam generates data corresponding to the angular location of index mark edges. An index mark center location is computed. The chuck is tilted to a vertical chuck position, and the index mark is measured by the focussed laser beam to provide index mark data which serve as a basis for accepting or rejecting a wafer.

Claims

1. A method of locating and measuring an index mark on an edge of a wafer, comprising the steps of:

a) providing a laser beam optical profiler adapted to focus an incident laser beam at a spot on a surface of a wafer and to receive a reflected portion of said incident laser beam therefrom for generating data from which a center of an index mark can be computed;

b) providing a chuck for accepting and centering a wafer, said chuck being translatable with respect to said optical profiler in respectively orthogonal x and y directions, and said chuck being tiltable between a first chuck position and a second chuck position, characterized in that said chuck has a first and a second index mark orientation feature extending inwardly from an edge of said chuck, and said chuck being rotatable at least through an angle subtended by said first and second index mark orientation features;

c) positioning a wafer having an index mark on an edge thereof on said chuck in said first chuck position such that said index mark is oriented between said first and second index mark orientation features;

d) translating said chuck with respect to said optical profiler such that said incident laser beam is focussed at said spot at a distance proximate said edge of said wafer and proximate said first index mark orientation feature of said chuck;

e) rotating said chuck in a direction from said first index mark orientation feature toward said second index mark orientation feature such that said focussed beam is translated circumferentially at a fixed radius along said wafer surface to intercept sequentially said first edge and said second edge of said index mark, the amplitude of said reflected portion being changed thereby and said change being detected, whereby said reflected portion generates data corresponding to the angular locations of a first edge and a second edge of said index mark;

f) computing the angular location of the center of said index mark from said corresponding data, and storing said computed index mark center location;

g) tilting said chuck to a second position orthogonal to said first position;

h) translating said chuck with respect to said optical profiler such that said incident laser beam from said optical profiler is focused on said wafer edge at said computed index mark center location for measuring data corresponding to said center of said index mark;

i) translating said chuck with respect to said profiler for measuring data corresponding to a plurality of locations along said index mark edge; and

j) comparing said index mark data with data representative of a standard to determine acceptability of said wafer.

2. The method as recited in claim 1 wherein the translating step (d) includes translating the chuck such that the laser beam is focussed on the surface of the wafer at a distance less than 0.5 mm inwardly from the edge of the wafer.

3. The method as recited in claim 1 wherein the rotating step (e) includes the steps of:

(m) rotating the chuck at a first rotational speed in a direction from the first index mark orientation feature to the second index mark orientation feature until the reflected portion of the laser beam generates data corresponding to an approximate angular location of a first edge of an index mark;

(n) rotating the chuck at the first rotational speed and in a reverse direction toward the first index mark orientation feature until the reflected portion of the laser beam indicates that the laser beam is focussed on the wafer surface;

(o) rotating the chuck at a lower second rotational speed in a direction from the first to the second index mark orientation feature to generate data corresponding to a precise angular location of the first edge of the index mark;

(p) continuing rotating the chuck at the lower second rotational speed through an angle of less than 5°

beyond the precise angular location of the first edge of the index mark to generate data corresponding to a precise angular location of a second edge of the index mark if the index mark is a notch index mark;

(q) continuing rotating the chuck at the first rotational speed in a direction toward the second index mark orientation feature if a second edge of a notch index mark was not found in step (p) until the reflected portion of the laser beam generates data corresponding to an approximate angular location of a second edge of the index mark, thereby indicating that the index mark is a flat; and

(r) rotating the chuck at a lower second rotational speed and in a reverse direction toward the first index mark orientation feature until the reflected portion of the laser beam generates data corresponding to a precise angular location of the second edge of the flat index mark.

4. The method as recited in claim 1 wherein the translating step (d) includes a preceding step of establishing a dark signal level by translating the chuck with respect to the profiler such that the laser beam from the profiler is directed at a chuck surface at a distance spaced outwardly from the edge of the wafer.

5. The method as recited in claim 3 wherein the first rotational speed is in a range of 20-80°

/sec, and the second rotational speed is in a range of 0.5-5°

/sec.

6. The method as recited in claim 1 wherein the index mark is selected from the group consisting of a flat or a notch.

7. The method as recited in claim 1 wherein the rotating step (e) includes rotating the chuck through an angle of less than 60°

.

8. A method of locating and measuring an index mark on an edge of a wafer, comprising the steps of:

a) providing a laser beam optical profiler adapted to focus an incident laser beam at a spot on a surface of a wafer and to receive a reflected portion of said incident laser beam therefrom for generating data from which a center of an index mark can be computed;

b) providing a chuck for accepting and centering a wafer, said chuck being translatable with respect to said optical profiler in respectively orthogonal x and y directions, and said chuck being tiltable between a first chuck position and a second chuck position, characterized in that said chuck has an aperture extending inwardly from an edge of said chuck, said aperture being defined by a first aperture corner and a second aperture corner, and said chuck being rotatable at least through an angle subtended by said first and second aperture corners;

c) positioning a wafer having an index mark on an edge thereof on said chuck, said chuck being in said first chuck position such that said index mark is oriented between said first and second aperture corners;

d) translating said chuck with respect to said optical profiler such that said incident laser beam is focussed at said spot at a distance proximate said edge of said wafer and proximate said first aperture corner of said chuck;

e) rotating said chuck in a direction from said first aperture corner toward said second aperture corner such that said focussed beam is translated circumferentially at a fixed radius along said wafer surface to intercept sequentially said first edge and said second edge of said index mark, the amplitude of said reflected portion being changed thereby and said change being detected, whereby said reflected portion generates data corresponding to the angular locations of a first edge and a second edge of said index mark;

f) computing the angular location of the center of said index mark from said corresponding data, and storing said computed index mark center location;

g) tilting said chuck to a second position orthogonal to said first position;

h) translating said chuck with respect to said optical profiler such that said incident laser beam from said optical profiler is focused on said wafer edge at said computed index mark center location for measuring data corresponding to said center of said index mark;

i) translating said chuck with respect to said profiler for measuring data corresponding to a plurality of locations along said index mark edge; and

j) comparing said index mark data with data representative of a standard to determine acceptability of said wafer.

9. The method as recited in claim 8 wherein the translating step (d) includes translating the chuck with respect to the profiler such that the laser beam is focussed on the surface of the wafer at a distance less than 0.5 mm inwardly from the edge of the wafer.

10. The method as recited in claim 8 wherein the rotating step (e) includes the steps of:

(m) rotating the chuck at a first rotational speed in a direction from the first aperture corner to the second aperture corner until the reflected portion of the laser beam generates data corresponding to an approximate angular location of a first edge of an index mark;

(n) rotating the chuck at the first rotational speed and in a reverse direction toward the first aperture corner until the reflected portion of the laser beam indicates that the laser beam is focussed on the wafer surface;

(o) rotating the chuck at a lower second rotational speed in a direction from the first to the second aperture corner to generate data corresponding to a precise angular location of the first edge of the index mark;

(p) continuing rotating the chuck at the lower second rotational speed through an angle of less than 5°

beyond the precise angular location of the first edge of the index mark to generate data corresponding to a precise angular location of a second edge of the index mark if the index mark is a notch index mark;

(q) continuing rotating the chuck at the first rotational speed in a direction toward the second aperture corner if a second edge of a notch index mark was not found in step (p) until the reflected portion of the laser beam generates data corresponding to an approximate angular location of a second edge of the index mark, thereby indicating that the index mark is a flat; and

(r) rotating the chuck at a lower second rotational speed and in a reverse direction toward the first aperture corner until the reflected portion of the laser beam generates data corresponding to a precise angular location of the second edge of the flat index mark.

11. The method as recited in claim 8 wherein the translating step (d) includes a preceding step of establishing a dark signal level by translating the chuck with respect to the profiler such that the laser beam from the optical profiler is directed at the aperture of the chuck at a distance spaced outwardly from the edge of the wafer.

12. The method as recited in claim 10 wherein the first rotational speed is in a range of 20-80°

/sec, and the second rotational speed is in a range of 0.5-5°

/sec.

13. The method as recited in claim 8 wherein the index mark is a flat or a notch.

14. The method as recited in claim 8 wherein the rotating step (e) includes rotating the chuck through an angle of less than 60°

.

15. A system for locating and measuring an index mark on an edge of a wafer, comprising:

a) a laser beam optical profiler adapted to focus an incident laser beam at a spot on a surface of a wafer and to receive a reflected portion of said incident beam therefrom for generating data from which a center of an index mark may be computed;

b) a chuck for accepting said wafer, said chuck having means for centering said wafer thereon, having first index mark orientation means and second index mark orientation means for orienting said index mark of said wafer therebetween, having means for translating said chuck with respect to said optical profiler in respectively orthogonal x and y directions, having means for tilting said chuck between a first chuck position and a second chuck position orthogonal to said first chuck position, and means for rotating said chuck at least through an angle subtended by said first and second index mark orientation means;

c) means for centering said wafer on said chuck in said first chuck position such that said index mark is oriented between said first and the second index mark orientation means;

d) means for detecting an angular location of a first edge and a second edge of said index mark when said chuck is rotated by said rotating means through said subtended angle such that said focussed beam is translated circumferentially at a fixed radius along said wafer surface to intercept sequentially said first edge and said second edge of said index mark, the amplitude of said reflected portion being changed thereby and said change being detected;

e) means for computing an index mark center location from said detected angular locations of said first and second index mark edges;

f) means for measuring index mark data with said chuck in said second chuck position and said laser focussed on said wafer edge; and

g) means for comparing said measured index mark data with data representative of a standard to determine acceptability of said wafer.

16. The apparatus in accordance with claim 15 wherein the laser beam optical profiler is a phase differential laser beam optical profiler.

17. The apparatus in accordance with claim 15 wherein the means for centering a wafer on the chuck includes centering pins or centering stubs projecting from a surface of the chuck, or centering brackets extending inwardly from an edge of the chuck along a chuck surface.

18. The apparatus in accordance with claim 15 wherein the means for centering a wafer on the chuck is a recess in a chuck surface concentric with a chuck edge, the recess configured to accept a wafer.

19. The apparatus in accordance with claim 17 wherein the first and second index mark orientation means are markings on an edge of the chuck or extending on a surface of the chuck by a distance inwardly from the edge of the chuck, the first and second index mark orientation means subtending an angle of about 60°

.

20. The apparatus in accordance with claim 17 wherein the first and second index mark orientation means are first and second aperture comers of an aperture which extends inwardly from an edge of the chuck, the first and second aperture comers subtending an angle of about 60°

.

21. The apparatus in accordance with claim 18 wherein the first and second index mark orientation means are first and second aperture comers of an aperture which extends inwardly from an edge of the chuck, the first and second aperture corners subtending an angle of about 60°

.

22. The apparatus in accordance with claim 15 wherein the means for rotating the chuck includes means for rotating the chuck in a direction from the first to the second index mark orientation means at a first rotational speed in a range of 20-80°

/sec to detect an approximate angular location of a first index mark edge;

means for rotating the chuck in a reverse direction at the first rotational speed;

means for rotating the chuck in a direction from the first to the second index mark orientation means at a lower second rotational speed in a range of 0.5 to 5°

/sec to detect a precise angular location of the first index mark edge;

means for rotating the chuck at the second rotational speed beyond the precise angular location of the first index mark edge by an angle of less than 5°

so as to detect a precise angular location of a second index mark edge of a notch index mark if such index mark is a notch index mark;

means for rotating the chuck at the first rotational speed in a direction toward the second index mark orientation means if a notch index mark was not detected to detect an approximate angular location of a second index mark edge associated with a flat index mark; and

means for rotating the chuck in a reverse direction at the lower second rotational speed to detect a precise angular location of the second index mark edge.