Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this process
First Claim
1. Dielectric interference filter system comprising at least two filter elements on a common carrier, each of the filter elements with a multitude of interference layers and spectrally different operational characteristics, the filter elements being laterally distinct from each other, wherein overall thicknesses of interference layers on each of the at least two filter elements differ by no more than 1% of the overall thickness of interference layers on each of the other of said at least two filter elements.
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Accused Products
Abstract
A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.
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Citations
23 Claims
- 1. Dielectric interference filter system comprising at least two filter elements on a common carrier, each of the filter elements with a multitude of interference layers and spectrally different operational characteristics, the filter elements being laterally distinct from each other, wherein overall thicknesses of interference layers on each of the at least two filter elements differ by no more than 1% of the overall thickness of interference layers on each of the other of said at least two filter elements.
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16. LCD-display including a color filter system incorporating a dielectric interference filter system, comprising at least two filter elements with spectrally different operational characteristics on a common carrier, each of the filter elements being laterally distinct from each other, wherein overall thicknesses of interference layers on each of the at least two filter elements differ by no more than 1% of the overall thickness of interference layers on each of the other of said at least two filter elements.
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17. CCD-arrangement including a color filter system incorporating a dielectric interference filter system comprising at least two filter elements with spectrally different operational characteristics on a common carrier, each of the at least two filter elements being laterally distinct from each other, wherein overall thicknesses of interference layers on each of the at least two filter elements differ by no more than 1% of the overall thickness of interference layers on each of the other of said at least two filter elements.
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18. A method of manufacturing an interference color filter system having at least three filter elements on a common carrier, comprising:
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preparing a first multilayer interference color filter layer by coating said common carrier;
applying a first etching mask on said first interference color filter layer;
plasma etching said first multilayer interference color filter layer with said first etching mask, thereby obtaining first interference color filter elements covered with said first etching mask and first uncovered areas of said carrier;
preparing a second multilayer interference color filter layer by coating upon said first etching mask and said first uncovered areas of said carrier;
applying a second etching mask upon said second multilayer interference color filter layer;
plasma-etching said second multilayer interference color filter layer with said second etching mask, thereby obtaining second interference color filter elements covered with said second etching mask and second uncovered areas of said carrier;
preparing a third multilayer interference color filter layer upon said second etching mask and said second uncovered areas; and
lifting off said first and second etching masks, thereby lifting off said third multilayer interference color filter layer. - View Dependent Claims (19, 20, 21, 22)
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23. A method of manufacturing an interference color filter system with more than two filter elements on a common carrier, comprising (a) preparing all the filter elements by masking and plasma etching, and (b) removing more than one etching mask and interference layers deposited thereupon in a common liftoff step.
Specification