×

Protective device for clean robot

  • US 6,343,242 B1
  • Filed: 06/11/2001
  • Issued: 01/29/2002
  • Est. Priority Date: 10/19/1998
  • Status: Expired due to Term
First Claim
Patent Images

1. In a clean robot including robot arms for holding fork for receiving and transferring wafer substance at the tip ends thereof, and turning, extending and contracting in the horizontal direction;

  • a base disposed at the lower part of said robot arm and internally accommodates an actuator consisting of a drive motor for driving said robot arm and a speed reducer coupled to said drive motor;

    a translational guide provided so that it rectilinearly moves said base in the horizontal direction; and

    a robot controller for driving and controlling said robot arms and translational guide,a protective device for a clean robot, comprising;

    a signal processing circuit that comprises;

    acceleration sensors that are disposed inside said base and provided in respective axes so that they detect an impact, which is given by interference of said clean robot with any surrounding substance, as a vibration acceleration in three-axis directions orthogonal to each other;

    interference detection means that are provided in contact with the acceleration sensors of the respective axes and outputs a pulse signal when the detection signal of said acceleration sensors exceeds a certain threshold value;

    a first AND circuit for converting the signals, which are outputted from the interference detection means of the respective axes, to interference signals;

    wherein after the interference signals outputted from said signal processing circuit are transmitted to said robot controller, and the drive motor of said actuator is stopped.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×