Gas purge protection of sensors and windows in a gas phase processing reactor

• US 6,344,151 B1
• Filed: 04/27/2000
• Issued: 02/05/2002
• Est. Priority Date: 12/31/1997
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Holland, John, Chen, Anthony L.
• Primary Examiner(s): DANG, THI D
• Application Number:
  US09/559,795
• Time in Patent Office: 649 Days
• Field of Search: 216/60, 438/7, 438/9, 204/298.03, 204/298.32, 204/192.13, 204/192.33
• US Class Current: 216/60
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: Y10S 156/916 Differential etching apparatus including chamber cleaning means or shield for preventing deposits

Abstract

A gas purged viewport for endpoint detection in a gas phase processing chamber is provided which prevents contamination of an optical monitoring window by use of a purge gas flow. The purge gas purges the viewport and prevents deposition of byproducts and contaminants on the window which will adversely effect endpoint detection. The gas purge viewport includes a prechamber between the optically transparent window and the process chamber. The purge gas is passed through the prechamber and into the processing chamber to purge the window. The gas purge system may also be used to purge other parts such as sensors.

Claims

1. A method of monitoring a process in a gas phase process chamber, the method comprising:

providing an optically transparent window on a wall of a gas phase process chamber;

separating the window from the chamber by a prechamber;

feeding a purge gas through the prechamber to prevent deposition of contaminants on the window; and

optically monitoring the process within the chamber through the window.

2. The method of monitoring according to claim 1, wherein the purge gas is fed through the prechamber and into the process chamber.

3. The method of monitoring according to claim 2, wherein the purge gas is fed from the prechamber into the process chamber through a hole connecting the prechamber to the process chamber.

4. The method of monitoring according to claim 3, wherein the hole connecting the prechamber to the process chamber is about 0.5 mm to about 5.0 mm in diameter and a flow of purge gas through the prechamber is about 0.5 sccm to about 50 sccms.

5. The method of monitoring according to claim 3, wherein the optical monitoring is performed by measuring light passing through the hole connecting the prechamber to the process chamber and through the window.

6. The method of monitoring according to claim 1, wherein the purge gas is fed through the prechamber at a flow rate which is sufficiently large to prevent process byproducts from hitting the window and is sufficiently small to prevent process drift.

7. The method of monitoring according to claim 1, wherein the purge gas is fed through the prechamber during a CVD process to prevent deposition of byproducts on the window.

8. The method of monitoring according to claim 1, wherein the purge gas is fed through the prechamber during an etching process to prevent deposition of by products on the window.

9. The method of monitoring according to claim 1, wherein the purge gas is fed through the prechamber during cleaning of the process chamber to prevent deposition of byproducts on the window.

10. The method of monitoring according to claim 1, wherein the purge gas is an inert gas.

11. The method of monitoring according to claim 1, wherein the purge gas is a processing gas.

12. The method of monitoring according to claim 1, wherein the optical monitoring detects an end point of the process.

13. The method of monitoring of claim 1, wherein a flow rate of the purged gas is controlled so that the prechamber is kept free of process gases.

15. The method of preventing adverse effects according to claim 12, wherein the part protected by the feeding of purge gas is an optically transparent window.

14. A method of preventing adverse effects on a part in a gas phase process chamber, the method comprising:

positioning a prechamber between a part and a gas phase process chamber; and

feeding a purge gas through the prechamber and into the process chamber to purge the part by preventing gases within the process chamber from adversely effecting the part.

16. The method of preventing adverse effects of claim 14, wherein a flow rate of the purged gas is controlled so that the prechamber is kept free of process gases.