Surface measuring apparatus having relative displacement between a probe and its carriage

• US 6,344,656 B1
• Filed: 07/21/2000
• Issued: 02/05/2002
• Est. Priority Date: 12/04/1997
• Status: Expired due to Fees

• Current Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Original Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Inventors: Smith, Anthony, Hall, Keith, Hopkins, Ian, Daudia, Dipak
• Primary Examiner(s): LE, QUE TAN
• Application Number:
  US09/555,730
• Time in Patent Office: 564 Days
• Field of Search: 250/559.22, 250/559.29, 250/559.33, 250/207.3, 356/375, 356/376, 356/239.1, 356/239.2, 356/237.2, 356/237.5
• US Class Current: 250/559.22
• CPC Class Codes: G01B 11/005 coordinate measuring machines

Abstract

A metrological instrument for measuring surface characteristics such as surface form of a component (300). The instrument includes a slideway (32) to cause relative movement between a surface sensing probe (84) and the component which allows the probe to traverse a surface of the component. A probe carriage (80) supports the probe to allow the probe to move as a body in a measurement direction relative to the carriage so as to follow a surface being sensed. An optical sensor (82) provides a signal indicative of the displacement of the probe relative to the probe carriage. A controller (83) acts in response to a signal from the optical sensor, to move the probe carriage so as to maintain the probe in an operational range. A further sensor (11) measures measurement of displacement of the probe in the measurement direction as it follows a surface during use of the instrument.

Claims

1. A metrological apparatus for measuring a surface characteristic of a surface of a workpiece, the metrological apparatus comprising:

a housing;

a probe carriage for carrying an elongate sensing probe having a longitudinal axis so as to allow the elongate sensing probe to move relative to the probe carriage in a measurement direction parallel to the longitudinal axis thereby enabling the elongate sensing probe to follow the surface being measured, wherein the probe carriage is mounted on the housing so as to allow relative movement between the probe carriage and the housing in the measurement direction;

first moving means for causing relative movement between the elongate sensing probe and the workpiece to allow the elongate sensing probe to traverse the surface of the workpiece;

a first sensor for providing a measurement of a displacement of the elongate sensing probe relative to the housing as the elongate sensing probe follows the surface during operation of the first moving means;

an optical sensor for providing a signal indicative of a displacement of the elongate sensing probe relative to the probe carriage;

second moving means for causing relative movement between the probe carriage and the housing in the measurement direction; and

a control unit for controlling the second moving means to move the probe carriage relative to the housing in response to the signal provided by the optical sensor to maintain the elongate sensing probe in an operational range.

2. An apparatus according to claim 1 wherein said optical sensor comprises:

light emission means; and

light detection means, said light emission means and light detection means being mounted on said probe carriage;

a shutter mounted so as to move with the elongate sensing probe, said shutter being movable between said light emission means and said light detection means wherein, in use, the signal indicative of the position of the probe relative to the probe carriage is emitted by the light detection means.

3. An apparatus according to claim 1 wherein the probe carriage provides an air bearing arrangement for supporting the elongate sensing probe.

4. An apparatus according to claim 1 wherein the first sensor comprises an optical interferometer mounted to the housing apparatus and light reflecting means movable with the elongate sensing probe.

5. An apparatus according to claim 4 comprising a elongate sensing probe having said light reflecting means mounted at an end thereof opposite to a surface sensing end.

6. An apparatus according to claim 1 having an elongate sensing probe comprising an elongate rod fixedly supported partially within an elongate shaft of square outer cross-section, and wherein the probe carriage comprises a square bore for receiving said elongate shaft so that the elongate shaft is movable in the square bore.

7. An apparatus according to claim 1 further comprising biasing means for biasing the elongate sensing probe towards the surface being measured.

8. An apparatus according to claim 7 wherein said biasing means comprise a coil spring.

9. An apparatus according to claim 1 wherein said first moving means comprises a platform movable in a direction perpendicular to the measurement direction.

10. An apparatus according to claim 9 wherein said platform includes means for levelling the workpiece to be measured.

11. An apparatus according to claim 9 wherein said platform includes third moving means for moving the workpiece in a second direction perpendicular to the measurement direction.

12. An apparatus according to any of claims 6 to 11 further comprising biasing means for biasing the probe towards the surface being sensed.

13. An apparatus according to claim 9 wherein said platform further includes a turntable rotatable about an axis which is not parallel to the surface of the platform.

14. An apparatus according to claim 1 further comprising a slideway along which the probe carriage is movable and means supporting said probe carriage on the slideway.

15. An apparatus according to claim 14 comprising a gantry carrying said slideway so that said probe carriage is suspended from the gantry.

16. An apparatus according to claim 15 wherein the second moving means comprises a motor for causing rotation of a feed wheel carrying a cable, said probe carriage being suspended from the gantry by the cable so that rotation of the motor causes movement of the probe carriage up and down the slideway.

17. An apparatus according to claim 16 wherein the feed wheel is driven by the motor via a step down gear box.

18. A method of measuring surface characteristics of a component in a measurement direction, the method comprising the steps of:

causing relative movement between a surface sensing probe and a component to allow the probe to traverse a surface of the component;

supporting the probe using a probe carriage so as to allow the surface sensing probe to move as a body in the measurement direction relative to the probe carriage so as to follow the surface being sensed;

optically sensing the displacement of the surface sensing probe relative to the probe carriage;

controlling the movement of the probe carriage in the measurement direction in response to said displacement sensed in the optically sensing step so as to maintain the surface sensing probe in an operational range; and

further sensing the displacement of the surface sensing probe in the measurement direction as it follows the surface.