Thin-film field-effect transistor with organic-inorganic hybrid semiconductor requiring low operating voltages

• US 6,344,662 B1
• Filed: 11/01/2000
• Issued: 02/05/2002
• Est. Priority Date: 03/25/1997
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Mitzi, David Brian, Kagan, Cherie Renee, Dimitrakopoulos, Christos Dimitrios
• Primary Examiner(s): CRANE, SARA W
• Application Number:
  US09/703,964
• Time in Patent Office: 461 Days
• Field of Search: 257/40, 257/76, 257/289, 257/295, 257/310, 257/347, 257/410
• US Class Current: 257/40
• CPC Class Codes: H01L 21/02197 the material having a perovskite structure, e.g. BaTiO3
• CPC Class Codes: H01L 21/2007 Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer H01L21/2011 takes precedence; bonding of semiconductor wafers to semiconductor wafers for junction formation H01L21/187
• CPC Class Codes: H01L 21/31691 with perovskite structure
• CPC Class Codes: H01L 21/76251 using bonding techniques
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H10K 10/466 Lateral bottom-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 10/472 the gate dielectric comprising only inorganic materials
• CPC Class Codes: H10K 85/50 Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
• CPC Class Codes: H10K 85/615 Polycyclic condensed aromatic hydrocarbons, e.g. anthracene

Abstract

A thin film transistor (TFT) device structure based on an organic-inorganic hybrid semiconductor material, that exhibits a high field effect mobility, high current modulation at lower operating voltages than the current state of the art organic-inorganic hybrid TFT devices. The structure comprises a suitable substrate disposed with the following sequence of features: a set of conducting gate electrodes covered with a high dielectric constant insulator, a layer of the organic-inorganic hybrid semiconductor, sets of electrically conducting source and drain electrodes corresponding to each of the gate lines, and an optional passivation layer that can overcoat and protect the device structure. Use of high dielectric constant gate insulators exploits the gate voltage dependence of the organic-inorganic hybrid semiconductor to achieve high field effect mobility levels at very low operating voltages. Judicious combinations of the choice of this high dielectric constant gate insulator material and the means to integrate it into the organic-inorganic hybrid based TFT structure are taught that would enable easy fabrication on glass or plastic substrates and the use of such devices in flat panel display applications.

Claims

1. A transistor device structure comprising:

a substrate on which an electrically conducting gate electrode is disposed;

a layer of high dielectric constant gate insulator disposed on said gate electrode;

an electrically conductive source electrode and an electrically conductive drain electrode disposed on said layer of gate insulator;

a layer of an organic-inorganic hybrid semiconductor disposed on said gate insulator and said source electrode and said drain electrode.

2. A transistor device structure according to claim 1 wherein said gate insulator has a high dielectric constate.

3. A structure according to claim 1 wherein the substrate is selected from the group consisting of glass, plastic, quartz, undoped silicon and heavily doped silicon.

4. A structure according to claim 3 wherein the said plastic substrate is selected from the group comprising polycarbonate, Mylar, polyimide and polyethylene terephthalate.

5. A structure according to claim 1 wherein the said gate electrode material is selected from the group consisting of chromium, titanium, copper, aluminum, molybdenum, tungsten, nickel, gold, platinum, palladium, conducting polyaniline, conducting polypyrrole or combinations thereof.

6. A structure according to claim 1 wherein said gate electrodes are 30 nm to 500 nm thick and are produced by a process selected from the group consisting of evaporation, sputtering, chemical vapor deposition, electrodeposition, spin coating, and electroless plating.

7. A structure according to claim 1 wherein said high dielectric constant insulator is selected from the group barium strontium titanate, barium zirconate titanate, lead zirconate titanate, lead lanthanum titanate, strontium titanate, bismuth titanate, barium magnesium fluoride, tantalum pentoxide, titanium dioxide and yttrium trioxide, aluminum trioxide and silicon nitride.

8. A structure according to claim 7 wherein the said insulator has a thickness in the range of 80 nm to 1000 nm.

9. A structure according to claim 7 wherein the said insulator is produced by a process selected from the group consisting of sputtering, chemical vapor deposition, sol-gel coating, dip-coating, evaporation, laser ablative deposition and anodization.

10. A structure according to claim 7 wherein the high dielectric constant insulator is an organic material.

11. A structure according to claim 1 wherein said organic-inorganic hybrid semiconductor is any organic-inorganic hybrid semiconductor that exhibits an increase in field effect mobility with increasing gate voltage.

12. A structure according to claim 11 wherein said organic-inorganic hybrid semiconductor is the perovskite (C₆H₅C₂H₄NH₃)₂SnI₄.

13. A structure according to claim 12 wherein said organic-inorganic hybrid semiconductor is selected from the group consisting of one or more of butylammonium methylammonium tin iodide, phenethylammonium methylammonium tin iodide, butanediammonium tin iodide, butylammonium tin iodide, hexylammonium tin iodide, nonylammonium tin iodide, and dodecylammonium tin iodide and derivatives thereof.

14. A structure according to claim 11 wherein the said organic-inorganic hybrid semiconductor layer has a thickness in the range from two monolayers to 400 nm.

19. A structure according to claim 1 wherein said source and drain electrodes are made of material selected from the group consisting of chromium, titanium, copper, aluminum, molybdenum, tungsten, nickel, gold, palladium, platinum, conducting polymers, oligomers and small organic molecules and combinations thereof.

20. A structure according to claim 19 wherein an optional ohmic contact layer made of a material selected from the group consisting of gold, platinum, palladium, conducting polymers and oligomers, semiconducting polymers and oligomers, and combination thereof, is disposed between said source/drain electrodes and said semiconductor layer.

21. A structure according to claim 19 wherein the thickness of the said source and drain electrodes is in the range 30 nm to 500 nm.

23. A structure according to claim 2 wherein said passivation layer is a polymer selected from the group consisting of polyimide, parylene and undoped polyaniline.

28. A transistor device according to claim 1 wherein said organic-inorganic hybrid semiconductor is a perovskite material.

29. A structure according to claim 1 further including an insulating passivation layer disposed on said structure that protects it from further processing exposures and from the external ambient.

30. A structure according to claim 1 wherein said high dielectric constant insulator is a composite layer consisting of high dielectric constant particles contained in a matrix material exhibiting a lower dielectric constant.

31. A structure according to claim 12 wherein said high dielectric constant insulator is a composite layer consisting of high dielectric constant particles contained in a matrix material exhibiting a lower dielectric constant.

32. A structure according to claim 13 wherein said organic-inorganic hybrid semiconductor is any organic-inorganic hybrid semiconductor that exhibits an increase in field effect mobility with increasing gate voltage.

15. A method of fabricating a transistor device structure comprising:

providing a substrate on which an electrically conducting gate electrode is disposed;

disposing a layer of high dielectric constant gate insulator disposed on said gate electrode;

disposing an electrically conductive source electrode and an electrically conductive drain electrode on said layer of gate insulator;

disposing a layer of an organic-inorganic hybrid semiconductor on said gate insulator and said source electrode and said drain electrode.

16. A method according to claim 15 wherein the said organic-inorganic hybrid semiconductor layer is deposited by a process selected from the group consisting of sublimation, evaporation, molecular beam deposition or a combination thereof.

17. A method according to claim 15 wherein the said organic-inorganic hybrid semiconductor layer is deposited by a solution based process selected from the group consisting of spin coating, dip-coating, self assembly from solution, stamping, screening, spraying, inkjet printing or a combination thereof.

18. A method according to claim 15 wherein the said organic-inorganic hybrid semiconductor layer is optionally segmented by a process selected from the group consisting of deposition through a mask, screen printing, stamping, and lithographic patterning of the blanket film, in order to minimize the leakage and stray currents in the TFT device.

22. A method according to claim 15 wherein said source and drain electrodes are patterned by a method selected from the group consisting of deposition through shadow mask and lithographic patterning techniques.

37. A method according to claim 15 wherein said organic-inorganic hybrid semiconductor is the perovskite (C₆H₅C₂H₄NH₃)₂SnI₄.

38. A method according to claim 15 wherein said organic-inorganic hybrid semiconductor is selected from the group consisting of one or more of butylammonium methylammonium tin iodide, phenethylammonium methylammonium tin iodide, butanediammonium tin iodide, butylammonium tin iodide, hexylammonium tin iodide, nonylammonium tin iodide, and dodecylammonium tin iodide and derivatives thereof.

39. A method according to claim 37 wherein said high dielectric constant insulator is a composite layer consisting of high dielectric constant particles contained in a matrix material exhibiting a lower dielectric constant.

40. A method according to claim 37 wherein said organic-inorganic hybrid semiconductor is any organic-inorganic hybrid semiconductor that exhibits an increase in field effect mobility with increasing gate voltage.

41. A method according to claim 38 wherein said high dielectric constant insulator is a composite layer consisting of high dielectric constant particles contained in a matrix material exhibiting a lower dielectric constant.

42. A method according to claim 38 wherein said organic-inorganic hybrid semiconductor is any organic-inorganic hybrid semiconductor that exhibits an increase in field effect mobility with increasing gate voltage.

24. A thin film transistor device structure comprising a substrate on which a plurality of electrically conducting gate electrodes are disposed;

a layer of high dielectric constant gate insulator disposed on said electrodes;

a layer of an organic-inorganic hybrid semiconductor disposed on said insulator and substantially overlapping with each of the said gate electrodes;

a plurality of sets of electrically conductive source and drain electrodes disposed on said organic-inorganic hybrid semiconductor and said high dielectric constant gate insulator in alignment with each of the said gate electrodes.

33. A structure according to claim 24 wherein said high dielectric constant insulator is a composite layer consisting of high dielectric constant particles contained in a matrix material exhibiting a lower dielectric constant.

25. A transistor device structure comprising:

a drain, a source electrode, a drain electrode, a gate electrode, a gate insulator and a semiconductive material disposed between and in electrical contact with said source electrode and said gate electrode, said gate insulator is disposed between said gate electrode and said active region;

said semiconductive material is an organic-inorganic hybrid material.

26. A transistor device according to claim 25 wherein said organic-inorganic hybrid material is the perovskite (C₆H₅C₂H₄NH₃)₂SnI₄.

27. A transistor device according to claim 25 wherein said organic-inorganic hybrid material is selected from the group consisting of one or more of butylammonium methylammonium tin iodide, phenethylammonium methylammonium tin iodide, butanediammonium tin iodide, butylammonium tin iodide, hexylammonium tin iodide, nonylammonium tin iodide, and dodecylammonium tin iodide and derivatives thereof.

34. A structure according to claim 25 wherein said organic-inorganic hybrid semiconductor is any organic-inorganic hybrid semiconductor that exhibits an increase in field effect mobility with increasing gate voltage.

35. A method according to claim 25 wherein said high dielectric constant insulator is a composite layer consisting of high dielectric constant particles contained in a matrix material exhibiting a lower dielectric constant.

36. A method according to claim 25 wherein said organic-inorganic hybrid semiconductor is any organic-inorganic hybrid semiconductor that exhibits an increase in field effect mobility with increasing gate voltage.