Algainn elog led and laser diode structures for pure blue or green emission

• US 6,345,063 B1
• Filed: 07/28/1999
• Issued: 02/05/2002
• Est. Priority Date: 07/31/1998
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Bour, David P., Romano, Linda T., Kneissl, Michael A.
• Primary Examiner(s): Healy, Brian
• Application Number:
  US09/363,251
• Time in Patent Office: 923 Days
• Field of Search: 372/43, 372/44, 372/45, 372/46, 372/50, 257/14, 257/15, 257/94, 257/103, 359/127, 359/134, 359/333, 359/344, 359/345
• US Class Current: 372/45.01
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/32 containing nitrogen

Abstract

Group III-V nitride semiconductors are used as optoelectronic light emitters. The semiconductor alloy InGaN is used as the active region in nitride laser diodes and LEDs, as its bandgap energy can be tuned by adjusting the alloy composition, to span the entire visible spectrum. InGaN layers of high-indium content, as required for blue or green emission are difficult to grow, however, because the poor lattice mismatch between GaN and InGaN causes alloy segregation. In this situation, the inhomogeneous alloy composition results in spectrally impure emission, and diminished optical gain. To suppress segregation, the high-indium-content InGaN active region may be deposited over a thick InGaN layer, substituted for the more typical GaN. First depositing a thick InGaN layer establishes a larger lattice parameter than that of GaN. Consequently, a high indium content heterostructure active region grown over the thick InGaN layer experiences significantly less lattice mismatch compared to GaN. Therefore, it is less likely to suffer structural degradation due to alloy segregation. Thus, the thick GaN structure enables the growth of a high indium content active region with improved structural and optoelectronic properties, leading to LEDs with spectrally pure emission, and lower threshold laser diodes.

Claims

1. A semiconductor structure, comprising:

a nucleation layer;

a patterned mask layer formed on the nucleation layer;

an InGaN ELOG layer formed over the patterned mask layer;

a thick InGaN layer grown over the patterned mask layer; and

an active layer formed over the thick InGaN layer.

2. The semiconductor structure according to claim 1, further comprising at least one group III-V nitride layer formed over the active layer.

3. The semiconductor structure according to claim 2, wherein the thick InGaN layer and the at least one group III-V nitride layer form confinement layers, confining injected carriers to the active layer.

4. The semiconductor structure according to claim 1, wherein the active layer includes a waveguiding layer and a quantum well active region.

5. The semiconductor structure according to claim 1, wherein the nucleation layer includes a plurality of nucleation sub-layers.

6. The semiconductor structure according to claim 1, wherein the active layer comprises InGaN.

7. The semiconductor structure according to claim 1, wherein the thick InGaN layer is n-type doped.

8. The semiconductor structure according to claim 1, wherein the semiconductor structure is an optoelectronic device.

9. The semiconductor structure according to claim 1, wherein the semiconductor structure emits light in the blue region of the spectrum.

10. The semiconductor structure according to claim 1, wherein the semiconductor structure emits light with a wavelength within a range including 430 nm to 650 nm.

11. The semiconductor structure according to claim 1, wherein the mask layer is a material selected from the group comprising SiN and SiO₂.

12. The semiconductor structure of claim 5, wherein the mask layer is a material selected from the group comprising SiN and SiO₂.

13. An image forming apparatus that forms an image on a light sensitive medium, the image forming apparatus including at least one light source that includes the semiconductor structure of claim 1.

14. A data storage apparatus that stores data on a medium, the data storage apparatus including at least one light source that includes the semiconductor structure of claim 1.

15. A communications apparatus that communicates information through a communications transmission medium, the communications apparatus including at least one light source that includes the semiconductor structure of claim 1.

16. The communications apparatus according to claim 15, wherein the communications apparatus comprises a fiber optic network.

17. The communications apparatus according to claim 15, wherein the at least one light source comprises at least one of a fiber optic emitter and a fiber optic repeater.