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Image processing apparatus and method of processing height data to obtain image data using gradient data calculated for a plurality of different points of a surface and adjusted in accordance with a selected angle of illumination

  • US 6,345,107 B1
  • Filed: 12/02/1999
  • Issued: 02/05/2002
  • Est. Priority Date: 02/21/1996
  • Status: Expired due to Fees
First Claim
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1. Metrological apparatus for determining the surface texture or roughness of a workpiece comprising:

  • means for measuring the height of the surface at a plurality of different points on the surface to produce a corresponding plurality of height values;

    selection means for selecting one of a plurality of angles of illumination;

    processing means for;

    (i) calculating local gradient data at each of a plurality of said different points on the surface from said height values, (ii) adjusting said gradient data dependent upon a selected angle of illumination, and (iii) generating image data by combining the corresponding values of said adjusted gradient data and said input height value for a plurality of said different points; and

    means for forming an image in accordance with said image data.

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