Carbon nanotube structures made using catalyst islands

• US 6,346,189 B1
• Filed: 08/14/1998
• Issued: 02/12/2002
• Est. Priority Date: 08/14/1998
• Status: Expired due to Term

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford Management Co.)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford Management Co.)
• Inventors: Soh, Hyongsok, Kong, Jing, Quate, Calvin F., Dai, Hongjie
• Primary Examiner(s): Mayekar, Kishor
• Application Number:
  US09/133,948
• Time in Patent Office: 1,278 Days
• Field of Search: 205/766, 423/445.R, 423/453, 731/05
• US Class Current: 205/766
• CPC Class Codes: B82B 1/00 Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
• CPC Class Codes: B82B 3/00 Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: G01N 27/127 comprising nanoparticles
• CPC Class Codes: G01Q 70/12 Nanotube tips
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 17/165 Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses digital stores using resistance random access memory elements G11C13/0002
• CPC Class Codes: Y10S 427/102 Fullerene type base or coating
• CPC Class Codes: Y10S 977/742 Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/746 Modified with biological, organic, or hydrocarbon material
• CPC Class Codes: Y10S 977/842 for carbon nanotubes or fullerenes
• CPC Class Codes: Y10S 977/843 Gas phase catalytic growth, i.e. chemical vapor deposition
• CPC Class Codes: Y10S 977/876 Nanotube tip
• CPC Class Codes: Y10S 977/894 having step or means utilizing biological growth
• CPC Class Codes: Y10S 977/895 having step or means utilizing chemical property
• CPC Class Codes: Y10S 977/957 : Of chemical property or presence
• CPC Class Codes: Y10T 428/2918 : including free carbon or carbide or therewith [not as steel]
• CPC Class Codes: Y10T 428/2975 : Tubular or cellular

Abstract

The present invention includes several nanotube structures which can be made using catalyst islands disposed on a substrate (e.g. silicon, alumina, or quartz) or on the free end of an atomic force microscope cantilever. The catalyst islands are capable of catalyzing the growth of carbon nanotubes from carbon containing gases (e.g. methane). The present invention includes an island of catalyst material (such as Fe₂O₃) disposed on the substrate with a carbon nanotube extending from the island. Also included in the present invention is a pair of islands with a nanotube extending between the islands, electrically connecting them. Conductive metal lines connected to the islands (which may be a few microns on a side) allows for external circuitry to connect to the nanotube. Such a structure can be used in many different electronic and microelectromechanical devices. For example, a nanotube connected between two islands can function as a resonator if the substrate beneath the nanotube is etched away. Also, the present invention includes a catalyst particle disposed on the free end of an AFM cantilever and having a nanotube extending from the particle. The nanotube can be used as the scanning tip of the AFM as is know in the art.

Claims

1. An apparatus comprising:

a) a substrate with a top surface;

b) a catalyst island disposed on the top surface of the substrate;

c) a carbon nanotube extending from the catalyst island.

2. The apparatus of claim 1 wherein the nanotube is disposed on the top surface of the substrate.

3. The apparatus of claim 1 wherein the nanotube is a single-walled nanotube.

4. The apparatus of claim 1 wherein the catalyst island comprises Fe₂O₃.

5. The apparatus of claim 1 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.

6. The apparatus of claim 5 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, ruthenium and oxides thereof.

7. The apparatus of claim 1 wherein the catalyst island is in the range of 1-5 microns in size.

8. The apparatus of claim 1, wherein the substrate comprises a material selected from the group consisting of silicon, alumina, quartz, and silicon nitride.

9. The apparatus of claim 1 wherein the catalyst island comprises particles of ceramic material.

10. The apparatus of claim 1 further comprising a metal cover which covers an end portion of the nanotube and a portion of the island.

11. An apparatus comprising:

a) a substrate with a top surface;

b) two catalyst islands disposed on the top surface of the substrate;

c) a carbon nanotube extending between the catalyst islands such that the nanotube provides an electrical connection between the catalyst islands.

12. The apparatus of claim 11 wherein the nanotube is disposed on the top surface of the substrate.

13. The apparatus of claim 11 wherein the nanotube is supported only by its ends.

14. The apparatus of claim 11 wherein the substrate comprises a trench under the nanotube so that the nanotube is freestanding.

15. The apparatus of claim 11 wherein the catalyst island comprises particles of ceramic material.

16. The apparatus of claim 11 further comprising a conductive line in electrical contact with each island.

17. The apparatus of claim 11 wherein the catalyst islands are separated by a distance less than about 50 microns.

18. The apparatus of claim 11, wherein the substrate comprises a material selected from the group consisting of silicon, alumina, quartz, silica and silicon nitride.

19. The apparatus of claim 11 wherein the catalyst islands comprise a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.

20. The apparatus of claim 19 wherein the catalyst islands comprise a material selected from the group consisting of iron, molybdenum, ruthenium and oxides thereof.

21. The apparatus of claim 11 further comprising a metal cover which covers an end portion of the nanotube and a portion of at least one island.

22. An apparatus comprising:

a) a substrate with a top surface;

b) a catalyst island disposed on the top surface of the substrate;

c) a metal pad disposed on the top surface of the substrate;

d) a carbon nanotube extending between the catalyst island and the metal pad such that the nanotube provides an electrical connection between the catalyst island and metal pad.

23. The apparatus of claim 22 wherein the nanotube is disposed on the top surface of the substrate.

24. The apparatus of claim 22 wherein the nanotube is supported only by its ends.

25. The apparatus of claim 22 wherein the substrate comprises a trench under the nanotube so that the nanotube is freestanding.

26. The apparatus of claim 22 wherein the catalyst island comprises particles of ceramic material.

27. The apparatus of claim 22 further comprising a conductive line in electrical contact with the island.

28. The apparatus of claim 22 further comprising a conductive line in electrical contact with the metal pad.

29. The apparatus of claim 22, wherein the substrate comprises a material selected from the group consisting of silicon, alumina, quartz, silica and silicon nitride.

30. The apparatus of claim 22 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.

31. The apparatus of claim 30 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, ruthenium, and oxides thereof.

32. The apparatus of claim 22 further comprising a metal cover which covers an end portion of the nanotube and a portion of the island.

33. An apparatus comprising:

a) a base;

b) a cantilever extending from the base, the cantilever having a free end opposite the base;

c) a catalyst particle disposed on the free end of the cantilever, wherein the catalyst particle is capable of catalyzing the growth of carbon nanotubes;

d) a carbon nanotube extending from the catalyst particle.

34. The apparatus of claim 33 wherein the catalyst particle comprises Fe₂O₃.

35. The apparatus of claim 33 wherein the catalyst particle comprises a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.

36. The apparatus of claim 33 further comprising a tip on the free end, wherein the catalyst particle is disposed on the tip.

37. The apparatus of claim 33 wherein the apparatus is an atomic force microscopy apparatus.

38. A method for producing an apparatus with a tip comprising a carbon nanotube, the method comprising the steps of:

a) providing a cantilever suitable for use in atomic force microscopy;

b) disposing a catalyst particle on a free end of the cantilever, wherein the catalyst particle is capable of growing carbon nanotubes when exposed to a carbon-containing gas at elevated temperature;

c) contacting a carbon-containing gas to the catalyst particle at elevated temperature.

39. The method of claim 38 wherein step (b) comprises the steps of:

i) contacting the free end to a particle of Fe(NO₃)₃ disposed on an electrically conductive substrate; and

ii) applying an electric field between the free end and the substrate.

40. The method of claim 38 wherein step (b) comprises the steps of:

i) contacting the free end to a particle of Fe(SO₄)₂ disposed on an electrically conductive substrate; and

ii) applying an electric field between the free end and the substrate.

41. The method of claim 38 wherein the apparatus produced is an atomic force microscopy apparatus.

42. A method for producing individually distinct carbon nanotubes, the method comprising the steps of:

a) providing a substrate with a top surface;

b) forming an island of catalyst material on the top surface;

c) heating the substrate and catalyst island; and

d) contacting the catalyst island with a carbon-containing gas for a period of time sufficient to form the nanotubes on the catalyst island.

43. The method of claim 42 wherein the catalyst island is about 1-5 microns in size.

44. The method of claim 42, wherein the carbon-containing gas comprises methane.

45. The method of claim 42, wherein the period of time is about 10 minutes.