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Flexible board

  • US 6,346,298 B1
  • Filed: 12/08/1999
  • Issued: 02/12/2002
  • Est. Priority Date: 12/21/1998
  • Status: Expired due to Term
First Claim
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1. A method of forming a flexible board, comprising:

  • forming a first polyimide precursor film over a metal foil, the first polyimide precursor film having a content of residual volatile fractions within the range of 20 to 30 wt %;

    forming a second polyimide precursor film over the first polyimide precursor film, the second polyimide precursor film having a content of residual volatile fractions within the range of 30 to 50 wt %;

    forming a third polyimide precursor film over the second polyimide precursor film, the third polyimide precursor film having a content of residual volatile fractions within the range of 30 to 50 wt %; and

    heat treating the first polyimide precursor film, the second polyimide precursor film and the third polyimide precursor film at a temperature of 210°

    C. to 250°

    C. to set the content of residual volatile fractions of the first polyimide precursor film, the second polyimide precursor film and the third polyimide precursor film at 7 to 10 wt % and to bring the imidation ratio of the first polyimide precursor film, the second polyimide precursor film and the third polyimide precursor film to 50% or lower, to form a corresponding first polyimide-based layer, second polyimide-based layer and third polyimide-based layer, wherein said flexible board satisfies the equation

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