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Monolithic high performance miniature flow control unit

  • US 6,349,740 B1
  • Filed: 04/08/1999
  • Issued: 02/26/2002
  • Est. Priority Date: 04/08/1999
  • Status: Expired due to Fees
First Claim
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1. A monolithic fluid flow control structure comprising:

  • (a) a fluid channel extending through the fluid flow control structure between an inlet port and an outlet port, said inlet port being adapted to couple in fluid communication with a fluid reservoir from which fluid is supplied to the inlet port;

    (b) a valve disposed in the fluid channel, upstream of the outlet port, said valve controlling fluid flow through the outlet port in response to a valve control signal applied to the valve;

    (c) a first pressure sensor and a second pressure sensor, at least one of which is disposed within the fluid channel, between inlet port and the outlet port, said first and second pressure sensor producing first and second pressure signals that are employed in sensing fluid flow through said fluid flow control structure as a function of a differential pressure; and

    (d) a bubble sensor that detects bubbles within the fluid channel.

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