Heater for processing chamber

• US 6,350,320 B1
• Filed: 02/22/2000
• Issued: 02/26/2002
• Est. Priority Date: 02/22/2000
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yudovsky, Joseph, Khurana, Nitin, Popiolkowski, Alan, Mosely, Rod, Kelkar, Umesh Madhav, Gilliam, Alison, Yoshidome, Ted, Smith, Paul, Sherstinsky, Semyon, Zuniga, Leonel A.
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US09/510,110
• Time in Patent Office: 735 Days
• Field of Search: 118/715, 118/728, 118/729, 118/730, 118/500, 204/298.07, 204/298.11, 204/298.15, 427/248.1
• US Class Current: 118/715
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts

Abstract

A gas delivery apparatus and method for directing a flow of gas to the edge of a substrate at an angle to the radial direction of the substrate is provided. The apparatus directs the gas from a gas opening, over a plurality of grooves that are angled relative to a radial line originating at a center of the gas delivery apparatus. Subsequently, the gas is flowed over a portion of the substrate to prevent reactive gases from depositing on selective portions of the substrate.

Claims

1. A purge gas assembly adapted to direct a flow of a gas in a processing system, comprising:

a deflection member having a lower surface defining a deflection surface adapted to direct the flow of the gas at an angle to a radial line directed from a central axis of the deflection member over the deflection surface; and

an edge ring disposable over at least a portion of an upper surface of the deflection member and comprising an inner annular lip;

wherein the deflection member and the edge ring define a portion of a purge gas passageway.

2. The apparatus of claim 1, wherein a diametrically interior portion of the annular lip is disposable below a perimeter portion of a substrate disposed on a substrate receiving surface of a support member defining another portion of the purge gas passageway.

3. The apparatus of claim 1, wherein the edge ring comprises a first portion and a second portion coupled to one another.

4. The apparatus of claim 1, wherein the edge ring defines a plurality of purge gas exhaust ports extending substantially radially outwardly relative to a central axis of the edge ring.

5. The apparatus of claim 1, wherein the edge ring comprises:

a first portion having a sloped surface disposed between a top surface and the annular lip; and

a second portion coupled to a lower surface of the first portion and disposed in facing relation to the deflection member.

6. The apparatus of claim 5, wherein the lower surface of the first portion and an upper surface of the second portion define one or more spaces therebetween.

7. The apparatus of claim 5, wherein the first portion and the second portion of the edge ring are coupled by fasteners.

8. The apparatus of claim 1, wherein the deflection surface comprises one or more of fluid grooves formed at least partially therein.

9. The apparatus of claim 8, wherein the one or more grooves extend outwardly from an inner diameter of the deflection member at an angle to a radial line originating at a center axis of the deflection member.

10. The apparatus of claim 9, wherein the angle is between about 60 and 75 degrees.

11. The apparatus of claim 1, wherein the edge ring comprises an annular upper portion which forms a portion of a purge gas exhaust passageway and wherein the edge ring further comprises ports to vent the purge gas exhaust passageway.

12. The apparatus of claim 11, wherein a diametrically interior portion of the annular lip is disposable at a height substantially equal to the edge of the substrate.

13. An apparatus for processing a substrate, comprising:

a support member having a substrate receiving surface;

a shoulder portion of the support member disposed outwardly of the substrate receiving surface and having a gas delivery groove formed therein;

a deflection member positioned on the shoulder portion to define an interface between a surface of the deflection member and a surface of the shoulder portion;

a deflection surface disposed at the interface and formed on at least one of the deflection member and the shoulder portion and wherein the deflection surface is adapted to cause a tangential flow of gas over the deflection surface; and

an edge ring at least partially disposed over the deflection member.

14. The apparatus of claim 13, wherein the edge ring comprises a first portion and a second portion coupled to a lower surface of the first portion.

15. The apparatus of claim 13, further comprising a purge gas supply fluidly coupled to the gas groove.

16. The apparatus of claim 13, wherein the deflection member defines one or more grooves in the deflection surface extending outwardly from an inner diameter surface of the deflection member at an angle to a radius of the deflection member.

17. The apparatus of claim 13, wherein the angle is between about 60 and 75 degrees.

18. The apparatus of claim 13, wherein the edge ring defines a plurality of purge gas exhaust ports extending substantially radially outwardly relative to the substrate receiving surface.

19. The apparatus of claim 13, wherein the edge ring comprises an upper portion and a lower portion forming a purge gas passageway therebetween and wherein at least one of the upper portion and lower portion define exhaust ports to vent the purge gas passageway.

20. The apparatus of claim 19, wherein the first portion and the second portion are coupled to one another by fasteners.

21. A method for delivering a gas to a substrate supported on an upper surface of a support member in a process chamber, comprising:

a) providing a gas delivery assembly disposed on a shoulder of the support member, the gas delivery assembly comprises a deflection member and an edge ring having at least a portion disposed over the deflection member;

b) flowing a gas into a gas delivery channel formed in the support member;

c) flowing the gas over a deflection surface disposed on one or more of the deflection member and the shoulder to provide a tangential component to a direction of gas flow; and

then

d) flowing at least a portion of the gas into an annular opening formed between the gas delivery assembly and the shoulder of the support member.

22. The method of claim 21, further comprising flowing a portion of the gas through one or more ports defined in the edge ring.

23. The method of claim 21, further comprising flowing a first portion of the gas through one or more ports defined in the edge ring and a flowing a second portion of the gas in a space formed between a lip of the edge ring and an outer edge of the substrate.

24. The method of claim 21, wherein the gas is directed at an angle between about 60 degrees and about 75 degrees to a radius of the deflection member.

25. The method of claim 21, wherein c) comprises flowing the gas through one or more grooves defined by the deflection surface.

26. The method of claim 21, wherein c) comprises flowing the gas through one or more grooves defined by the deflection surface, wherein the deflection surface is disposed on a surface of the deflection member in facing relation to a surface of the shoulder.

27. The method of claim 21, wherein c) comprises flowing the gas through one or more grooves defined by the deflection surface, wherein the deflection surface is disposed on a surface of the shoulder in facing relation to a surface of the deflection member.

28. The method of claim 21, further comprising flowing the gas unto a perimeter portion of the substrate.