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Optical attenuator

  • US 6,351,329 B1
  • Filed: 10/08/1999
  • Issued: 02/26/2002
  • Est. Priority Date: 10/08/1999
  • Status: Expired due to Term
First Claim
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1. An optical attenuator, comprising:

  • a substrate, wherein the substrate has a cavity therein; and

    a membrane, wherein the membrane covers the cavity in the substrate, wherein the membrane is adapted to receive optical signals, and wherein the membrane is configured to have a region for receiving optical signals that is removed from the center of the cavity.

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