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Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements

  • US 6,351,580 B1
  • Filed: 03/27/2000
  • Issued: 02/26/2002
  • Est. Priority Date: 03/27/2000
  • Status: Expired due to Term
First Claim
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1. A micromechanical brake assembly, comprising:

  • a substrate;

    a first beam that is coupled to said substrate and moves in a first direction upon expansion thereof;

    a first brake member that is coupled to said first beam so that movement of said first beam in the first direction causes movement of said first brake member in the first direction;

    a second beam that is coupled to said substrate and moves in a second direction opposite the first direction upon expansion thereof;

    a second brake member that is disposed opposite said first brake member and is coupled to said second beam so that movement of said second beam in the second direction causes movement of said second brake member in the second direction;

    a braking element disposed between said first and second brake members; and

    means, coupled to said substrate, for moving said braking element in a third direction orthogonal to the first direction.

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