Manufacturing method for metallic stamper and metallic stamper and, manufacturing method for optical disk substrate with the use of the stamper and optical disk fabricated by the manufacturing method
First Claim
1. A manufacturing method for a metallic stamper, which comprises:
- forming a coat made of a resin material consisting essentially of acryl or polyimide onto a Si substrate which is to be a master, the resin material having a lower hardness than Ni of projections at a metallic stamper of Ni to prevent deformation of the projections on the occasion of separating the stamper from the master;
forming a pattern of a mask to be an etching mask onto the resin material;
etching a non-masked portion not masked by the mask of the resin material partially in a thicknesswise direction of the Si substrate to retain part of the non-masked portion of the resin material;
after the etching, removing the mask, thereby obtaining the master;
forming an Ni portion onto the master; and
separating the Ni portion from the resin material preventing deformation of the projections, thereby obtaining the metallic stamper.
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Accused Products
Abstract
The present invention provides a method for manufacturing optical disk substrates whereby grooves and pits of optical disk substrates are formed highly accurately and finely, so that resulting optical disks can be of large-capacity and reduced in noise level. A coat of an organic material is provided on a substrate which is to be a master, on which a mask material is patterned as an etching mask. After the coat of the organic material is etched, the mask material is removed, whereby a master is obtained. A metallic coat is formed to the master. A metallic main body portion is integrally formed on the metallic coat. A metallic portion comprising the metallic coat and metallic main body portion is separated from the master. A metallic stamper is thus formed.
27 Citations
9 Claims
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1. A manufacturing method for a metallic stamper, which comprises:
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forming a coat made of a resin material consisting essentially of acryl or polyimide onto a Si substrate which is to be a master, the resin material having a lower hardness than Ni of projections at a metallic stamper of Ni to prevent deformation of the projections on the occasion of separating the stamper from the master;
forming a pattern of a mask to be an etching mask onto the resin material;
etching a non-masked portion not masked by the mask of the resin material partially in a thicknesswise direction of the Si substrate to retain part of the non-masked portion of the resin material;
after the etching, removing the mask, thereby obtaining the master;
forming an Ni portion onto the master; and
separating the Ni portion from the resin material preventing deformation of the projections, thereby obtaining the metallic stamper. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification
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- Resources
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Current AssigneeMatsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
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Original AssigneeMatsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
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InventorsKimura, Tadashi, Ueno, Fumiaki
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Primary Examiner(s)Vargot, Mathieu D.
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Application NumberUS09/311,638Time in Patent Office1,026 DaysField of Search264/1.1, 264/1.33, 264/2.5, 425/175, 425/810, 369/272, 428/913, 428/64.2, 428/64.4, 205/271, 216/24US Class Current264/2.5CPC Class CodesB29D 17/005 Producing optically read re...G11B 7/261 Preparing a master, e.g. ex...Y10S 425/81 Sound record
