Method of fabrication of a torsional micro-mechanical mirror system

• US 6,353,492 B2
• Filed: 01/03/2001
• Issued: 03/05/2002
• Est. Priority Date: 08/27/1997
• Status: Expired due to Term

• Current Assignee: Google LLC (Alphabet Inc.), Northeastern University
• Original Assignee: MicroOptical Corporation, Northeastern University
• Inventors: Rensing, Noa More, Spitzer, Mark Bradley, Zavracky, Paul Martin, McClelland, Robert William, Aquilino, Paul Daniel
• Primary Examiner(s): MAI, HUY KIM
• Application Number:
  US09/753,512
• Publication Number:
  US 20010021058A1
• Time in Patent Office: 426 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291, 359/295, 359/298, 359/315, 359/318, 359/245, 359/247, 359/254
• US Class Current: 359/254
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means

Abstract

A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly. Other actuator assemblies are operative to push on the mirror assembly or provide electrodes spaced across the gap between the mirror assembly and the base. A process for fabricating the torsional micro-mirror is provided. The torsional micro-mirror is useful in various applications such as in biaxial scanner or video display systems.

Claims

1. A process for fabricating a torsional micro-mechanical mirror system, comprising:

providing a wafer substrate of a substrate material;

providing electrical contact pads and anchors for torsional spring structures on one surface of the wafer;

forming the torsional spring structures on the anchors;

removing a portion of the substrate material to define a mirror support structure separated by a gap from surrounding substrate material; and

providing a mirror on the mirror support structure.

2. The process of claim 1, wherein the step of forming the torsional spring structures comprises:

applying a release layer to the one surface of the wafer, the release layer patterned with holes to expose the anchors;

depositing a layer of a conducting material over the release layer to form a portion of the torsional spring structures;

applying and patterning a photoresist layer to form a mask having exposed regions configured to allow deposition of material for the torsional spring structures;

depositing a material to the exposed regions to form the torsional spring structures; and

removing the release layer and mask.

3. The process of claim 1, further comprising etching a back surface of the wafer to form a membrane for the mirror support structure.

4. The process of claim 1, wherein the step of providing the mirror comprises providing a metal or dielectric coating to the mirror support structure through a mask.

5. The process of claim 1, wherein the step of providing the mirror comprises bonding a mirror to the mirror support structure.

6. The process of claim 1, wherein the step of providing the mirror comprises bonding a mirror base and a reflecting layer to the mirror support structure.

7. The process of claim 1, wherein the step of providing the mirror comprises bonding a curved mirror to the mirror support structure.

8. The process of claim 1, further comprising applying a stress compensation material to the mirror support structure.

9. The process of claim 1, further comprising forming a stiffening pattern in a back side of the wafer.

10. The process of claim 1, wherein the step of providing a wafer comprises providing a polished wafer.