Process and apparatus for providing a film with a gradient
First Claim
1. A nozzle for forming a film by chemical vapor deposition, the nozzle comprising first and second upstream heel-pieces, a central profiled block, and a downstream heel-piece, each of the heel pieces and central profiled block having a lower portion, a first region defined between the two upstream heel-pieces for injecting at least one first precursor gas, a second region defined between the upstream heel-piece and the central profiled block for injecting at least one second precursor gas having a different composition than the first precursor gas, a third region defined between the central profiled block and the downstream heel-piece for evacuating gaseous effluent, the regions and lower portions guiding gas streams supplying the injection slots along the glass in a deposition zone with a flow path having approximately the shape of a U, the distance between the two injection slots and the relative configurations of the first upstream heel-piece, the second upstream heel-piece, and the central block being chosen so as to cause partial and progressive mixing between the gas streams in the deposition zone.
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Abstract
The subject of the invention is a glazing panel comprising a transparent substrate (1) especially one made of glass, provided with at least one functional, conductive and/or low-emissivity, transparent thin film (3). In order to improve the optical and especially the calorimetric appearance of the glazing panel, at least one intermediate film (2) is placed between the substrate (1) and the functional film (3), this at least one intermediate film having a refractive index gradient decreasing through its thickness.
The invention also relates to the device intended for manufacturing this type of glazing panel.
85 Citations
20 Claims
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1. A nozzle for forming a film by chemical vapor deposition, the nozzle comprising first and second upstream heel-pieces, a central profiled block, and a downstream heel-piece, each of the heel pieces and central profiled block having a lower portion, a first region defined between the two upstream heel-pieces for injecting at least one first precursor gas, a second region defined between the upstream heel-piece and the central profiled block for injecting at least one second precursor gas having a different composition than the first precursor gas, a third region defined between the central profiled block and the downstream heel-piece for evacuating gaseous effluent, the regions and lower portions guiding gas streams supplying the injection slots along the glass in a deposition zone with a flow path having approximately the shape of a U, the distance between the two injection slots and the relative configurations of the first upstream heel-piece, the second upstream heel-piece, and the central block being chosen so as to cause partial and progressive mixing between the gas streams in the deposition zone.
- 2. A nozzle for forming a film by chemical vapor deposition, the nozzle comprising first and second upstream heel-pieces, a central profiled block, and a downstream heel-piece, a first slot defined between the two upstream heel-pieces for injecting at least one first precursor gas, a second slot defined between the upstream heel-piece and the central profiled block for injecting at least one second precursor gas having a different composition than the first precursor gas, a third slot defined between the central profiled block and the downstream heel-piece for evacuating gaseous effluent, all the slots and lower faces of the heel-pieces and of the central block guiding gas streams supplying the injection slots along the glass in a deposition zone with a flow path having approximately the shape of a U, the distance between the two injection slots and the relative configurations of the first upstream heel-piece, the second upstream heel-piece, and the central block being chosen so as to cause partial and progressive mixing between the gas streams in the deposition zone, wherein the lower face of the central block is at a higher level than the lower face of the second upstream heel-piece, and the second upstream heel-piece is at a higher level than the lower face of the first upstream heel-piece.
- 10. A process for forming, by chemical vapor deposition, a film having a refractive index gradient on a float glass moving from an upstream position to a downstream position in one direction through a chamber of a float glass bath, which comprises separately supplying first and second different precursor gases respectively through a firs t feed region and a second feed region disposed closer to the downstream position than the first feed region, to a deposition zone located in the float glass bath chamber above the moving float glass, providing laminar flow of gas streams coming from these two gases alone the float glass in a first part of the deposition zone, and creating a region of turbulence in a second part of the deposition zone proximate a convergence of the second feed region and the deposition zone, w herein partial and progressive mixing occurs between the different precursor gases in the deposition zone.
- 18. A nozzle for supplying precursor gases for producing a film by chemical vapor deposition on a moving glass substrate, the nozzle comprising a body with an upstream end and a downstream end, the body defining a first feed region disposed closer to the upstream end than a second feed region, an evacuation region disposed closer to the downstream end than the second feed region, and a deposition zone for receiving the precursor gases, wherein each feed region delivers at least one different precursor gas proximate the deposition zone, gases delivered through the first and second feed regions enter the deposition zone at first and second spacings from the glass substrate with the first spacing being smaller than the second spacing, and the body is configured and dimensioned to promote partial and progressive mixing of the gases in the deposition zone.
Specification