Three-dimensional packaging technology for multi-layered integrated circuits

• US 6,355,976 B1
• Filed: 07/27/1998
• Issued: 03/12/2002
• Est. Priority Date: 05/14/1992
• Status: Expired due to Fees

• Current Assignee: Reveo, Inc.
• Original Assignee: Reveo, Inc.
• Inventors: Faris, Sadeg M.
• Primary Examiner(s): Clark, Sheila V.
• Application Number:
  US09/123,388
• Time in Patent Office: 1,324 Days
• Field of Search: 257/685, 257/686, 257/723, 257/724
• US Class Current: 257/686
• CPC Class Codes: H01L 2225/06551 Conductive connections on the side of the device
• CPC Class Codes: H01L 23/3672 Foil-like cooling fins or heat sinks being part of lead-frames H01L23/49568
• CPC Class Codes: H01L 23/473 by flowing liquids H01L23/4332, H01L23/4338 take precedence
• CPC Class Codes: H01L 23/5387 Flexible insulating substrates H01L23/5388 takes precedence
• CPC Class Codes: H01L 25/0652 the devices being arranged next and on each other, i.e. mixed assemblies
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Disclosed is method and apparatus for packaging multilayered integrated circuit (IC) chips, on which logic circuits and/or memory arrays are disposed and interconnected in a novel way permitting the addressing (i.e. selection) of the logic circuits and/or arrays on these IC chip layers using a minimum number of connections and with the shortest propagation delays.

Claims

1. A module subassembly comprising:

an element having a planar surface and at least an edge portion which is transparent to electromagnetic radiation;

a plurality of active circuit devices disposed in juxtaposition with said planar surface and spaced from said an edge portion; and

encoding means extending from a portion of said plurality of active circuit devices and terminating at the outer edge of said at least an edge portion.

2. A module subassembly according to claim 1 wherein said element is a semiconductor.

3. A module subassembly according to claim 1 wherein said element is an electrically insulating material.

4. A module subassembly according to claim 1 wherein said element is an electrically insulating material.

5. A module subassembly according to claim 1 wherein said element is silicon.

6. A module subassembly according to claim 1 wherein said element is made of lithium niobayte.

7. A module subassembly according to claim 1 wherein said active circuit devices are transistors.

8. A module subassembly according to claim 1 wherein said active circuit devices are memory cells.

9. A module subassembly according to claim 1 wherein said active circuit devices are logic circuits.

10. A module subassembly according to claim 1 wherein said active circuit devices are comparator circuits.

11. A module subassembly according to claim 1 wherein said active circuit devices are switchable optical devices.

12. A module subassembly according to claim 1 wherein said active circuit devices are optical circuits.

13. A module subassembly according to claim 1 wherein said active circuit devices are Josephson junctions.

14. A module subassembly according to claim 1 wherein said active circuit devices are electrically switchable devices disposed in insulated spaced relationship with said planar surface.

15. A module subassembly according to claim 1 wherein said element is made of III-V compound semiconductor materials and their alloys.

16. A module subassembly according to claim 1 wherein said element is made of gallium arsenide.

17. A module subassembly according to claim 1 wherein said element is a metal.

18. A module subassembly according to claim 1 wherein said edge portion is an oxide of a metal.

19. A module subassembly according to claim 1 wherein said edge portion is an oxide of silicon.

20. A module subassembly according to claim 1 wherein said edge portion is a material transparent to electromagnetic radiation.

21. A module subassembly according to claim 1 wherein edge portion is a material transparent to ultra-violet radiation.

22. A module subassembly according to claim 1 wherein said edge portion is an insulator transparent to electromagnetic radiation.

23. A module subassembly according to claim 1 further including a heat dissipating metal film having a waffle iron-like shape extending from the underside of said element.

24. A module subassembly according to claim 1 further including a heat dissipating metal film having a waffle iron-like shape extending from the underside of said element.

25. A module subassembly according to claim 1 further including a copper film disposed contiguously with the underside of said element.

26. A module subassembly according to claim 1 wherein said element is flexible.

27. A module subassembly according to claim 1 wherein said element is rigid.

28. A module subassembly according to claim 1 wherein said encoding means includes at least a pair of encoder lines extending from said portion of said plurality of active circuit devices and terminating at said outer edge.

29. A module subassembly according to claim 1 wherein said portion of said plurality of active circuit devices is a comparator circuit.

30. A module subassembly according to claim 1 wherein said active circuit devices are CMOS devices.

31. An assembly according to claim 1 further including a first plurality address transmission lines extending over said at least an edge portion and said element to at least one of said plurality of active circuit devices and terminating at said outer edge of said at least an edge portion.

32. An assembly according to claim 1 further including a second plurality of data and power transmission lines extending over said at least an edge portion to an least another of said plurality of active circuit devices and terminating at said outer edge of said at least edge portion.

33. A module subassembly according to claim 28 further including means disposed perpendicular to said at least a pair of encoder lines and adjacent to said outer edge connected to said at least a pair of encoder lines for one of enabling and disabling at least one of the devices of said portion of said plurality of active circuit devices.

34. A module subassembly according to claim 28 wherein said encoder lines are made of metal.

35. A module subassembly according to claim 28 wherein said encoder lines are made of heavily doped silicon.

36. A module subassembly according to claim 28 wherein said encoder lines are passivated with an oxide of silicon.

37. A module subassembly according to claim 28 wherein said encoder lines are optical transmission lines.

38. A module subassembly according to claim 29 wherein said encoder lines are made of titanium dioxide.

39. A module subassembly according to claim 29 further including at least a pair of encoder lines extending from said outer edge to said comparator circuit, and, means disposed perpendicular to said at least a pair of encoder lines and adjacent to said outer edge connected to said at least a pair of encoder lines for one of enabling said plurality of active circuit devices.

40. An assembly according to claim 31 wherein said address transmission lines are electrically conductive.

41. An assembly according to claim 31 wherein said address transmission lines are optical fibers.

42. An assembly according to claim 32 wherein said data and power transmission lines are electrically conductive.

43. A module subassembly according to claim 32 wherein said data and power transmission lines are optical fibers.

44. A module subassembly according to claim 33 wherein said means for one of enabling and disabling is a shorting strap interconnecting said at least a pair of said plurality of pairs of encoder lines.

45. A module subassembly according to claim 33 wherein said means for one of enabling and disabling is a shorting strap interconnecting said at least a pair of said plurality of pairs of encoder lines.

46. A three dimensional module assembly comprising:

a plurality of elements each having a planar surface and at least an edge portion which is transparent to electromagnetic radiation, said elements and said edge portions being disposed in registry in a stack, each of said elements having a plurality of active circuit devices disposed in juxtaposition with said planar surface and spaced from said an edge portion, and,

encoding means extending from a portion of said plurality of active circuit devices and terminating at the outer edge of said at least an edge portion of each of said elements.

47. An assembly according to claim 46 wherein said encoding means includes at least a pair of encoder lines extending from said outer edge to said portion of said plurality of active devices.

48. An assembly according to claim 46 wherein said encoding means includes at least a pair of encoder lines extending from said outer edge to said portion of said plurality of active devices.

49. An assembly according to claim 46 wherein said encoding means includes at least a pair of encoder lines extending from said outer edge to said portion of said plurality of active devices, and, means disposed perpendicular to said at least a pair of encoder lines and adjacent to said outer edge connected to said at least a pair of encoder lines for one of enabling and disabling at least one of the devices of said portion of said plurality of active devices.

50. An assembly according to claim 46 wherein said portion of said plurality of active devices is a comparator circuit, said encoding means includes at least a pair of encoder lines extending from said outer edge to said comparator circuit, and, means disposed perpendicular to said at least a pair of encoder lines and adjacent to said outer edge connected to said at least a pair of encoder lines for one of enabling and disabling at least one of the devices of said comparator.

51. An assembly according to claim 46 further including a heat dissipating and spacing element disposed contiguously with the underside of each of said plurality of elements.

52. An assembly according to claim 46 further including bonding means interposed between pairs of said edge portions in registry with said edge portions and contiguous with at least a portion of said encoding.

53. An assembly according to claim 46 further including a first plurality of address transmission lines extending over each said edge portion and each said element to at least one of said plurality of active circuit devices and terminating at said outer edger of each said edge portion.

54. An assembly according to claim 46 further including a second plurality of power and data transmission lines extending over each said edge portion and each said element to at least another of said plurality of active circuit devices and terminating at said outer edge of each said edge portion.

55. An assembly according to claim 46 further including at least a single layer of interconnections disposed over said outer edges of said edge portions containing interconnections on a surface thereof.

56. An assembly according to claim 47 wherein said encoder lines are electrically conductive.

57. An assembly according to claim 47 wherein said encoder lines are optical transmission lines.

58. An assembly according to claim 49 wherein said means for one of enabling and disabling is a shorting strap interconnecting said at least a pair of said plurality of pairs of encoder lines.

59. An assembly according to claim 50 wherein said means for one of enabling and disabling is a shorting strap interconnecting said at least a pair of said plurality of pairs of encoder lines.

60. An assembly according to claim 52 wherein said bonding means is an ultra-violet curable material which is electrically insulating.

61. An assembly according to claim 52 wherein said bonding means is an ultra-violet light curable material which is electrically insulating.

62. An assembly according to claim 53 wherein said first plurality of address transmission lines are electrically conductive.

63. An assembly according to claim 53 further including a third plurality of transmission lines interconnected with said first plurality of address transmission lines being perpendicular to said first plurality of address transmission lines and extending over at least a pair of said outer edges of said edge portions.

64. An assembly according to claim 53 wherein said first plurality of address transmission lines are optical transmission lines.

65. An assembly according to claim 54 wherein said second plurality of data and power transmission lines are electrically conductive.

66. An assembly according to claim 54 wherein said second plurality of data and power transmission lines are optical transmission lines.

67. An assembly according to claim 54 further including a fourth plurality of transmission lines interconnected with said second plurality of data and power transmission lines being perpendicular to said second plurality of data and power transmission lines and extending over at least one of said outer edges of said edge portions.

68. An assembly according to claim 55 further including connector means electrically connected to said at least a layer of interconnections for applying electrical signals and power to said each of said elements.