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Micro-electro-mechanical fluid ejector and method of operating same

  • US 6,357,865 B1
  • Filed: 10/12/1999
  • Issued: 03/19/2002
  • Est. Priority Date: 10/15/1998
  • Status: Expired due to Term
First Claim
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1. A micro-electromechanical fluid ejector, comprising:

  • a single semiconductor substrate having an insulating layer thereon;

    a conductor on the insulating layer;

    a polysilicon membrane that is formed by surface micromachining through the deposition and patterning of a polysilicon layer, the membrane comprising a membrane top and membrane sides, the membrane sides supporting the membrane above the conductor and the insulating layer, the membrane being conductive;

    an actuator chamber formed between the membrane and the insulating layer;

    a nozzle plate surrounding the membrane, the nozzle plate having a nozzle top and nozzle sides;

    a pressure chamber formed between the nozzle plate and the membrane, wherein fluid is stored;

    a nozzle formed in the nozzle plate for ejecting fluid;

    a power source connected between the conductor and the membrane, the power source when activated supplying sufficient force to deflect the membrane top towards the conductor, thereby increasing the supply of fluid in pressure chamber;

    wherein the conductor, membrane and actuator chamber are formed by surface micromachining techniques.

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