Electrostatic actuators for active surfaces

• US 6,358,021 B1
• Filed: 11/03/2000
• Issued: 03/19/2002
• Est. Priority Date: 12/29/1998
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cabuz, Cleopatra
• Primary Examiner(s): Walberg, Teresa
• Assistant Examiner(s): CAMPBELL, THOR S
• Application Number:
  US09/706,051
• Time in Patent Office: 501 Days
• Field of Search: 417/413.2, 417/410.1, 417/413.1, 417/414, 417/415, 310/309, 310/345, 251/129.02
• US Class Current: 417/413.2
• CPC Class Codes: B64C 13/48 characterised by the fluid being gaseous
• CPC Class Codes: B64C 21/10 using other surface properties, e.g. roughness
• CPC Class Codes: B64C 23/005 by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
• CPC Class Codes: B64C 3/38 Adjustment of complete wings or parts thereof
• CPC Class Codes: B64C 3/46 by inflatable elements
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0054 For holding or placing an element in a given position
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F15B 15/103 using inflatable bodies that contract when fluid pressure is applied, e.g. pneumatic artificial muscles or McKibben-type actuators
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F15D 1/12 by influencing the boundary layer use of materials, e.g. to reduce surface friction C09K3/00
• CPC Class Codes: F16K 2099/0078 using moulding or stamping
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0028 Valves having multiple inlets or outlets
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y02T 50/10 Drag reduction

Abstract

An actuator device controlling the shape of a flexible surface having a quasi-continuum in a plurality of locations. The device includes a plurality of individual cells arranged in an array for contact with the flexible surface. The cells comprise a cell body having an upper film portion and a lower film portion and an open central portion. The upper film portion is in contact with the flexible surface. A post is mounted in the open central portion and fixedly attached to the upper film portion and the lower film portion, the post defining a vertical axis of movement. The upper and lower film portions have electrodes mounted thereon respectively, positioned on the face of the upper and lower film portions and facing each other. A central diaphragm has electrodes on its outer surfaces and an open central portion surrounding the post A power supply operably connected to the electrodes for causing selective cooperative electrostatic activation between them to move the post along the vertical axis to cause the upper film portion to move that portion of the flexible surface in which the upper film portion is in contact. In a preferred embodiment, the cell body has a circular cross section so that the post moves vertically upward and downward to raise or lower the portion of the flexible surface in contact with the upper film portion upon application of electrostatic potential between the electrodes.

Claims

1. An actuator device controlling the shape of a flexible surface having a quasi-continuum in a plurality of locations, comprising:

a plurality of individual cells, said cells each being arranged in an array for contact with said flexible surface, said cells comprising;

a cell body having an upper film portion and a lower film portion, said body further having an open central portion and said upper film portion being in contact with said flexible surface;

a post mounted in said open central portion and attached to said upper film portion and said lower film portion, said post defining a vertical axis of movement said upper and lower film portions having first and second electrodes mounted thereon respectively, said first and second electrodes being positioned on the face of said upper and lower film portions facing each other;

a central diaphragm having third and fourth electrodes on the outer surfaces of said diaphragm, said diaphragm having an open central portion surrounding said post;

a power supply operably connected to said first, second, third and fourth electrodes for causing selective cooperative electrostatic activation between said electrodes to move said post along said vertical axis to cause said upper film portion to move that portion of said flexible surface in which said upper film portion is in contact;

whereby portions of said flexible surface move in accordance with the activation of each cell to control the shape of said flexible surface in a quasi-continuum.

2. The device of claim 1, wherein said cell body has a circular cross section.

3. The device of claim 1, wherein said post moves vertically upward to raise the portion of said flexible surface in contact with said upper film portion upon application of electrostatic potential between said second and fourth electrodes.

4. The device of claim 1, wherein said post moves vertically downward to lower the portion of said flexible surface in contact with said upper film portion upon application of electrostatic potential between said first and third electrodes.

5. The device of claim 1, wherein said plurality of cells have individual posts of a plurality of lengths, whereby actuation of adjacent cells causes a plurality of changes in said flexible surface.

6. The device of claim 1, wherein said cells are formed from a patterned polyimide having said first, second, third and fourth electrodes embedded therein.

7. An actuator device controlling the shape of a flexible surface having a quasi-continuum in a plurality of locations, comprising:

a plurality of individual cell means for contact with said flexible surface, said cell means each being arranged in an array for contact with said flexible surface, said cell means comprising;

cell body means having an upper film portion means and a lower film portion means for forming the upper and lower portion of said body means, said body means further having an open central portion and said upper film portion means being in contact with said flexible surface;

post means mounted in said open central portion and fixedly attached to said upper film portion means and said lower film portion means, said post means defining a vertical axis of movement said upper and lower film portion means having first and second electrode means mounted thereon respectively for electrostatic activation, said first and second electrode means being positioned on the face of said upper and lower film portion means and facing each other;

central diaphragm means having third and fourth electrode means on the outer surfaces of said diaphragm means for electrostatic activation, said diaphragm means having an open central portion surrounding said post means;

power supply means operably connected to said first, second, third and fourth electrode means for causing selective cooperative electrostatic activation between said electrode means to move said post means along said vertical axis to cause said upper film portion means to move that portion of said flexible surface in which said upper film portion means is in contact;

whereby portions of said flexible surface move in accordance with the activation of each cell to control the shape of said flexible surface in a quasi-continuum.

8. The device of claim 7, wherein said cell body means has a circular cross section.

9. The device of claim 7, wherein said post means moves vertically upward to raise the portion of said flexible surface in contact with said upper film portion means upon application of electrostatic potential between said second and fourth electrode means.

10. The device of claim 7, wherein said post moves means vertically downward to lower the portion of said flexible surface in contact with said upper film portion means upon application of electrostatic potential between said first and third electrode means.

11. The device of claim 7, wherein said plurality of cell means have individual post means of a plurality of lengths, whereby actuation of adjacent cell means causes a plurality of changes in said flexible surface.

12. The device of claim 7, wherein said cell means are formed from a patterned polyimide having said first, second, third and fourth electrode means embedded therein.