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Method to fabricate layered material compositions

  • US 6,358,854 B1
  • Filed: 04/21/1999
  • Issued: 03/19/2002
  • Est. Priority Date: 04/21/1999
  • Status: Active Grant
First Claim
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1. A process for fabricating a layered material composition for forming a photonic of phononic lattice, comprising steps for:

  • a) forming, upon an upper surface of a substructure, a structured layer having a top surface and a substantially planar bottom surface;

    b) planarizing the top surface of said structured layer by chemical-mechanical polishing; and

    , c) repeating steps a and b to form the layered material composition wherein optical or acoustical properties spatially vary in two or three dimensions, and wherein the planarized top surface of a given layer forms the upper surface of the substructure upon which the next structured layer is to be grown.

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