Manufacturing method of silicon device

• US 6,358,861 B1
• Filed: 09/08/2000
• Issued: 03/19/2002
• Est. Priority Date: 01/13/1999
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: French, Patrick J., Tsutsumi, Kazuhiko, Ohji, Hiroshi
• Primary Examiner(s): Fahmy, Wael
• Assistant Examiner(s): TOLEDO, FERNANDO L
• Application Number:
  US09/658,864
• Time in Patent Office: 557 Days
• Field of Search: 438/746, 438/747, 438/748, 438/977, 438/978, 438/700, 438/53, 438/701, 438/753
• US Class Current: 438/746
• CPC Class Codes: B81C 1/00547 Etching processes not provided for in groups B81C1/00531 - B81C1/00539
• CPC Class Codes: B81C 2201/0132 Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
• CPC Class Codes: H01L 21/3063 Electrolytic etching
• CPC Class Codes: Y10S 438/977 Thinning or removal of substrate

Abstract

A method of manufacturing a silicon device with a single crystal structure, including forming etching start patterns on a surface of a silicon substrate; etching the silicon substrate by applying a voltage to the silicon substrate while the silicon substrate is immersed in a solution containing fluorine ions, with the silicon substrate used a positive electrode, to form narrow etched portions that extend into the substrate from the etching start patterns; and accelerating etching of the silicon substrate by increasing current flowing through the silicon substrate after the narrow etched portions have reached a predetermined depth, so that neighboring etched portions are in communication with each other below the narrow etched portions and a free standing structure including part of the silicon substrate is formed, and a hollow portion is formed below the free standing structure.

Claims

1. A method of manufacturing a silicon device comprising:

forming etching start patterns at a surface of a silicon substrate;

etching said silicon substrate by applying a voltage to said silicon substrate while said silicon substrate is immersed in a solution containing fluorine ions, with said silicon substrate used a positive electrode, to form etched portions extending into said silicon substrate from said etching start patterns; and

accelerating etching of said silicon substrate by increasing current flowing through said silicon substrate after said etched portions have reached a threshold depth in said silicon substrate, to form a free standing structure, including a part of said silicon substrate, in which neighboring etched portions are in communication with each other at a location deeper than the threshold depth.

3. The method of manufacturing a silicon device according to claim 1, including forming pits on the surface of said silicon substrate as said etching start patterns.

5. The method of manufacturing a silicon device according to claim 1, including forming a mask on said silicon substrate, said mask being used as said etching start patterns.

7. The method of manufacturing a silicon device according to claim 1, wherein said silicon substrate is n-type, including forming a p-type region in the surface of said silicon substrate, said p-type region being used as said etching start patterns.

9. The method of manufacturing a silicon device according to claim 1, wherein said silicon substrate is n-type, including controlling the current flowing through said silicon substrate, while applying light to said silicon substrate, by changing one of intensity of light and the voltage applied to said silicon substrate while applying the light to said silicon substrate in etching and accelerating etching of said silicon substrate.

11. The method of manufacturing a silicon device according to claim 1, wherein said silicon substrate is p-type, including controlling the current flowing through said silicon substrate by changing the voltage applied to said silicon substrate in each of etching and accelerating etching of said silicon substrate.

2. A method of manufacturing a silicon device comprising:

forming etching start patterns at a surface of a silicon substrate;

etching said silicon substrate by applying a voltage to said silicon substrate while said silicon substrate is immersed in a solution containing fluorine ions, with said silicon substrate used a positive electrode, to form narrow etched portions extending into said silicon substrate from said etching start patterns;

accelerating etching of said silicon substrate by increasing current flowing through said silicon substrate after said narrow etched portions have reached a threshold depth in said silicon substrate, to form wide etched portions, wider than said narrow etched portions, at a location deeper than the threshold depth; and

forming a hollow passage in said silicon substrate by filling said narrow etched portions after said wide etched portions have reached a second threshold depth.

4. The method of manufacturing a silicon device according to claim 2, including forming pits on the surface of said silicon substrate as said etching start patterns.

6. The method of manufacturing a silicon device according to claim 2, including forming a mask on said silicon substrate, said mask being used as said etching start patterns.

8. The method of manufacturing a silicon device according to claim 2, wherein said silicon substrate is n-type, including forming a p-type region in the surface of said silicon substrate, said p-type region being used as said etching start patterns.

10. The method of manufacturing a silicon device according to claim 2, wherein said silicon substrate is n-type, including controlling the current flowing through said silicon substrate, while applying light to said silicon substrate, by changing one of intensity of the light and the voltage applied to said silicon substrate in etching and accelerating etching of said silicon substrate.

12. The method of manufacturing a silicon device according to claim 2, wherein said silicon substrate is p-type, including controlling the current flowing through said silicon substrate by changing the voltage applied to said silicon substrate in each of etching and accelerating etching of said silicon substrate.

13. A method of manufacturing a silicon device comprising:

forming etching start patterns at a surface of a silicon substrate;

etching said silicon substrate by applying a voltage to said silicon substrate while said silicon substrate is immersed in a solution containing fluorine ions, with said silicon substrate used a positive electrode, to form etched portions extending into said silicon substrate from said etching start patterns; and

accelerating etching of said silicon substrate by increasing current flowing through said silicon substrate by changing the voltage applied to said silicon substrate, after said etched portions have reached a threshold depth in said silicon substrate, to form a free standing structure, including a part of said silicon substrate, in which neighboring etched portions are in communication with each other at a location deeper than the threshold depth.

14. The method of manufacturing a silicon device according to claim 13, including forming pits on the surface of said silicon substrate as said etching start patterns.

15. The method of manufacturing a silicon device according to claim 13, including forming a mask on said silicon substrate, said mask being used as said etching start patterns.

16. The method of manufacturing a silicon device according to claim 13, wherein said silicon substrate is n-type, including forming a p-type region in the surface of said silicon substrate, said p-type region being used as said etching start patterns.

17. The method of manufacturing a silicon device according to claim 13, wherein said silicon substrate is n-type, including controlling the current flowing through said silicon substrate while applying light to said silicon substrate by changing intensity of the light applied to said silicon substrate in etching and accelerating etching of said silicon substrate.

18. The method of manufacturing a silicon device according to claim 13, wherein said silicon substrate is p-type, including controlling the current flowing through said silicon substrate by changing the voltage applied to said silicon substrate in each of said etching and accelerating etching of said silicon substrate.