MOCVD precursors based on organometalloid ligands
First Claim
Patent Images
1. A compound of formula I:
-
whereinR1 is methyl, ethyl, isopropyl, n-propyl, isobutyl, s-butyl, n-butyl, CF3, C2F5, i-C3F7, n-C3F7, or —
C(CH3)(CF3)2;
R2 is H;
E1 is Si or Ge;
R3, R4, and R5 are independently C6 or lower alkyl; and
Y and Z are O.
1 Assignment
0 Petitions
Accused Products
Abstract
Chemical vapor deposition processes utilize as precursors volatile metal complexes with ligands containing metalloid elements silicon, germanium, tin or lead.
52 Citations
22 Claims
-
1. A compound of formula I:
-
wherein R1 is methyl, ethyl, isopropyl, n-propyl, isobutyl, s-butyl, n-butyl, CF3, C2F5, i-C3F7, n-C3F7, or —
C(CH3)(CF3)2;
R2 is H;
E1 is Si or Ge;
R3, R4, and R5 are independently C6 or lower alkyl; and
Y and Z are O. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A metal-ligand complex of formula II:
Specification
-
- Resources
Litigation Campaign Assessment
Thank you for your request. You will receive a custom alert email when the Litigation Campaign Assessment is available.
×
-
Current AssigneeThe Research Foundation for The State University of New York (State University of New York)
-
Original AssigneeThe Research Foundation for The State University of New York (State University of New York)
-
InventorsKornilov, Andrei, Toscano, Paul J., Banger, Kulbinder Kumar, Claessen, Rolf, Welch, John T.
-
Primary Examiner(s)NAZARIO GONZALEZ, PORFIRIO
-
Application NumberUS09/729,115Time in Patent Office470 DaysField of Search556/87, 556/1, 556/12, 556/28, 556/465, 556/466, 556/45, 556/57, 556/95, 556/137, 556/146, 556/147, 534/15, 427/248.1, 427/585, 427/255.28US Class Current556/12CPC Class CodesC07F 13/005 Compounds without a metal-c...C07F 15/065 without a metal-carbon linkageC07F 7/0803 Compounds with Si-C or Si-S...C07F 7/081 comprising at least one ato...Y10S 977/84 Manufacture, treatment, or ...Y10S 977/89 Deposition of materials, e....Y10S 977/891 Vapor phase depositionY10S 977/92 Detection of biochemical
