Actuating mechanism for rotating micro-mirror

• US 6,359,718 B1
• Filed: 04/18/2001
• Issued: 03/19/2002
• Est. Priority Date: 02/01/2001
• Status: Expired due to Term

• Current Assignee: Tessera Advanced Technologies Inc (Adeia Inc.)
• Original Assignee: Walsin Lihwa Corporation
• Inventors: Fang, Weileun, Lin, Hung-Yi
• Primary Examiner(s): SCHUBERG, DARREN E
• Application Number:
  US09/838,061
• Time in Patent Office: 335 Days
• Field of Search: 359/196, 359/223, 359/224, 359/872
• US Class Current: 359/224.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An actuating mechanism for rotating a micro-mirror is disclosed. The actuating mechanism includes a first linking rod consisting of a first and a second portions, a second linking rod consisting of a third and a fourth portions, a first fulcrum positioned between the first and second portions, and a second fulcrum positioned at one side of the fourth portion opposite to the third portion. The first and third portions are flexibly connected to a shaft that the micro-mirror rotates with, and the second and fourth portions are coupled to respective actuators. When actuating forces are applied to move the second and fourth portions, the first and third portions are levered to rotate the shaft and thus the micro-mirror due to the effect of the fulcrums.

Claims

1. An actuating mechanism for rotating a micro-mirror, comprising:

a substrate formed thereon a first recess region;

a shaft secured to said micro-mirror for rotating said micro-mirror therewith in said first recess region;

a first actuator mounted on said substrate beside said first recess region for providing a first actuating force;

a first linking rod device including a first linking rod and a first fulcrum positioned between a first and a second portions of said first linking rod, said first portion being flexibly connected to said shaft, and said second portion being coupled to said first actuator;

a second actuator mounted on said substrate beside said first recess region opposite to said first actuator for providing a second actuating force; and

a second linking rod device including a second linking rod and a second fulcrum positioned at one end of said second linking rod, said second linking rod including a third portion flexibly connected to said shaft, and a fourth portion coupled to said second actuator;

wherein said second and fourth portions are moved in response to said first and second actuating forces to lever said first and third portions via said first and second fulcrums, respectively, thereby rotating said shaft.

2. The actuating mechanism according to claim 1 wherein said substrate is a silicon substrate.

3. The actuating mechanism according to claim 1 wherein said first actuator includes:

a bottom electrode formed on said substrate;

a top electrode connected to said second portion of said first linking rod, and formed above said bottom electrode with a gap therebetween; and

a power source connected to said bottom and top electrodes for providing a potential difference in order to generate an electrostatic force between said bottom and top electrodes, thereby controlling the size of said gap, and moving said second portion of said first linking rod.

4. The actuating mechanism according to claim 3 wherein said bottom electrode is formed of a doped semiconductor material.

5. The actuating mechanism according to claim 3 wherein said top electrode is formed of a material selected from a group consisting of aluminum, platinum and gold.

6. The actuating mechanism according to claim 3 wherein said first actuator further includes an insulating structure between said bottom and top electrodes.

7. The actuating mechanism according to claim 1 wherein said second actuator includes:

a bottom electrode formed on said substrate;

a top electrode connected to said fourth portion of said second linking rod, and formed above said bottom electrode with a gap therebetween; and

a power source connected to said bottom and top electrodes for providing a potential difference in order to generate an electrostatic force between said bottom and top electrodes, thereby controlling the size of said gap, and moving said fourth portion of said second linking rod.

8. The actuating mechanism according to claim 7 wherein said bottom electrode is formed of a doped semiconductor material.

9. The actuating mechanism according to claim 7 wherein said top electrode is formed of a material selected from a group consisting of aluminum, platinum and gold.

10. The actuating mechanism according to claim 7 wherein said second actuator further includes an insulating structure between said bottom and top electrodes.

11. The actuating mechanism according to claim 1 wherein said substrate is further formed thereon a second recess region to provide a movement space for said first and second linking rods.

12. The actuating mechanism according to claim 1 wherein said first and second linking rods are made of silicon nitride.

13. The actuating mechanism according to claim 1 wherein said shaft is coupled to both of said first portion of said first linking rod and said third portion of said second linking rod via a coupler.

14. The actuating mechanism according to claim 1 for rotating a micro-mirror made of aluminum.

15. The actuating mechanism according to claim 1 for rotating a micro-mirror with a grid ring therearound.