Method of making micromotors with utilitarian features
First Claim
1. A method of fabricating a surface micromachined micromotor having a substrate comprising:
- fabricating a topmost layer most remote from the substrate and a rotor fixed in-place between the topmost layer and the substrate;
forming a utilitarian feature extending from the rotor and beyond the topmost layer; and
freeing the rotor.
1 Assignment
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Accused Products
Abstract
Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selective removal of material therefrom. In yet other embodiments, the features are defined by the selective removal of material from the rotor itself. The disclosure is particularly illustrated with reference to the fabrication of a polygon (nickel) mirror on a polysilicon, electrostatic micromotor rotor for use in scanning applications. However, the principles of the invention can likewise be applied to fabrication of a variety of other features, such as optical gratings, shutters, mechanical actuators, pump impellers and fins, and to a variety of different micromotor constructions.
53 Citations
24 Claims
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1. A method of fabricating a surface micromachined micromotor having a substrate comprising:
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fabricating a topmost layer most remote from the substrate and a rotor fixed in-place between the topmost layer and the substrate;
forming a utilitarian feature extending from the rotor and beyond the topmost layer; and
freeing the rotor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of fabricating a surface micromachined micromotor having a substrate comprising:
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fabricating a topmost layer most remote from the substrate;
fabricating a rotor fixed in-place between the topmost layer and the substrate;
forming a prime mover extending from the rotor and outside a plane defined by the rotor; and
freeing the rotor. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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Specification