Microelectromechanical actuators including driven arched beams for mechanical advantage

• US 6,360,539 B1
• Filed: 04/05/2000
• Issued: 03/26/2002
• Est. Priority Date: 04/05/2000
• Status: Expired due to Term

• Current Assignee: Memscap Incorporated
• Original Assignee: JDS Uniphase Corporation (Lumentum Holdings Inc.)
• Inventors: Cowen, Allen B., Wood, Robert L., Mahadevan, Ramaswamy, Hill, Edward A., Dhuler, Vijayakumar R.
• Primary Examiner(s): NGUYEN, HOANG M
• Application Number:
  US09/542,672
• Time in Patent Office: 720 Days
• Field of Search: 605/27, 605/28, 310/306, 310/307, 310/309
• US Class Current: 60/528
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 61/02 wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively

Abstract

Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One or more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the driven arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof.

Claims

1. A microelectromechanical actuator comprising:

a substrate;

spaced apart supports on the substrate;

a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof for movement parallel the substrate; and

a driven beam that is coupled to the thermal arched beam, the driven beam including end portions that move relative to one another to arch the driven beam in a direction that is nonparallel to the substrate in response to the further arching of the thermal arched beam, for movement of the driven beam toward or away from the substrate.

2. A microelectromechanical actuator according to claim 1 wherein the end portions are squeezed together by the further arching of the thermal arched beam to thereby increase arching of the driven beam.

3. A microelectromechanical actuator according to claim 1 wherein the end portions are pulled apart by the further arching of the thermal arched beam to thereby decrease arching of the driven beam.

4. A microelectromechanical actuator according to claim 1 wherein the thermal arched beam includes an intermediate portion between end portions thereof, wherein the driven beam includes an intermediate portion between the end portions thereof and wherein the intermediate portion of the thermal arched beam is coupled to one of the end portions of the driven beam.

5. A microelectromechanical actuator according to claim 4 further comprising an anchor that anchors the other end portion of the driven beam to the substrate.

6. A microelectromechanical actuator according to claim 1:

wherein the driven beam arches in a direction that is orthogonal to the substrate by the further arching of the thermal arched beam for movement orthogonal to the substrate.

7. A microelectromechanical actuator according to claim 1 wherein the driven beam is a driven arched beam that is arched in the direction that is nonparallel to the substrate, such that the arching of the driven arched beam is changed in the direction that is nonparallel to the substrate in response to the further arching of the thermal arched beam.

8. A microelectromechanical actuator according to claim 1 wherein the spaced apart supports are first spaced apart supports and wherein the thermal arched beam is a first thermal arched beam, the thermal arched beam microelectromechanical actuator further comprising:

second spaced apart supports on the substrate;

a second thermal arched beam that extends between the second spaced apart supports and that further arches upon heating thereof for movement parallel to the substrate; and

wherein the driven beam is coupled to the first and second thermal arched beams, such that the end portions thereof move relative to one another to arch the driven beam in the direction that is nonparallel to the substrate in response to the further arching of the first and second thermal arched beams.

9. A microelectromechanical actuator according to claim 8 wherein the first and second thermal arched beams each include an intermediate portion between end portions, wherein the driven beam includes an intermediate portion between the end portions thereof, wherein the intermediate portion of the first thermal arched beam is coupled to one end portion of the driven beam and wherein the intermediate portion of the second thermal arched beam is coupled to the other end portion of the driven beam.

10. A microelectromechanical actuator according to claim 1 in combination with at least one of a relay contact, an optical attenuator, a variable circuit element, a valve and a circuit breaker that is mechanically coupled to the driven arched beam for actuation thereby.

11. A microelectromechanical actuator according to claim 1 wherein the thermal arched beam further arches upon heating thereof by ambient heat of an ambient environment in which the microelectromechanical actuator is present, to thereby provide a thermostat.

12. A microelectromechanical actuator according to claim 1 wherein the driven beam is a first driven arched beam and wherein the direction that is nonparallel to the substrate is a first direction that is nonparallel to the substrate, the microelectromechanical actuator further comprising:

a second driven arched beam that is coupled to the thermal arched beam and that is arched in a second direction that is nonparallel to the substrate, the second driven arched beam including end portions that move relative to one another to change the arching of the second driven arched beam in the second direction that is nonparallel to the substrate in response to the further arching of the thermal arched beam for movement of the second driven arched beam toward or away from the substrate.

13. A microelectromechanical actuator according to claim 12 wherein the first and second driven arched beams extend parallel to one another and nonparallel to the substrate such that the arching of the first and second driven arched beams changes in a same direction by the further arching of the thermal arched beam.

14. A microelectromechanical actuator according to claim 13 further comprising a coupler that mechanically couples the first and second driven arched beams.

15. A microelectromechanical actuator according to claim 12 wherein the first and second driven arched beams arch away from one another such that the arching of the first and second driven arched beams changes in opposite directions by the further arching of the thermal arched beam.

16. A microelectromechanical actuator according to claim 12 wherein the first and second driven arched beams arch toward one another such that the arching of the first and second driven arched beams changes in opposite directions by the further arching of the thermal arched beam.

17. A microelectromechanical actuator according to claim 1 wherein the spaced apart supports are first spaced apart supports, wherein the thermal arched beam is a first thermal arched beam and wherein the driven beam is a third driven beam, the microelectromechanical actuator further comprising:

second spaced apart supports on the substrate;

a second thermal arched beam that extends between the second spaced apart supports and that further arches upon heating thereof for movement parallel to the substrate;

a first driven arched beam that is coupled to the first thermal arched beam, the first driven arched beam including end portions that move relative to one another to change the arching of the first driven arched beam in response to the further arching of the first thermal arched beam for movement of the second driven arched beam parallel to the substrate; and

a second driven arched beam that is coupled to the second thermal arched beam, the second driven arched beam including end portions that move relative to one another to change the arching of the second driven arched beam in response to the further arching of the thermal arched beam for movement of the second driven arched beam parallel to the substrate;

wherein the third driven beam is coupled to the first and second driven arched beams, the third driven beam including end portions that move relative to one another to arch the third driven beam in the direction that is nonparallel to the substrate in response to the changed arching of the first and second driven arched beams.

18. A microelectromechanical actuator according to claim 17 further comprising:

a fourth driven beam that is coupled to the first and second driven arched beams, the fourth driven beam including end portions that move relative to one another to arch the fourth driven beam in response to the changed arching of the first and second driven arched beams.

19. A microelectromechanical actuator according to claim 18 wherein the third and fourth driven beams are third and fourth driven arched beams that extend parallel to one another and nonparallel to the substrate such that the arching of the third and fourth driven arched beams changes in a same direction by the further arching of the first and second thermal arched beams.

20. A microelectromechanical actuator according to claim 19 further comprising a coupler that mechanically couples the third and fourth driven arched beams.

21. A microelectromechanical actuator according to claim 18 wherein the third and fourth driven beams arch away from one another such that the arching of the third and fourth driven beams changes in opposite directions by the further arching of the first and second thermal arched beams.

22. A microelectromechanical actuator according to claim 18 wherein the third and fourth driven beams arch toward one another such that the arching of the third and fourth driven beams changes in opposite directions by the further arching of the first and second thermal arched beams.

23. A microelectromechanical actuator comprising:

a substrate;

an actuator on the substrate that includes a driver beam that moves parallel to the substrate upon actuation of the actuator; and

a driven beam that is coupled to the driver beam, the driven beam including end portions that move relative to one another to arch the driven beam in a direction that is nonparallel to the substrate in response to the movement of the driver beam parallel to the substrate.

24. A microelectromechanical actuator according to claim 23 wherein the end portions are squeezed together by the movement of the driver beam to thereby increase arching of the driven beam.

25. A microelectromechanical actuator according to claim 23 wherein the end portions are pulled apart by the movement of the driver beam to thereby decrease arching of the driven beam.

26. A microelectromechanical actuator according to claim 23 wherein the driven beam includes an intermediate portion between the end portions thereof and wherein the driver beam is coupled to one of the end portions of the driven beam.

27. A microelectromechanical actuator according to claim 26 further comprising an anchor that anchors the other end portion of the driven beam to the substrate.

28. A microelectromechanical actuator according to claim 23 wherein the driven beam is a driven arched beam that is arched in the direction that is nonparallel to the substrate, such that the arching of the driven arched beam is changed in the direction that is nonparallel to the substrate in response to the movement of the driver beam.

29. A microelectromechanical actuator according to claim 23 wherein the actuator is a first actuator and wherein the driver beam is a first driver beam, the microelectromechanical actuator further comprising:

a second actuator on the substrate that includes a second driver beam that moves parallel to the substrate upon actuation of the second actuator; and

wherein the driven beam is coupled to the first and second driver beams, such that the end portions thereof move relative to one another to arch the driven beam in the direction that is nonparallel to the substrate in response to the movement of the first and second driver beams along the substrate.

30. A microelectromechanical actuator according to claim 29 wherein the driven beam includes an intermediate portion between the end portions thereof, wherein the first driver beam is coupled to one end portion of the driven beam and wherein the second driver beam is coupled to the other end portion of the driven beam.

31. A microelectromechanical actuator according to claim 23 in combination with at least one of a relay contact, an optical attenuator, a variable circuit element, a valve and a circuit breaker that is mechanically coupled to the driven arched beam for actuation thereby.

32. A microelectromechanical actuator according to claim 23 wherein the driven beam is a first driven arched beam and wherein the direction that is nonparallel to the substrate is a first direction that is nonparallel to the substrate, the microelectromechanical actuator further comprising:

a second driven arched beam that is coupled to the driver beam and that is arched in a second direction that is nonparallel to the substrate, the second driven arched beam including end portions that move relative to one another to change the arching of the second driven arched beam in the second direction that is nonparallel to the substrate in response to the movement of the driver beam.

33. A microelectromechanical actuator according to claim 32 wherein the first and second driven arched beams extend parallel to one another and nonparallel to the substrate such that the arching of the first and second driven arched beams changes in a same direction by the movement of the driver beam.

34. A microelectromechanical actuator according to claim 33 further comprising a coupler that mechanically couples the first and second driven arched beams.

35. A microelectromechanical actuator according to claim 33 wherein the first and second driven arched beams arch away from one another such that the arching of the first and second driven arched beams changes in opposite directions by the movement of the driver beam.

36. A microelectromechanical actuator according to claim 33 wherein the first and second driven arched beams arch toward one another such that the arching of the first and second driven arched beams changes in opposite directions by the movement of the driver beam.

37. A microelectromechanical actuator according to claim 23 wherein the actuator is a first actuator, wherein the driver beam is a first driver beam and wherein the driven beam is a third driven beam, the microelectromechanical actuator further comprising:

a second actuator on the substrate that includes a second driver beam that moves parallel to the substrate upon actuation of the second actuator;

a first driven arched beam that is coupled to the first driver beam, the first driven arched beam including end portions that move relative to one another to change the arching of the first driven arched beam in response to the movement of the first driver beam parallel to the substrate; and

a second driven arched beam that is coupled to the second driver beam, the second driven arched beam including end portions that move relative to one another to change the arching of the second driven arched beam in response to the movement of the second driver beam parallel to the substrate; and

wherein the third driven beam is coupled to the first and second driven arched beams, the third driven beam including end portions that move relative to one another to arch the third driven beam in the direction that is nonparallel to the substrate in response to the changed arching of the first and second driven beams.

38. A microelectromechanical actuator according to claim 37 further comprising:

a fourth driven beam that is coupled to the first and second driven arched beams, the fourth driven beam including end portions that move relative to one another to arch the fourth driven beam in response to the changed arching of the first and second driven arched beams.

39. A microelectromechanical actuator comprising:

a substrate;

first spaced apart supports on the substrate;

a first thermal arched beam that extends between the first spaced apart supports and that further arches upon heating thereof for movement along the substrate in a first direction;

second spaced apart supports on the substrate;

a second thermal arched beam that extends between the second spaced apart supports and that further arches upon heating thereof for movement along the substrate in the first direction; and

a driven arched beam including respective first and second end portions that are coupled to the respective first and second thermal arched beams such that the further arching of the first thermal arched beam squeezes the end portions together, the further arching of the second thermal arched beam pulls the end portions apart and simultaneous further arching of the first and second thermal arched beams translates the driven arched beam in the first direction without moving the end portions relative to one another.

40. A microelectromechanical actuator according to claim 39 wherein the first thermal arched beam includes an intermediate portion between end portions thereof, wherein the second thermal arched beam includes an intermediate portion between end portions thereof and wherein the intermediate portion of the respective first and second thermal arched beams are coupled to the respective first and second end portions of the driven arched beam.

41. A microelectromechanical actuator according to claim 39 in combination with at least one of a relay contact, an optical attenuator, a variable circuit element, a valve and a circuit breaker that is mechanically coupled to the driven arched beam for actuation thereby.

42. A microelectromechanical actuator comprising:

a substrate;

a first actuator on the substrate that includes a first driver beam that moves along the substrate in a first direction upon actuation of the first actuator;

a second actuator on the substrate that includes a second driver beam that moves along the substrate in the first direction upon actuation of the second actuator; and

a driven arched beam including respective first and second end portions that are coupled to the respective first and second driver beams such that the movement of the first driver beam squeezes the end portions together, the movement of the second driver beam pulls the end portions apart and simultaneous movement of the first and second driver beams translates the driven arched beam in the first direction without moving the end portions relative to one another.

43. A microelectromechanical actuator according to claim 42 in combination with at least one of a relay contact, an optical attenuator, a variable circuit element, a valve and a circuit breaker that is mechanically coupled to the driven arched beam for actuation thereby.

44. A microelectromechanical actuator comprising:

a substrate;

spaced apart supports on the substrate;

a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof for movement along the substrate;

a driven arched beam that is coupled to the thermal arched beam, the driven arched beam including end portions that move relative to one another to change the arching of the driven arched beam in response to the further arching of the thermal arched beam, for movement of the driven arched beam along the substrate; and

an optical attenuator that is coupled to the driven arched beam and that is arranged to move into an optical path on the substrate in response to movement of the driven arched beam along the substrate such that the optical attenuator blocks at least a portion of optical radiation in the optical path.

45. A microelectromechanical actuator according to claim 44 wherein the optical path is oriented along the substrate.

46. A microelectromechanical actuator according to claim 45 wherein the optical path comprises two optical fibers on the substrate that are oriented in end-to-end relationship, such that the optical attenuator is arranged to move between adjacent ends of the two optical fibers in response to movement of the driven arched beams along the substrate.

47. A microelectromechanical actuator according to claim 44 wherein the optical path is oriented orthogonal to the substrate.

48. A microelectromechanical actuator according to claim 47 wherein the optical path comprises an optical fiber that passes through the substrate such that an end of the optical fiber is parallel to the substrate, wherein the optical attenuator is arranged to cover at least part of the end of the optical fiber in response to movement of the driven arched beam along the substrate.

49. A microelectromechanical actuator according to claim 44 wherein the end portions are squeezed together by the further arching of the thermal arched beam to thereby increase arching of the driven arched beam.

50. A microelectromechanical actuator according to claim 44 wherein the end portions are pulled apart by the further arching of the thermal arched beam to thereby decrease arching of the driven arched beam.

51. A microelectromechanical actuator according to claim 44 wherein the thermal arched beam includes an intermediate portion between end portions thereof and wherein the intermediate portion of the thermal arched beam is coupled to one of the end portions of the driven arched beam.

52. A microelectromechanical actuator according to claim 51 further comprising an anchor that anchors the other end portion of the driven arched beam to the substrate.

53. A microelectromechanical actuator according to claim 44 wherein the spaced apart supports are first spaced apart supports and wherein the thermal arched beam is a first thermal arched beam, the thermal arched beam microelectromechanical actuator further comprising:

second spaced apart supports on the substrate;

a second thermal arched beam that extends between the second spaced apart supports and that further arches upon heating thereof for movement along the substrate; and

wherein the driven arched beam is coupled to the first and second thermal arched beams, such that the end portions thereof move relative to one another to change the arching of the driven arched beam in response to the further arching of the first and second thermal arched beams.

54. A microelectromechanical actuator according to claim 44 wherein the spaced apart supports are first spaced apart supports and wherein the thermal arched beam is a first thermal arched beam, the microelectromechanical actuator further comprising:

second spaced apart supports on the substrate;

a second thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof for movement along the substrate;

a second driven arched beam that is coupled to the second thermal arched beam, the second driven arched beam including end portions that move relative to one another to change the arching of the second driven arched beam in response to the further arching of the thermal arched beam for movement of the second driven arched beam along the substrate; and

a third driven arched beam that is coupled to the first and second driven arched beams, the third driven arched beam including end portions that move relative to one another to change the arching of the third driven arched beam in response to the changed arching of the first and second driven arched beams;

wherein the optical attenuator is coupled to the third driven arched beam and is arranged to move into the optical path on the substrate in response to movement of the third driven arched beam along the substrate.

55. A microelectromechanical actuator comprising:

a substrate;

an actuator on the substrate that includes a driver beam that moves along the substrate upon actuation of the actuator;

a driven beam that is coupled to the driver beam, the driven beam including end portions that move relative to one another to arch and move the driven beam along the substrate in response to movement of the driven beam; and

an optical attenuator that is coupled to the driven beam and that is arranged to move into an optical path on the substrate in response to movement of the driven beam along the substrate such that the optical attenuator blocks at least a portion of optical radiation in the optical path.

56. A microelectromechanical actuator according to claim 55 wherein the optical path is oriented along the substrate.

57. A microelectromechanical actuator according to claim 56 wherein the optical path comprises two optical fibers on the substrate that are oriented in end-to-end relationship, such that the optical attenuator is arranged to move between adjacent ends of the two optical fibers in response to movement of the driven beam along the substrate.

58. A microelectromechanical actuator according to claim 55 wherein the optical path is oriented orthogonal to the substrate.

59. A microelectromechanical actuator according to claim 55 wherein the optical path comprises an optical fiber that passes through the substrate, wherein the optical attenuator is arranged to cover at least part of the end of the optical fiber in response to movement of the driven beam along the substrate.

60. A microelectromechanical actuator according to claim 55 wherein the end portions are squeezed together by the further arching of the thermal arched beam to thereby increase arching of the driven beam.

61. A microelectromechanical actuator according to claim 55 wherein the end portion s are pulled a part by the further arching of the thermal arched beam to thereby decrease arching of the driven beam.

62. A microelectromechanical actuator according to claim 55 wherein the driver beam is coupled to one of the end portions of the driven beam.

63. A microelectromechanical actuator according to claim 62 further comprising an anchor that anchors the other end portion of the driven beam to the substrate.

64. A microelectromechanical actuator according to claim 55 wherein the actuator is a first actuator, wherein the driver beam is a first driver beam, the microelectromechanical actuator further comprising:

a second actuator on the substrate that includes a second driver beam that moves along the substrate upon actuation of the second actuator; and

wherein the driven beam is coupled to the first and second driver beams, such that the end portions thereof move relative to one another to arch the driven beam in response to the movement of the first and second driver beams.

65. A microelectromechanical actuator according to claim 55 wherein the actuator is a first actuator, wherein the driver beam is a first driver beam, the microelectromechanical actuator further comprising:

a second actuator on the substrate that includes a second driver beam that moves along the substrate upon actuation of the second actuator;

a second driven beam that is coupled to the second driver beam, the second driven beam moving along the substrate upon actuation of the second actuator; and

a third driven beam that is coupled to the first and second driven beams, the third driven beam including end portions that move relative to one another to change the arching of the third driven beam in response to the movement of the first and second driven beams;

wherein the optical attenuator is coupled to the third driven beam and is arranged to move into an optical path on the substrate in response to movement of the third driven arched beam along the substrate.