Acceleration sensor
First Claim
Patent Images
1. An acceleration sensor, comprising:
- an oscillating structure which is arranged on a substrate in a movably suspended manner, the oscillating structure capable of being deflected by an acting acceleration;
at least one mechanical decoupling device;
an analyzing arrangement detecting a deflection of the oscillating structure due to the acting acceleration, wherein at least one of the oscillating structure and the analyzing arrangement is connected to the substrate by the at least one mechanical decoupling device;
decoupling webs; and
holding webs attached to the substrate;
wherein;
the at least one mechanical decoupling device includes a frame connected to the holding webs via the decoupling webs; and
the oscillating structure is arranged in a suspension mount in the frame.
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Abstract
An acceleration sensor has an oscillating structure which is movably suspended on a substrate and can be deflected by an acting acceleration. The acceleration sensor also has an analyzing arrangement detecting a deflection of the oscillating structure due to the acceleration. The oscillating structure and/or the analyzing arrangement are connected to the substrate by mechanical decoupling devices.
17 Citations
24 Claims
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1. An acceleration sensor, comprising:
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an oscillating structure which is arranged on a substrate in a movably suspended manner, the oscillating structure capable of being deflected by an acting acceleration;
at least one mechanical decoupling device;
an analyzing arrangement detecting a deflection of the oscillating structure due to the acting acceleration, wherein at least one of the oscillating structure and the analyzing arrangement is connected to the substrate by the at least one mechanical decoupling device;
decoupling webs; and
holding webs attached to the substrate;
wherein;
the at least one mechanical decoupling device includes a frame connected to the holding webs via the decoupling webs; and
the oscillating structure is arranged in a suspension mount in the frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
comb structures composed of elongated plate-shaped webs, the comb structures being arranged parallel to one another, wherein the imaginary line extends parallel to the elongated plate-shaped webs.
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8. The acceleration sensor according to claim 1, wherein each of the holding webs is connected to the substrate at a symmetrically-arranged anchoring point.
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9. The acceleration sensor according to claim 8, wherein the anchoring point is located on an imaginary line extending along the substrate.
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10. The acceleration sensor according to claim 9, further comprising:
comb structures composed of elongated plate-shaped webs, the comb structures being arranged parallel to one another, wherein the imaginary line extends parallel to the elongated plate-shaped webs.
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11. The acceleration sensor according to claim 1, wherein the decoupling webs have an arc shape between the frame and the holding webs.
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12. The acceleration sensor according to claim 1, wherein the decoupling webs have an angled shape between the frame and the holding webs.
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13. The acceleration sensor according to claim 1, wherein the decoupling webs include four symmetrically-arranged decoupling webs, and wherein the frame is connected to the holding webs by the four decoupling webs.
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14. The acceleration sensor according to claim 1, wherein the oscillating structure is connected to the substrate by the at least one mechanical decoupling device.
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15. The acceleration sensor according to claim 1, wherein the analyzing arrangement is connected to the substrate by the at least one mechanical decoupling device.
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16. An acceleration sensor, comprising:
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an oscillating structure which is arranged on a substrate in a movably suspended manner, the oscillating structure capable of being deflected by an acting acceleration;
at least one mechanical decoupling device;
an analyzing arrangement detecting a deflection of the oscillating structure due to the acting acceleration, wherein the oscillating structure and the analyzing arrangement are connected to the substrate by the at least one mechanical decoupling device;
decoupling webs; and
holding webs attached to the substrate, wherein the at least one mechanical decoupling device includes a frame which is connected to the holding webs via the decoupling webs, and wherein the oscillating structure is arranged in a suspension mount in the frame. - View Dependent Claims (17, 18, 19, 20, 21, 22)
comb structures composed of elongated plate-shaped webs, the comb structures being arranged parallel to one another, wherein the imaginary line extends parallel to the elongated plate-shaped webs.
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20. The acceleration sensor according to claim 16, wherein the decoupling webs have an arc shape between the frame and the holding webs.
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21. The acceleration sensor according to claim 16, wherein the decoupling webs have an angled shape between the frame and the holding webs.
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22. The acceleration sensor according to claim 16, wherein the decoupling webs include four symmetrically-arranged decoupling webs, and wherein the frame is connected to the holding webs by the four decoupling webs.
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23. An acceleration sensor, comprising:
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an oscillating structure which is arranged on a substrate in a movably suspended manner, the oscillating structure capable of being deflected by an acting acceleration;
at least one mechanical decoupling device;
an analyzing arrangement detecting a deflection of the oscillating structure due to the acting acceleration, wherein the oscillating structure and the analyzing arrangement are connected to the substrate by the at least one mechanical decoupling device;
decoupling webs; and
at least one holding web attached to the substrate, wherein the analyzing arrangement is connected by the decoupling webs to the at least one holding web;
wherein the at least one mechanical decoupling device includes a frame which is connected to the at least one holding web via the decoupling webs, and wherein the analyzing arrangement is connected to the frame. - View Dependent Claims (24)
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Specification