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Acceleration sensor

  • US 6,360,604 B1
  • Filed: 10/09/1999
  • Issued: 03/26/2002
  • Est. Priority Date: 05/10/1997
  • Status: Expired due to Term
First Claim
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1. An acceleration sensor, comprising:

  • an oscillating structure which is arranged on a substrate in a movably suspended manner, the oscillating structure capable of being deflected by an acting acceleration;

    at least one mechanical decoupling device;

    an analyzing arrangement detecting a deflection of the oscillating structure due to the acting acceleration, wherein at least one of the oscillating structure and the analyzing arrangement is connected to the substrate by the at least one mechanical decoupling device;

    decoupling webs; and

    holding webs attached to the substrate;

    wherein;

    the at least one mechanical decoupling device includes a frame connected to the holding webs via the decoupling webs; and

    the oscillating structure is arranged in a suspension mount in the frame.

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