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Cavity resonator for reducing phase noise of voltage controlled oscillator

  • US 6,362,706 B1
  • Filed: 03/31/2000
  • Issued: 03/26/2002
  • Est. Priority Date: 03/31/1999
  • Status: Expired due to Term
First Claim
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1. A cavity resonator comprising:

  • a semiconductor having a cavity which is defined by four sides, an upper surface and a lower surface;

    a lower metal film located on said four sides and on said lower surface of said cavity in said semiconductor;

    an upper ground plane metal film which covers said upper surface of said cavity in said semiconductor;

    a microstrip line, of predetermined width, which extends from one end of the cavity across to the other end of the cavity to serve as a waveguide, wherein the microstrip line is disposed a uniform predetermined distance from the upper ground plane metal film of the cavity opposite to said lower surface of said cavity; and

    a slot in said upper ground plane metal film, wherein the slot is positioned perpendicular to the microstrip line.

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